公开(公告)号：EP2443058A1

公开(公告)日：2012-04-25

申请号：EP10723626.7

申请日：2010-06-17

申请人： Commissariat à l'Énergie Atomique et aux Énergies Alternatives

发明人： CONSTANCIAS, Christophe ,  DALZOTTO, Bernard ,  FOURNEL, Frank ,  MICHALLON, Philippe ,  MORICEAU, Hubert ,  POUTEAU, Valérie

IPC分类号： B81C1/00 ,  G01L9/00

CPC分类号： B81C1/00158 ,  B81B2201/0264 ,  B81B2201/047 ,  B81C2201/017

摘要： The invention relates to a method for determining a minimum tension compensation stress for a membrane with a thickness no higher than one micron, secured to a frame having, in the absence of external stress, a desired deflection, in which: a°) the length, width and thickness of the membrane are selected, as well as the material and a residual stress thereof; b°) the weight of the membrane is calculated; c°) β, C and C* are calculated using suitable software; d°) the calculated deflection h is deduced; e°) the deflection is compared with the desired deflection; f°) if said calculated deflection is greater than the desired deflection, the residual stress is adjusted so that the calculated deflection is no higher than the desired deflection; g°) when the calculated deflection is no higher than the desired deflection, the minimum tension compensation stress is calculated.