专利检索 ap:("Centre National de la Recherche Scientifique" OR "Université Paris-Sud 11 (Paris XI)") AND inv:"ZAGONEL, Luiz, Fernando" 第 1 页

1.

发明授权
SYSTEME DE DETECTION DE CATHODOLUMINESCENCE SOUPLE ET MICROSCOPE METTANT EN OEUVRE UN TEL SYSTEME 有权
标题翻译：具有柔性阴极和显微镜的利用这种系统检测系统

公开(公告)号：EP2577706B1

公开(公告)日：2014-07-23

申请号：EP11723542.4

申请日：2011-04-29

申请人： Centre National de la Recherche Scientifique , Université Paris-Sud 11 (Paris XI)

发明人： KOCIAK, Mathieu , ZAGONEL, Luiz, Fernando , TENCE, Marcel , MAZZUCCO, Stefano

IPC分类号： H01J37/244 , H01J37/256 , H01J37/26 , H01J37/22 , H01J37/02

CPC分类号： H01J37/244 , H01J37/023 , H01J37/228 , H01J37/256 , H01J37/26 , H01J2237/024 , H01J2237/2482

2.

发明公开
SYSTEME DE DETECTION DE CATHODOLUMINESCENCE SOUPLE ET MICROSCOPE METTANT EN OEUVRE UN TEL SYSTEME 有权
标题翻译：具有柔性阴极和显微镜的利用这种系统检测系统

公开(公告)号：EP2577706A1

公开(公告)日：2013-04-10

申请号：EP11723542.4

申请日：2011-04-29

申请人： Centre National de la Recherche Scientifique

发明人： KOCIAK, Mathieu , ZAGONEL, Luiz, Fernando , TENCE, Marcel , MAZZUCCO, Stefano

IPC分类号： H01J37/02 , H01J37/244 , H01J37/256

CPC分类号： H01J37/244 , H01J37/023 , H01J37/228 , H01J37/256 , H01J37/26 , H01J2237/024 , H01J2237/2482

摘要： The invention relates to a cathodoluminescence detection system comprising: a collecting optic (112) collecting light radiation (108) from a sample illuminated by a beam of charged particles and reflecting said radiation (108) onto analysis means, said collecting optic (112) being placed in a chamber, called a vacuum chamber, wherein the pressure is below atmospheric pressure; and means (316) for adapting the light radiation, placed downstream of the collecting optic (112) and designed to adapt said light radiation (108) at the inlet of the analysis means. Said system is characterized in that all or part of the adapting means (316) is placed in an environment where the pressure is higher than the pressure in said vacuum chamber.