公开(公告)号：EP1391017A4

公开(公告)日：2006-04-12

申请号：EP02769658

申请日：2002-04-15

申请人： CYMER INC

发明人： WITTAK CHRISTIAN J ,  PARTLO WILLIAM N ,  SANDSTROM RICHARD L ,  MELCHER PAUL C ,  JOHNS DAVID M ,  SAETHRE ROBERT B ,  NESS RICHARD M ,  RETTIG CURTIS L ,  SHANNON ROBERT A ,  UJAZDOWSKI RICHARD C ,  ROKNI SHAHRYAR ,  SMITH SCOTT ,  ANDERSON STUART L ,  ALGOTS JOHN M ,  SPANGLER RONALD L ,  FOMENKOV IGOR ,  STEIGER THOMAS D ,  EMILO JEROME A ,  TITUS CLAY C ,  IVASCHENKO ALEX P

IPC分类号： H01S3/097 ,  G03F7/20 ,  H01S3/00 ,  H01S3/036 ,  H01S3/038 ,  H01S3/041 ,  H01S3/0975 ,  H01S3/134 ,  H01S3/139 ,  H01S3/225 ,  H01S3/23 ,  H01S3/104

CPC分类号： G03F7/70025 ,  G03F7/70933 ,  H01S3/0057 ,  H01S3/036 ,  H01S3/0385 ,  H01S3/041 ,  H01S3/0975 ,  H01S3/134 ,  H01S3/139 ,  H01S3/225 ,  H01S3/2251 ,  H01S3/2256 ,  H01S3/2258 ,  H01S3/2366

摘要： The present invention provides an excimer laser capable of producing a high quality pulsed laser beam at pulse rates of about 4,000 Hz at pulse energies of about 5mJ or greater. A preferred embodiment is an ArF excimer laser specifically designed as a light source for integrated circuit lithography. An improved wavemeter (4K) with special software monitors output beam parameters and controls a very fast PZT driven tuning mirror, which is in a line narrowing module (15K) and the pulse power charging voltage to maintain wavelength and pulse energy within desired limits. In a preferred embodiment two fan motors (16K and 17K) drive a single tangential fan which provides sufficient gas flow to clear discharge debris from the the discharge region during the approximately 0.25 milliseconds between pulses.

公开(公告)号：EP1407521A4

公开(公告)日：2005-11-23

申请号：EP02744246

申请日：2002-06-05

申请人： CYMER INC

发明人： TITUS CLAY C ,  HULBURD WILLIAM G ,  CYBULSKI RAYMOND F ,  ALGOTS JOHN M ,  LYSIK MICHAEL S

IPC分类号： H01S3/225 ,  G03F7/20 ,  H01S3/03 ,  H01S3/034 ,  H01S3/036 ,  H01S3/04 ,  H01S3/08 ,  H01S3/081 ,  H01S3/086 ,  H01S3/0943 ,  H01S3/1055 ,  H01S3/13 ,  H01S3/134 ,  H01S3/137 ,  H01S3/139 ,  H01S3/10

CPC分类号： H01S3/036 ,  G03F7/70025 ,  G03F7/70575 ,  H01S3/02 ,  H01S3/03 ,  H01S3/034 ,  H01S3/0401 ,  H01S3/08009 ,  H01S3/08059 ,  H01S3/0812 ,  H01S3/086 ,  H01S3/13 ,  H01S3/134 ,  H01S3/1392 ,  H01S3/225 ,  H01S3/2256

摘要： A grating based line narrowing device for line narrowing lasers producing high energy laser beams. A flexure grating mount is provided which virtually eliminates stress on the grating caused by differential thermal expansion between the grating and the housing structure. The grating which is comprised of a very thin aluminum surface on a thick ultra low expansion glass substrate is attached to an aluminum housing structure using a flexure grating mount. At least one flexure joint is provided in the grating mount which permits thermal expansion and contraction of the substrate. In some embodiments the mount comprises a metal plate and the flexure joint is a H-Flex joint (124) with four legs (126) which is machined into the metal plate. In another embodiment two H-Flex joints are provided. In other embodiments, the flexure joint is a dovetail joint permitting one end of the mount to slip relative to the other.

摘要翻译： 一种用于生产高能量激光束的线变窄激光器的基于光栅的线变窄装置。 提供挠曲光栅架，其实质上消除了由光栅与壳体结构之间的不同热膨胀引起的对光栅的应力。 由厚的超低膨胀玻璃基板上的非常薄的铝表面构成的光栅使用柔性光栅架安装到铝外壳结构上。 在光栅架中至少设置一个挠性接头，该挠性接头允许衬底的热膨胀和收缩。 在一些实施例中，安装件包括金属板并且挠曲接头是具有加工到金属板中的四条腿（126）的H-Flex接头（124）。 在另一个实施例中，提供了两个H-Flex接头。 在其他实施例中，挠曲接头是燕尾接头，其允许安装件的一端相对于另一端滑动。