公开(公告)号：EP2301056A1

公开(公告)日：2011-03-30

申请号：EP08771626.2

申请日：2008-06-20

申请人： Carl Zeiss NTS, LLC.

发明人： WARD, Billy, W. ,  SANFORD, Colin A. ,  NOTTE IV, John A. ,  GHOHOLSKI, Alexander ,  DIMANNA, Mark

IPC分类号： H01J27/26 ,  H01J37/08 ,  F25D19/00

CPC分类号： H01J27/26 ,  F25D19/006 ,  H01J37/067 ,  H01J37/08 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/002 ,  H01J2237/0216 ,  H01J2237/024 ,  H01J2237/061 ,  H01J2237/0805 ,  H01J2237/0807 ,  H01J2237/244 ,  H01J2237/2487 ,  H01J2237/2826

摘要： Ion sources, systems and methods are disclosed. In some embodiments, the ion sources, systems and methods can exhibit relatively little undesired vibration and/or can sufficiently dampen undesired vibration. This can enhance performance (e.g., increase reliability, stability and the like).