A SYSTEM, APPARATUS, AND METHOD FOR DETERMINING ELEMENTAL COMPOSITION USING 4D STEM

    公开(公告)号:EP4333452A2

    公开(公告)日:2024-03-06

    申请号:EP24150794.6

    申请日:2020-04-17

    IPC分类号: H04N25/531

    摘要: The present disclosure relates to transmission electron microscopy for evaluation of biological matter. According to an embodiment, the present disclosure further relates to an apparatus for determining the structure and/or elemental composition of a sample using 4D STEM, comprising a direct bombardment detector operating with global shutter readout, processing circuitry configured to acquire images of bright-field disks using either a contiguous array or non-contiguous array of detector pixel elements, correct distortions in the images, align each image of the images based on a centroid of the bright-field disk, calculate a radial profile of the images, normalize the radial profiles by a scaling factor, calculate the rotationally-averaged edge profile of the bright-field disk, and determine elemental composition within the specimen based on the characteristics of the edge profile of the bright-field disk corresponding to each specimen location.