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1.发明公开SYSTEME DE DETECTION DE CATHODOLUMINESCENCE SOUPLE ET MICROSCOPE METTANT EN OEUVRE UN TEL SYSTEME 有权具有柔性阴极和显微镜的利用这种系统检测系统
公开(公告)号：EP2577706A1
公开(公告)日：2013-04-10
申请号：EP11723542.4
申请日：2011-04-29
IPC分类号： H01J37/02 , H01J37/244 , H01J37/256
CPC分类号： H01J37/244 , H01J37/023 , H01J37/228 , H01J37/256 , H01J37/26 , H01J2237/024 , H01J2237/2482
摘要： The invention relates to a cathodoluminescence detection system comprising: a collecting optic (112) collecting light radiation (108) from a sample illuminated by a beam of charged particles and reflecting said radiation (108) onto analysis means, said collecting optic (112) being placed in a chamber, called a vacuum chamber, wherein the pressure is below atmospheric pressure; and means (316) for adapting the light radiation, placed downstream of the collecting optic (112) and designed to adapt said light radiation (108) at the inlet of the analysis means. Said system is characterized in that all or part of the adapting means (316) is placed in an environment where the pressure is higher than the pressure in said vacuum chamber.
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2.发明公开SYSTEME DE DETECTION DE CATHODOLUMINESCENCE REGLABLE ET MICROSCOPE METTANT EN OEUVRE UN TEL SYSTEME 有权定制KATHODOLUMINESZENZDETEKTIONSYSTEM和显微镜的这种系统
公开(公告)号：EP2577707A1
公开(公告)日：2013-04-10
申请号：EP11723543.2
申请日：2011-04-29
IPC分类号： H01J37/02 , H01J37/244 , H01J37/256
CPC分类号： G01N23/2254 , G01N2201/08 , H01J37/228 , H01J37/244 , H01J37/261 , H01J37/28 , H01J2237/024 , H01J2237/063 , H01J2237/24475 , H01J2237/2448 , H01J2237/24485 , H01J2237/2602 , H01J2237/2802 , H01J2237/2808
摘要： Cathodoluminescence detection system comprising a collecting optic (112), for collecting light radiation coming from a specimen illuminated by a beam of charged particles and reflecting said light radiation onto analysis means, characterized in that it comprises means (606,614-618) for positioning said collecting optic (112) along at least one dimension.
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3.发明授权SYSTEME DE DETECTION DE CATHODOLUMINESCENCE SOUPLE ET MICROSCOPE METTANT EN OEUVRE UN TEL SYSTEME 有权具有柔性阴极和显微镜的利用这种系统检测系统
公开(公告)号：EP2577706B1
公开(公告)日：2014-07-23
申请号：EP11723542.4
申请日：2011-04-29
IPC分类号： H01J37/244 , H01J37/256 , H01J37/26 , H01J37/22 , H01J37/02
CPC分类号： H01J37/244 , H01J37/023 , H01J37/228 , H01J37/256 , H01J37/26 , H01J2237/024 , H01J2237/2482
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4.发明授权SYSTEME DE DETECTION DE CATHODOLUMINESCENCE REGLABLE ET MICROSCOPE METTANT EN OEUVRE UN TEL SYSTEME 有权定制KATHODOLUMINESZENZDETEKTIONSYSTEM和显微镜的这种系统
公开(公告)号：EP2577707B1
公开(公告)日：2014-04-09
申请号：EP11723543.2
申请日：2011-04-29
IPC分类号： H01J37/28 , H01J37/244 , H01J37/02 , H01J37/256 , G01N23/02 , H01J37/22
CPC分类号： G01N23/2254 , G01N2201/08 , H01J37/228 , H01J37/244 , H01J37/261 , H01J37/28 , H01J2237/024 , H01J2237/063 , H01J2237/24475 , H01J2237/2448 , H01J2237/24485 , H01J2237/2602 , H01J2237/2802 , H01J2237/2808
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