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1.发明授权
公开(公告)号：EP1433203B1
公开(公告)日：2018-08-15
申请号：EP02783186.6
申请日：2002-09-20
CPC分类号： G01P15/0802 , H01L21/486 , H01L23/49827 , H01L24/81 , H01L2224/81801 , H01L2924/01087
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2.发明授权
公开(公告)号：EP1929250B1
公开(公告)日：2012-12-19
申请号：EP06793195.6
申请日：2006-09-04
申请人： Peugeot Citroën Automobiles SA , Commissariat à l'Énergie Atomique et aux Énergies Alternatives
IPC分类号： G01D5/48
CPC分类号： G01D21/00
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公开(公告)号：EP2850420A1
公开(公告)日：2015-03-25
申请号：EP13724209.5
申请日：2013-05-13
IPC分类号： G01N27/22
摘要： A method for producing a capacitive sensor, comprising steps consisting of: (a) forming trenches (105) in a support (100) made from at least one given material by etching said at least one given material, (b) making said given material porous at the walls and the bottom of the trenches, (c) filling the trenches (105) with a conductive material (110).
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公开(公告)号：EP3234535A1
公开(公告)日：2017-10-25
申请号：EP15813072.4
申请日：2015-12-18
IPC分类号： G01L19/14
摘要： Pressure sensor suited to measuring low pressures, comprising a body extending in a plane, the said body comprising a measurement zone (6), situated at the end of the body, a connection zone (10) situated at another end of the body, the said measurement zone (6) comprising a cavity (12) delimited by a wall (14) that is deformable under the effect of a difference in pressure between the inside of the cavity and an external environment (E), the said deformable wall (14) being situated at rest in a plane parallel to the plane of the sensor, the said sensor also comprising means of measuring the deformation of the deformable wall (14), the said measurement means being situated in the cavity (12), means of electrical connection connecting the measurement means to the connection zone (10), said means of electrical connection being arranged in the body.
摘要翻译： 适于测量低压的压力传感器，包括在平面中延伸的主体，所述主体包括位于主体的端部处的测量区域（6），位于主体的另一端处的连接区域（10）， 所述测量区域（6）包括由壁（14）限定的空腔（12），该空腔在空腔内部和外部环境（E）之间的压力差作用下可变形，所述可变形壁（14 ）位于与传感器平面平行的平面内，所述传感器还包括测量可变形壁（14）的变形的装置，所述测量装置位于腔体（12）中，电气装置 将测量装置连接到连接区域（10）的连接，所述电连接装置布置在主体中。
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7.发明授权STRUCTURE DE CAPTEUR NOTAMMENT POUR UN ENVIRONNEMENT SEVERE DANS UN VEHICULE AUTOMOBILE 有权传感器结构尤其是对恶劣环境的机动车辆
公开(公告)号：EP1893963B1
公开(公告)日：2012-11-21
申请号：EP06763744.7
申请日：2006-06-15
申请人： Commissariat à l'Énergie Atomique et aux Énergies Alternatives , PEUGEOT CITROËN AUTOMOBILES S.A.
CPC分类号： G01L19/086 , G01K1/024 , G01K13/00 , G01L23/10 , G01L23/22
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8.发明授权
公开(公告)号：EP2304416B1
公开(公告)日：2019-09-11
申请号：EP09797450.5
申请日：2009-06-22
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9.发明公开STRUCTURE MECANIQUE COMPRENANT UN ACTIONNEUR ET DES MOYENS D'AMPLIFICATION MECANIQUE ET PROCEDE DE FABRICATION 审中-公开结构MECANIQUE COMPRENANT UN ACTIONNEUR ET DES DES MOYENS D'AMPLIFICATION MECANIQUE ET PROCEDE DE FABRICATION
公开(公告)号：EP3201121A1
公开(公告)日：2017-08-09
申请号：EP15771957.6
申请日：2015-09-30
CPC分类号： B06B3/00 , B06B1/045 , B06B1/06 , B81B3/0021 , B81B3/0024 , B81B2201/032 , H01L41/094 , H01L41/18 , H01L41/25
摘要： The invention relates to a mechanical structure comprising a stack containing an active substrate (10) and at least one actuator (20) suitable for generating vibrations in the region of said active substrate, said stack comprising a basic structure for the amplification of said vibrations (30), arranged between said actuator and said active substrate, the structure being used to transmit and amplify said vibrations; and comprising at least one trench (Ti) arranged between said actuator and said active substrate. The invention also relates to a method for producing said structure, comprising the use of a temporary substrate.
摘要翻译： 本发明涉及一种机械结构，该机械结构包括包含有源衬底（10）和适于在所述有源衬底的区域中产生振动的至少一个致动器（20）的叠层，所述叠层包括用于放大所述振动的基本结构 布置在所述致动器和所述有源衬底之间，所述结构用于传输和放大所述振动; 并且包括布置在所述致动器和所述有源衬底之间的至少一个沟槽（Ti）。 本发明还涉及一种用于制造所述结构的方法，包括使用临时衬底。
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10.发明公开
公开(公告)号：EP2304416A1
公开(公告)日：2011-04-06
申请号：EP09797450.5
申请日：2009-06-22
CPC分类号： H01G5/0136 , B82Y15/00 , G01N27/225 , H01G5/0134 , H01G5/16
摘要： The invention relates to a humidity detector of the capacitive type, that comprises at least one nanoporous dielectric material provided between at least a first electrode of a capacitor and at least a second electrode of the capacitor, to a humidity detection or measuring device including such a detector, and to a method for making such a detector.
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