公开(公告)号：EP1944841A2

公开(公告)日：2008-07-16

申请号：EP08000225.6

申请日：2000-09-19

申请人： Cymer, Inc.

发明人： Ershov, Alexander, I. ,  Onkels, Eckehard, D. ,  Das, Palash, P. ,  Partlo, William, N. ,  Hofmann, Thomas

IPC分类号： H01S3/10

CPC分类号： H01S3/10092 ,  G03F7/70025 ,  G03F7/70041 ,  G03F7/70483 ,  G03F7/70575 ,  H01S3/03 ,  H01S3/036 ,  H01S3/0385 ,  H01S3/08004 ,  H01S3/08009 ,  H01S3/0943 ,  H01S3/097 ,  H01S3/09705 ,  H01S3/0971 ,  H01S3/139 ,  H01S3/223 ,  H01S3/225 ,  H01S3/2258 ,  H01S3/2308 ,  H01S3/2325 ,  H01S3/2333 ,  H01S3/2366

摘要： An apparatus comprises a seed laser and an amplifier laser in communication with a processing device utilizing output light produced by the seed laser and amplifier laser device. The apparatus further comprises a laser controller for outputting a laser trigger signal. The seed laser excites a laser gas by a seed laser discharge caused by application of a seed laser discharge voltage across seed laser electrodes. The seed laser electrodes are disposed in a seed laser chamber where the laser gas is contained, from a seed laser discharge circuit. The seed laser discharge excites the laser gas in response to an input of the laser trigger signal to generate a seed laser light, and oscillates the seed laser light with a wavelength band being narrowed by a band narrowing unit including a grating. An amplifier amplifies the seed laser light by an amplifier discharge caused by amplification of an amplifier discharge voltage across amplify electrodes. The amplify electrodes are disposed in an amplifier chamber where the laser gas is sealed by means of an amplifier discharge circuit in response to an input of the laser trigger signal to emit an amplified laser output light to the processing device. A delay circuit sets a delay from light emission of the seed laser light to a start of the amplification discharge. The laser controller changes the delay time to synchronize the amplification discharge with the seed laser light.

摘要翻译： 一种设备包括种子激光器和放大器激光器，所述放大器激光器利用由种子激光器和放大器激光器设备产生的输出光与处理设备通信。 该设备还包括用于输出激光触发信号的激光控制器。 种子激光器通过在种子激光器电极上施加种子激光器放电电压而引起的种子激光放电来激发激光气体。 种子激光器电极从种子激光器放电电路设置在容纳激光气体的种子激光器室中。 种子激光放电响应于激光触发信号的输入而激励激光气体以产生种子激光，并且通过由包括光栅的带变窄单元使波长带变窄的种子激光振荡。 放大器通过由放大电极间的放大器放电电压的放大引起的放大器放电来放大种子激光。 响应于激光触发信号的输入，放大电极被放置在放大器腔室中，其中激光气体借助于放大器放电电路被密封，以将放大的激光输出光发射到处理装置。 延迟电路设定从种子激光的发光到放大放电开始的延迟。 激光控制器改变延迟时间以使放大放电与种子激光同步。

公开(公告)号：EP1944841A3

公开(公告)日：2008-11-05

申请号：EP08000225.6

申请日：2000-09-19

申请人： Cymer, Inc.

发明人： Ershov, Alexander, I. ,  Onkels, Eckehard, D. ,  Das, Palash, P. ,  Partlo, William, N. ,  Hofmann, Thomas

IPC分类号： H01S3/10

CPC分类号： H01S3/10092 ,  G03F7/70025 ,  G03F7/70041 ,  G03F7/70483 ,  G03F7/70575 ,  H01S3/03 ,  H01S3/036 ,  H01S3/0385 ,  H01S3/08004 ,  H01S3/08009 ,  H01S3/0943 ,  H01S3/097 ,  H01S3/09705 ,  H01S3/0971 ,  H01S3/139 ,  H01S3/223 ,  H01S3/225 ,  H01S3/2258 ,  H01S3/2308 ,  H01S3/2325 ,  H01S3/2333 ,  H01S3/2366

摘要： An apparatus comprises a seed laser and an amplifier laser in communication with a processing device utilizing output light produced by the seed laser and amplifier laser device. The apparatus further comprises a laser controller for outputting a laser trigger signal. The seed laser excites a laser gas by a seed laser discharge caused by application of a seed laser discharge voltage across seed laser electrodes. The seed laser electrodes are disposed in a seed laser chamber where the laser gas is contained, from a seed laser discharge circuit. The seed laser discharge excites the laser gas in response to an input of the laser trigger signal to generate a seed laser light, and oscillates the seed laser light with a wavelength band being narrowed by a band narrowing unit including a grating. An amplifier amplifies the seed laser light by an amplifier discharge caused by amplification of an amplifier discharge voltage across amplify electrodes. The amplify electrodes are disposed in an amplifier chamber where the laser gas is sealed by means of an amplifier discharge circuit in response to an input of the laser trigger signal to emit an amplified laser output light to the processing device. A delay circuit sets a delay from light emission of the seed laser light to a start of the amplification discharge. The laser controller changes the delay time to synchronize the amplification discharge with the seed laser light.