VERFAHREN ZUM PRÄZISEN MESSBETRIEB EINES MIKROMECHANISCHEN DREHRATENSENSORS
    1.
    发明公开
    VERFAHREN ZUM PRÄZISEN MESSBETRIEB EINES MIKROMECHANISCHEN DREHRATENSENSORS 审中-公开
    VERFAHREN ZUMPRÄZISENMESSBETRIEB EINES MIKROMECHANISCHEN DREHRATENSENSORS

    公开(公告)号:EP2425206A1

    公开(公告)日:2012-03-07

    申请号:EP10718943.3

    申请日:2010-04-28

    IPC分类号: G01C19/56 G01P9/04

    CPC分类号: G01C19/5755 G01C19/5712

    摘要: The invention relates to a method for the precise measuring operation of a micromechanical rotation rate sensor, comprising at least one deflectably suspended seismic mass (1, 15, 20), at least one drive system for driving the seismic mass (1, 15, 20), and at least one first (2, 11, 18) and one second (3, 12, 19) trimming electrode element, which are jointly associated directly or indirectly with the seismic mass (1, 15, 20), wherein a first electrical trimming voltage (U
    T01 , U
    TL01 , U
    TR01 ) is set between the first trimming electrode element (2, 11, 18) and the seismic mass (1, 15, 20) and a second electrical trimming voltage (U
    T02 , U
    TL02 , U
    TR02 ) is set between the second trimming electrode element (3, 12, 19) and the seismic mass (1, 15, 20), wherein the first and the second electrical trimming voltage are set at least according to a quadrature parameter (U
    T ) and a resonance parameter (U
    f ).

    摘要翻译: 一种微机电转速传感器的精确测量操作的方法和装置,包括至少一个偏转悬挂的地震质量块,用于驱动地震质量块的至少一个驱动装置,以及至少一个第一和第二修整电极元件, 被共同分配给所述地震质量块,设置在所述第一修整电极元件和所述地震块之间的第一修整电压(UTO1,UTLO1,UTRO1)和被设置为第二修整电压(UTO2,UTLO2,UTRO2) 在第二修整电极元件和地震块之间,第一和第二修整电压至少被设置为正交参数(UT)和共振参数(Uf)的函数。

    DOPPELAXIALER DREHRATENSENSOR
    2.
    发明公开

    公开(公告)号:EP2406581A1

    公开(公告)日:2012-01-18

    申请号:EP10709479.9

    申请日:2010-03-11

    IPC分类号: G01C19/56

    CPC分类号: G01C19/574

    摘要: The invention relates to a micromechanical rotation rate sensor comprising at least one substrate, wherein the rotation rate sensor comprises at least one first and one second seismic mass, which are coupled to each other by means of at least one coupling beam, and wherein the rotation rate sensor is designed in such a way that the rotation rate sensor can detect rotation rates about at least one first and one second sensitive axis, wherein each seismic mass is associated with at least one actuator unit, with which the deflection behavior of the seismic mass can be influenced.

    摘要翻译: 一种微机电转速传感器,包括至少一个基板,其中所述转速传感器具有至少第一和第二震动块,所述第一和第二震动块通过至少一个耦合梁相互耦合,并且其中所述旋转速率传感器被实施 以这样的方式,其可以检测关于至少第一和第二感测轴的旋转速率,其中每个地震质量被分配至少一个致动器单元,通过该致动器单元可以影响地震块的偏转行为。

    DOPPELAXIALER, SCHOCKROBUSTER, DREHRATENSENSOR MIT INEINANDERLIEGENDEN, LINEAR SCHWINGENDEN SEISMISCHEN ELEMENTEN
    4.
    发明公开
    DOPPELAXIALER, SCHOCKROBUSTER, DREHRATENSENSOR MIT INEINANDERLIEGENDEN, LINEAR SCHWINGENDEN SEISMISCHEN ELEMENTEN 审中-公开
    DOPPELAXIALER,SHOCK HARDY,网,带卧旋转速率传感器,直线振动地震ELEMENTS

    公开(公告)号:EP2475960A1

    公开(公告)日:2012-07-18

    申请号:EP10750135.5

    申请日:2010-09-09

    IPC分类号: G01C19/56

    摘要: The invention relates to a micromechanical yaw rate sensor, comprising a substrate, the base area of which is oriented parallel to the x-y plane of a Cartesian coordinate system (x, y, z), wherein the yaw rate sensor comprises at least one first (1) and a second seismic mass (2), which are coupled to at least one first drive device (14), and are mounted, such that the first and second seismic masses (2) are driven in a drive mode so as to deflect in phase opposition, wherein the yaw rate sensor is designed such that it can detect yaw rates about at least two sensitive axes (z, y) that are substantially perpendicular to each other, wherein at least the second seismic mass (2) is designed as a frame, which surrounds the first seismic mass (1) at least partially with respect to the positioning in the x-y plane.