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    INVESTIGATION OF HIGH-TEMPERATURE SPECIMENS IN A CHARGED PARTICLE MICROSCOPE
    3.
    发明公开
    INVESTIGATION OF HIGH-TEMPERATURE SPECIMENS IN A CHARGED PARTICLE MICROSCOPE 审中-公开
    不列颠舍腾赫尔

    公开(公告)号：EP3157041A1

    公开(公告)日：2017-04-19

    申请号：EP15189500.0

    申请日：2015-10-13

    申请人： FEI Company

    发明人： Novak, Libor ,  Hlavenka, Petr ,  Uncovsky, Marek ,  Cafourek, Martin

    IPC分类号： H01J37/244 ,  G01T1/20

    CPC分类号： H01J37/244 ,  H01J37/20 ,  H01J37/226 ,  H01J37/28 ,  H01J2237/2001 ,  H01J2237/2065 ,  H01J2237/2443 ,  H01J2237/2445 ,  H01J2237/24475 ,  H01J2237/2448

    摘要： A method of examining a specimen in a Charged Particle Microscope, comprising the following steps:
    - Providing a specimen on a specimen holder;
    - Heating the specimen to a temperature of at least 250°C;
    - Directing a beam of charged particles from a source through an illuminator so as to irradiate the specimen;
    - Using a detector to detect a flux of electrons emanating from the specimen in response to said irradiation,

    wherein said detector comprises:
    - A scintillator module, which produces photons in response to impingement by electrons in said flux;
    - A photon sensor, for sensing said photons,

    and is configured to:
    - Preferentially register a first category of photons, associated with impingement of electrons on said scintillator module;
    - Selectively suppress a second category of photons, comprising thermal radiation from the heated specimen.

    摘要翻译： 一种在带电粒子显微镜中检查样品的方法，包括以下步骤： - 将样品置于样品架上; - 将样品加热至至少250℃的温度; - 将来自源的带电粒子束通过照射器引导以照射样本; - 使用检测器来响应于所述照射来检测从样品发射的电子流，其中所述检测器包括： - 闪烁体模块，其响应于所述焊剂中的电子的撞击而产生光子; - 用于感测所述光子的光子传感器，并且被配置为： - 优选地将与电子撞击在所述闪烁体模块上的第一类光子对准; - 选择性地抑制第二类光子，包括来自加热样品的热辐射。

    SAMPLE HEATING HOLDER FOR ELECTRON BEAM MICROSCOPES OR ANALYZERS, AND SAMPLE HEATING METHOD USING THE SAME
    9.
    发明公开
    SAMPLE HEATING HOLDER FOR ELECTRON BEAM MICROSCOPES OR ANALYZERS, AND SAMPLE HEATING METHOD USING THE SAME 审中-公开
    PROBENERWÄRMUNGSHALTERFÜRELEKTRONENSTRAHLMIKROSKOPE ODER ANALYSATOREN UNDPROBENERWÄRMUNGSVERFAHRENDAMIT

    公开(公告)号：EP2757572A1

    公开(公告)日：2014-07-23

    申请号：EP12831362.4

    申请日：2012-08-23

    申请人： JFE Steel Corporation

    发明人： YAMASHITA,Takako ,  NORO, Hisato ,  SEKIMOTO, Mitsuyoshi ,  WATANABE, Manabu ,  KAJIMA, Yoshihisa

    IPC分类号： H01J37/20

    CPC分类号： H01J37/20 ,  H01J2237/022 ,  H01J2237/2001

    摘要： The invention provides a sample heating holder for electron beam microscopes or analyzers and a sample heating method using the holder, which can prevent stably the occurrence of contaminants on the sample surface without entailing ultrahigh vacuum evacuation or destructing the sample surface. The sample heating holder for an electron beam microscope or analyzer has excellent performance in the suppression of the growth of carbon contaminations and the occurrence of a thermal drift during observation and analysis, and includes a positive temperature coefficient (PTC) thermistor as a heating element.

    摘要翻译： 本发明提供一种用于电子束显微镜或分析仪的样品加热夹持器以及使用该保持器的样品加热方法，其可以防止在样品表面上稳定地发生污染物的出现，而不需要超高真空抽真空或破坏样品表面。 用于电子束显微镜或分析仪的样品加热保持器在抑制碳污染物的生长和观察和分析期间的热漂移的发生方面具有优异的性能，并且包括作为加热元件的正温度系数（PTC）热敏电阻。