专利检索 ap:("CALIFORNIA INST OF TECHN") AND inv:"HAN ZHIGANG" 第 1 页

1.

发明公开
IC-COMPATIBLE PARYLENE MEMS TECHNOLOGY AND ITS APPLICATION IN INTEGRATED SENSORS 审中-公开
标题翻译： IC兼容PARYLENE MEMS技术及其在组合传感器应用

公开(公告)号：EP1186002A4

公开(公告)日：2009-01-14

申请号：EP00913858

申请日：2000-03-10

申请人： CALIFORNIA INST OF TECHN

发明人： JIANG FUKANG , HAN ZHIGANG , WANG XUAN-QI , TAI YU-CHONG

IPC分类号： B81C1/00 , B81B3/00 , B81B7/02 , H01L21/00 , H01L21/302 , H01L21/3065 , H01L29/84

CPC分类号： B81C1/00246 , B81B2203/0127 , B81C2203/0735

摘要： A combined IC/Mems process forms the IC parts first, and then forms the MEMS parts (110). One option forms a parylene overlayer, then forms a cavity under the parylene overlayer.