SOLID-STATE IMAGE PICKUP APPARATUS AND IMAGE PICKUP SYSTEM

    公开(公告)号:EP3514831A3

    公开(公告)日:2019-11-06

    申请号:EP19155743.8

    申请日:2009-12-26

    摘要: A solid-state image pickup apparatus (100) according to the present invention in which a first substrate (104) including a photoelectric conversion element (112) and a gate electrode (114) of a transistor, and a second substrate (108) including a peripheral circuit portion are placed upon each other. The first substrate does not include a high-melting-metal compound layer, and the second substrate includes a high-melting-metal compound layer. By such a structure, using a simple structure, it becomes possible for a transistor at the peripheral circuit portion to operate at a higher speed, and a signal readout operation to be performed at a high speed while suppressing a reduction in the characteristics of the photoelectric conversion element.

    SOLID-STATE IMAGE PICKUP APPARATUS AND IMAGE PICKUP SYSTEM

    公开(公告)号:EP3955303A2

    公开(公告)日:2022-02-16

    申请号:EP21194983.9

    申请日:2009-12-26

    摘要: A solid-state image pickup apparatus (100) according to the present invention in which a first substrate (104) including a photoelectric conversion element (112) and a gate electrode (114) of a transistor, and a second substrate (108) including a peripheral circuit portion are placed upon each other. The first substrate does not include a high-melting-metal compound layer, and the second substrate includes a high-melting-metal compound layer (130). By such a structure, using a simple structure, it becomes possible for a transistor at the peripheral circuit portion to operate at a higher speed, and a signal readout operation to be performed at a high speed while suppressing a reduction in the characteristics of the photoelectric conversion element.

    SOLID-STATE IMAGE PICKUP APPARATUS AND IMAGE PICKUP SYSTEM

    公开(公告)号:EP3514831A2

    公开(公告)日:2019-07-24

    申请号:EP19155743.8

    申请日:2009-12-26

    摘要: A solid-state image pickup apparatus (100) according to the present invention in which a first substrate (104) including a photoelectric conversion element (112) and a gate electrode (114) of a transistor, and a second substrate (108) including a peripheral circuit portion are placed upon each other. The first substrate does not include a high-melting-metal compound layer, and the second substrate includes a high-melting-metal compound layer. By such a structure, using a simple structure, it becomes possible for a transistor at the peripheral circuit portion to operate at a higher speed, and a signal readout operation to be performed at a high speed while suppressing a reduction in the characteristics of the photoelectric conversion element.

    SOLID-STATE IMAGE PICKUP DEVICE AND IMAGE PICKUP SYSTEM
    7.
    发明公开
    SOLID-STATE IMAGE PICKUP DEVICE AND IMAGE PICKUP SYSTEM 有权
    固态图像记录装置和图像记录系统

    公开(公告)号:EP2517248A1

    公开(公告)日:2012-10-31

    申请号:EP10807492.3

    申请日:2010-12-22

    IPC分类号: H01L27/146

    摘要: The present invention relates to a solid-state image pickup device. The device includes a first substrate including a photoelectric conversion element and a transfer gate electrode configured to transfer charge from the photoelectric conversion element, a second substrate having a peripheral circuit portion including a circuit configured to read a signal based charge generated in the photoelectric conversion element, the first and second substrates being laminated. The device further includes a multilayer interconnect structure, disposed on the first substrate, including an aluminum interconnect and a multilayer interconnect structure, disposed on the second substrate, including a copper interconnect.

    SOLID-STATE IMAGE PICKUP APPARATUS AND IMAGE PICKUP SYSTEM

    公开(公告)号:EP3955303A3

    公开(公告)日:2022-05-11

    申请号:EP21194983.9

    申请日:2009-12-26

    摘要: A solid-state image pickup apparatus (100) according to the present invention in which a first substrate (104) including a photoelectric conversion element (112) and a gate electrode (114) of a transistor, and a second substrate (108) including a peripheral circuit portion are placed upon each other. The first substrate does not include a high-melting-metal compound layer, and the second substrate includes a high-melting-metal compound layer (130). By such a structure, using a simple structure, it becomes possible for a transistor at the peripheral circuit portion to operate at a higher speed, and a signal readout operation to be performed at a high speed while suppressing a reduction in the characteristics of the photoelectric conversion element.

    PHOTOELECTRIC CONVERSION DEVICE, MANUFACTURING METHOD THEREOF, AND APPARATUS

    公开(公告)号:EP3477703A1

    公开(公告)日:2019-05-01

    申请号:EP18201016.5

    申请日:2018-10-17

    发明人: ENDO, Nobuyuki

    IPC分类号: H01L27/146

    摘要: A photoelectric conversion device (AP) comprises a semiconductor substrate (SUB) including a photoelectric conversion portion, a silicon oxide film (116) arranged above the photoelectric conversion portion, and an insulating film (106) arranged between the photoelectric conversion portion and the silicon oxide film. An n-type first impurity region (104) constituting part of the photoelectric conversion portion and a p-type second impurity region (112) arranged between the insulating film and the first impurity region are provided in the semiconductor substrate. A portion of the insulating film above the second impurity region, and the second impurity region contain boron. An integrated value of a boron concentration from the surface of the semiconductor substrate to a first position where a boron concentration takes a minimal value in the second impurity region is larger than that from the surface of the semiconductor substrate to an upper surface of the silicon oxide film.