摘要:
The invention relates to a method for the precise measuring operation of a micromechanical rotation rate sensor, comprising at least one deflectably suspended seismic mass (1, 15, 20), at least one drive system for driving the seismic mass (1, 15, 20), and at least one first (2, 11, 18) and one second (3, 12, 19) trimming electrode element, which are jointly associated directly or indirectly with the seismic mass (1, 15, 20), wherein a first electrical trimming voltage (U T01 , U TL01 , U TR01 ) is set between the first trimming electrode element (2, 11, 18) and the seismic mass (1, 15, 20) and a second electrical trimming voltage (U T02 , U TL02 , U TR02 ) is set between the second trimming electrode element (3, 12, 19) and the seismic mass (1, 15, 20), wherein the first and the second electrical trimming voltage are set at least according to a quadrature parameter (U T ) and a resonance parameter (U f ).
摘要:
The invention relates to a micromechanical rotation rate sensor comprising at least one substrate, wherein the rotation rate sensor comprises at least one first and one second seismic mass, which are coupled to each other by means of at least one coupling beam, and wherein the rotation rate sensor is designed in such a way that the rotation rate sensor can detect rotation rates about at least one first and one second sensitive axis, wherein each seismic mass is associated with at least one actuator unit, with which the deflection behavior of the seismic mass can be influenced.
摘要:
The invention relates to a micromechanical yaw rate sensor, comprising a substrate, the base area of which is oriented parallel to the x-y plane of a Cartesian coordinate system (x, y, z), wherein the yaw rate sensor comprises at least one first (1) and a second seismic mass (2), which are coupled to at least one first drive device (14), and are mounted, such that the first and second seismic masses (2) are driven in a drive mode so as to deflect in phase opposition, wherein the yaw rate sensor is designed such that it can detect yaw rates about at least two sensitive axes (z, y) that are substantially perpendicular to each other, wherein at least the second seismic mass (2) is designed as a frame, which surrounds the first seismic mass (1) at least partially with respect to the positioning in the x-y plane.