摘要:
Systems and methods are disclosed for focusing a beam for an interaction with a film deposited on a substrate wherein the focused beam defines a short axis and a long axis. In one aspect, the system may include a detecting system to analyze light reflected from the film on an image plane to determine whether the beam is focused in the short axis at the film. In still another aspect, a system may be provided for positioning a film (having an imperfect, non-planar surface) for interaction with a shaped line beam.
摘要:
A measuring head for a coordinate measuring device for determining spatial coordinates on a test object has a coupling part (40) for removably coupling a measuring tool (27). The coupling part (40) has a number of first bearing elements (58), a magnet (60), and a retaining pin (57). The measuring tool (27) has a plate (74) with a number of second bearing elements (78), an anchoring plate (83), and at least one adjustable locking element (86). The magnet (60) is designed to attract the anchoring plate (83) in order to bring the first and second bearing elements (58, 78) into engagement with each other. When the first and second bearing elements are in engagement, said bearing elements (58, 78) determine a defined position of the measuring tool (27) on the coupling part (40). The at least one locking element (86) fixes the measuring tool (27) on the retaining pin (57). According to one aspect of the invention, the anchoring plate (83) is removably fixed to the plate (74), and the at least one locking element (86) retains the anchoring plate (83) on the retaining pin (57).
摘要:
A probehead (9) for a co-ordinate measuring device is disclosed, comprising: a probehead chassis (29), fixable to the co-ordinate measuring device, a feeler holder (39), fixed to the probehead chassis (29) and which may be brought out from a rest position, to which a feeler (47), for probing a workpiece (17), may be attached, a displacement measuring system (55, 57) for determining a displacement of the feeler holder (39) relative to the probehead chassis (29) and a tracking lens (61) for tracking a tip (49) of the feeler (47). The probehead (1) is characterised in that at least one of the components, feeler holder (39) and probehead chassis (29), comprises a transverse support (39), running transverse to the direction of extent of the feeler, which is a least partly transparent and arranged in the beam path (69) of the tracking lens (61).
摘要:
The invention relates to a probe for a coordinate measuring device, comprising a coupling part (40) having a retaining pin (57), on which a sensing tool (27) is detachably arranged. The sensing tool has at least one feeler for probing a measurement object, and a rotary table (74). The rotary table is coupled to the coupling part via the retaining pin in one of a plurality of defined rotation angle positions. According to one aspect of the invention, the rotary table (74) has a latching mechanism (86) having at least one adjustable latching element (92) and a detector (93). The latching element (92) has a latching position in which it secures the rotary plate (74) to the retaining pin. Said latching element further has a release position in which it releases the retaining pin. The detector (93) generates a signal which is representative of the latching position and/or of the release position.
摘要:
The invention relates to a scanner head (10) for a co-ordinate measuring device, said head being equipped with a tracer pin (18) that is elastically suspended in a housing (12). A sensor assembly (26) is used to detect deflections of the tracer pin (18) relative to the housing (12). Said sensor assembly (26) comprises at least one hall sensor with a magnet (34) and a hall element (36) located in close proximity to the latter. When the tracer pin (18) is deflected, the magnet (34) is displaced along its axis, defined by the north pole (N) and the south pole (N) of said magnet (34), laterally passing the hall element (36). A hall current with an alternating polarity can be picked off the hall element (36). A linear zone of the hall current, which lies around the change in polarity, is processed as the measurement of the deflection of the tracer pin (18).
摘要:
The invention relates to a probe for a device for measuring co-ordinates. Said device comprises measuring systems (15, 16, 17) for measuring the deviation of the flexible part (10) of the probe, and a damping device for damping the flexible part (10) of the probe. Said damping device is embodied as at least one friction brake (19, 27), the friction force of said friction brake being adjustable. Furthermore, the flexible part (10) of the probe can also be blocked by means of the friction brake (19, 27).
摘要:
The invention relates to a probing head for a multi-co-ordinate measuring device, comprising a measuring stylus (14; 44) that can be deflected in three dimensions. In addition, the head is provided with balancing elements for establishing a spatial resting position of the measuring stylus (14; 44) that is predetermined for varying alignments of said stylus (14; 44). The balancing elements are configured as masses (21, 23, 36). The forces or moments required to balance the measuring stylus (14; 44) are created by the weight of the masses (21, 23, 36).
摘要:
The invention relates to a scanner head (10) for a co-ordinate measuring device, said head being equipped with a tracer pin (18) that is elastically suspended in a housing (12). A sensor assembly (26) is used to detect deflections of the tracer pin (18) relative to the housing (12). Said sensor assembly (26) comprises at least one hall sensor with a magnet (34) and a hall element (36) located in close proximity to the latter. When the tracer pin (18) is deflected, the magnet (34) is displaced along its axis, defined by the north pole (N) and the south pole (N) of said magnet (34), laterally passing the hall element (36). A hall current with an alternating polarity can be picked off the hall element (36). A linear zone of the hall current, which lies around the change in polarity, is processed as the measurement of the deflection of the tracer pin (18).
摘要:
A sensing head for a coordinate measuring device comprises a sensor arrangement (60) for detecting deviations of a sensing pin. The sensor arrangement contains a Hall element (62, 64) and magnets (86, 88, 90, 92). According to one aspect of the invention, a first magnet (86) and a second magnet (88) are placed opposite one another with a gap between them. The Hall element (62) is situated such that it moves within the gap when the sensing pin is displaced relative to the magnets (86, 88).
摘要:
A sensing head for a coordinate measuring device comprises a stationary first part (48; 42) and a second part (42; 44) that can move relative thereto. The second part (42; 44) can be coupled to a sensing element (36) for touching an object to be measured. In addition, at least one first and one second connecting element (50, 56; 52, 54) are provided via which the second part (42; 44) is connected to the first part (48; 42). Each connecting element (50, 56; 52, 54) is connected to one of the parts via a first contact point (60; 64) and to another part via a second contact point (62, 68; 66). According to one aspect of the invention, the first contact point (60; 64) is provided, in essence, as a single point, and the second contact point (62, 68; 66) is provided as at least two points whereby resulting in a three-point mounting of the connecting elements.