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公开(公告)号:EP4361586A1
公开(公告)日:2024-05-01
申请号:EP23205694.5
申请日:2023-10-25
申请人: Calumino Pty Ltd
IPC分类号: G01J5/00 , G01J5/0831 , G01J5/0803 , G01J5/08 , G01J5/40 , G01J5/10 , G01J5/0806 , H04N5/33
CPC分类号: G01J2005/007720130101 , H04N5/33 , G01J5/0806 , G01J2005/10620130101 , G01J5/00 , G01J5/0831 , G01J5/0803 , G01J5/40 , G01J5/0896
摘要: It is disclosed a thermal imaging device having a scan mechanism operable to effectuate sequentially predetermined offsets, each configured between a thermal image of thermal radiations in a defined area on an imaging plane and an array of micro mirrors configured on a substrate. A respective image of a light pattern of a light beam reflected by a light reflection portion of each respective micro mirror in the array can be captured, when a rotation of the respective micro mirror, caused by radiation incident on a radiation absorption surface of the respective micro mirror, is stabilized at a respective offset. After computing a respective measurement of intensity measured by the respective micro mirror based on the respective image captured for the respective offset, a processor computes measurements of intensity of radiation in sub-areas of the thermal image, from measurements of intensity for the predetermined offsets, to generate a high resolution output.