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    OPTICAL BANDWIDTH METER FOR VERY NARROW BANDWIDTH LASER EMITTED LIGHT
    2.
    发明公开
    OPTICAL BANDWIDTH METER FOR VERY NARROW BANDWIDTH LASER EMITTED LIGHT 有权
    用于激光叶片光学带宽很窄的带宽发出的光

    公开(公告)号：EP1649244A2

    公开(公告)日：2006-04-26

    申请号：EP04777419.5

    申请日：2004-06-29

    申请人： Cymer, Inc.

    发明人： RAFAC, Robert, J.

    IPC分类号： G01B9/02

    CPC分类号： G01J1/4257 ,  G01J1/0228 ,  G01J3/02 ,  G01J3/027 ,  G01J3/28 ,  G01J3/45

    摘要： A method and apparatus for measuring bandwidth of light emitted from a laser (12) is disclosed which may comprise: a first (30) and second (34) wavelength sensitive optical bandwidth etalon detectors providing, respectively, an output (32, 36) representative of a first parameter indicative of the bandwidth of the emitted light as measured respectively by the first anal second bandwidth detectors, and an actual bandwidth calculation apparatus (40) adapted to utilize these two outputs as part of a multivariable linear equation employing predetermined calibration variables specific to either the first or the second bandwidth detector, to calculate a first actual bandwidth parameter (FWXM) or a second actual bandwidth parameter (EX).

    ACTIVE SPECTRAL CONTROL OF OPTICAL SOURCE
    8.
    发明公开
    ACTIVE SPECTRAL CONTROL OF OPTICAL SOURCE 审中-公开
    主动频谱控制的光源

    公开(公告)号：EP2471150A1

    公开(公告)日：2012-07-04

    申请号：EP10814059.1

    申请日：2010-08-24

    申请人： Cymer, Inc.

    发明人： SEONG, Nakgeuon ,  LALOVIC, Ivan, B. ,  FARRAR, Nigel, R. ,  RAFAC, Robert, J. ,  BENDIK, Joseph, J.

    IPC分类号： H01S3/13

    CPC分类号： G03F7/70575 ,  G03F7/70525

    摘要： A method of controlling a spectral property of a light beam includes directing a light beam to a lithography exposure apparatus configured to create a pattern on a wafer; receiving information representative of a spectral property of the light beam; receiving information representative of an optical imaging condition of the lithography exposure apparatus; estimating a characteristic value of the light beam based on the received spectral property information and the received optical imaging condition information; determining whether the estimated light beam characteristic value matches a target light beam characteristic value; and if it is determined that the estimated light beam characteristic value does not match the target light beam characteristic value, adjusting the spectral property of the light beam.

    BANDWIDTH MEASURING DEVICE FOR HIGH PULSE REPETITION RATE PULSED LASER
    9.
    发明公开
    BANDWIDTH MEASURING DEVICE FOR HIGH PULSE REPETITION RATE PULSED LASER 审中-公开
    带宽测量器具，用于高频脉冲脉冲激光

    公开(公告)号：EP2010861A2

    公开(公告)日：2009-01-07

    申请号：EP07753888.2

    申请日：2007-03-23

    申请人： Cymer, Inc.

    发明人： RAFAC, Robert, J.

    IPC分类号： G01B9/02

    CPC分类号： G01J3/02 ,  G01J3/027 ,  G01J3/26 ,  G01J3/2803 ,  G01J9/0246

    摘要： A method and apparatus is disclosed which may comprise detecting the bandwidth of laser output light pulses of a pulsed laser utilizing an array of light detecting elements by the steps which may comprise passing a portion of the laser output light produced by the pulsed laser to the array of light detecting elements in a manner that shifts the portion of the laser beam across the array of light detecting elements to avoid aliasing artifacts in output of the light detecting array. The portion of the image formed by the laser output light may be under-sampled, e.g., in the spatial or time domains. The relevant feature size of an image of an output of a fringe pattern generating element being sampled may comprise a size that is small with respect to the size of individual light detecting elements in the array of light detecting elements.

    IMPROVED BANDWIDTH ESTIMATION
    10.
    发明公开
    IMPROVED BANDWIDTH ESTIMATION 有权
    改进的带宽估计

    公开(公告)号：EP1658516A2

    公开(公告)日：2006-05-24

    申请号：EP04776567.2

    申请日：2004-06-14

    申请人： Cymer, Inc.

    发明人： RAFAC, Robert, J.

    IPC分类号： G02B1/00

    CPC分类号： G01J3/02 ,  G01J3/0205 ,  G01J3/027 ,  G01J3/28 ,  G01J3/45

    摘要： A bandwidth meter method and apparatus for measuring the bandwidth of a spectrum of light emitted from a laser input to the bandwidth meter which provides a first and second output representing, respectively, a first and second parameter indicative of the bandwidth The wavelength calculation utilizes the first and second parameters as part of a multivariate equation employing predetermined calibration variables specific to the optical bandwidth monitor