公开(公告)号：EP1002140A1

公开(公告)日：2000-05-24

申请号：EP98905069.5

申请日：1998-02-17

申请人： Chorus Corporation

发明人： COLOMBO, Paul, E. ,  PRIDDY, Scott

IPC分类号： C23C14/24 ,  C30B23/06

CPC分类号： C23C14/243 ,  C30B23/066

摘要： This invention is a sublimating and cracking apparatus for producing a beam of molecules to be deposited on a substrate, and an apparatus which is particularly useful with phosphorus as the source material. In the phosphorus effusion cell of this invention, a vacuum jacket (10) encloses and supports a red phosphorus crucible (12), a condensing crucible for white phosphorus (14) and a connecting tube (16) within a vacuum space (19). In use, red phosphorus is first transformed and deposited as white phosphorus in the condensing chamber. The white phosphorus is then directed to a cracker section (20) where it is cracked and subsequently directed to the substrate.

公开(公告)号：EP0826131A1

公开(公告)日：1998-03-04

申请号：EP96915496.0

申请日：1996-05-03

申请人： Chorus Corporation

发明人： COLOMBO, Paul, E. ,  DONADIO, Robert, F

IPC分类号： C30B23 ,  C04B35 ,  C23C14 ,  C23C16 ,  F27B14 ,  F27D1 ,  H01L21

CPC分类号： F27D1/1636 ,  C04B35/583 ,  C23C14/243 ,  C23C16/01 ,  C23C16/342 ,  C30B23/066 ,  F27B14/10 ,  F27B2014/102 ,  Y10T428/131

摘要： A unibody, monolithic, one-piece negative draft crucible (40) for an MBE effusion cell. The crucible maximizes capacity, uniformity and long term flux stability, and minimizes oval defects, depletion effects, and short term shutter-related flux transients.