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公开(公告)号：EP3440498A1
公开(公告)日：2019-02-13
申请号：EP17702868.5
申请日：2017-02-02
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公开(公告)号：EP0998689A1
公开(公告)日：2000-05-10
申请号：EP99925007.9
申请日：1999-05-19
申请人： CARL ZEISS JENA GmbH
IPC分类号： G02B21/00
摘要： The invention relates to an optical near-field microscope, comprising a probe tip (SP) which is located on one side of a transparent sample (P) and is moved in a raster-type manner, and which serves as a point light source; and an optical system (O1) which is located on the other side of the sample, for collecting the light transmitted by the sample and transmitting it to a detection unit (DT) or for collecting illumination light, the detection side being adapted to the movement of the probe tip. Alternatively, the probe is used to detect the sample light, a detection unit is arranged downstream of the probe in the direction of illumination, and raster-type illumination is provided on the other side of the sample, this raster-type illumination being adapted to the movement of the probe.
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公开(公告)号：EP0764261A1
公开(公告)日：1997-03-26
申请号：EP96914884.0
申请日：1996-04-04
申请人： CARL ZEISS JENA GmbH
摘要： Disclosed is an instrument for determining the topography of a surface, the instrument including an oscillating scanner (2) comprising a piezo-electric resonator with a micro-scanning tip (25). The instrument also includes a piezo-electric actuator (1) for controlling the distance between the resonator tip (25) and the surface of the sample (5). In addition, it has a first device for measuring the tunnel current between the resonator tip (25) and the surface of the sample (5) and controlling, as a function of this current, the piezo-electric actuator (1). Also fitted is a second device for measuring the resonance behaviour of the piezo-electric resonator and for controlling the piezo-electric actuator (1) as a function of changes in the oscillation amplitudes, resonance frequencies or phase shifts which occur, a third device for measuring the harmonic component of the tunnel current, and a switch (13) by means of which the first, second or third device can be connected to the piezo-electric actuator (1).
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公开(公告)号：EP0764261B1
公开(公告)日：2001-07-11
申请号：EP96914884.0
申请日：1996-04-04
申请人： CARL ZEISS JENA GmbH
摘要： Disclosed is an instrument for determining the topography of a surface, the instrument including an oscillating scanner (2) comprising a piezo-electric resonator with a micro-scanning tip (25). The instrument also includes a piezo-electric actuator (1) for controlling the distance between the resonator tip (25) and the surface of the sample (5). In addition, it has a first device for measuring the tunnel current between the resonator tip (25) and the surface of the sample (5) and controlling, as a function of this current, the piezo-electric actuator (1). Also fitted is a second device for measuring the resonance behaviour of the piezo-electric resonator and for controlling the piezo-electric actuator (1) as a function of changes in the oscillation amplitudes, resonance frequencies or phase shifts which occur, a third device for measuring the harmonic component of the tunnel current, and a switch (13) by means of which the first, second or third device can be connected to the piezo-electric actuator (1).
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公开(公告)号：EP0627068B1
公开(公告)日：1998-11-25
申请号：EP94903857.4
申请日：1993-12-21
申请人： CARL ZEISS JENA GmbH
IPC分类号： G01B7/00
CPC分类号： G01B7/012
摘要： In a probe element for coordinate measurement systems which use micro probes (2) and piezo-resonators (3, 4, 5) whose resonance characteristics change when the probe is touched, the probe element comprises piezo-resonators (3, 4, 5) configured in a polygonal pattern on which micro-probes (2) are mounted in a polygonal pattern and trace inner and outer surface contours in various coordinates. Contact between the micro probes (2) and the surface of the sample is detected by measuring the changes in the resonance characteristics of the piezo-resonators (3, 4, 5).
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