-
公开(公告)号：EP4333452A3
公开(公告)日：2024-05-15
申请号：EP24150794.6
申请日：2020-04-17
申请人： Direct Electron, LP
IPC分类号： H01J37/28 , H01J37/244 , G01N23/2251 , H04N23/667 , H04N23/81 , H04N25/445 , H04N25/531
CPC分类号： H01J37/244 , H01J2237/244620130101 , H01J37/28 , H01J2237/244120130101 , G01N23/2251 , G01N2223/612620130101 , H01J2237/280220130101 , H04N23/81 , H04N23/667 , H04N25/445 , H04N25/531
摘要： The present disclosure relates to transmission electron microscopy for evaluation of biological matter. According to an embodiment, the present disclosure further relates to an apparatus for determining the structure and/or elemental composition of a sample using 4D STEM, comprising a direct bombardment detector operating with global shutter readout, processing circuitry configured to acquire images of bright-field disks using either a contiguous array or non-contiguous array of detector pixel elements, correct distortions in the images, align each image of the images based on a centroid of the bright-field disk, calculate a radial profile of the images, normalize the radial profiles by a scaling factor, calculate the rotationally-averaged edge profile of the bright-field disk, and determine elemental composition within the specimen based on the characteristics of the edge profile of the bright-field disk corresponding to each specimen location.
-
2.发明公开
公开(公告)号：EP4391006A1
公开(公告)日：2024-06-26
申请号：EP22215815.6
申请日：2022-12-22
CPC分类号： H01J37/12 , H01J37/28 , H01J2237/120520130101 , H01J2237/020620130101 , H01J37/02 , H01J2237/244620130101
摘要： The present disclosure relates to a charged particular apparatus for projecting a multi-beam of charged particles toward a sample. In one arrangement, a sample support supports a sample. A charged particle-optical device projects beams of a multi-beam of the charged particles along a plurality of paths toward the sample. The device comprises a plurality of charged particle-optical elements that define an objective lens and in which are defined a plurality of apertures along the paths of the beams. At least two of the charged particle-optical elements are configured to be set at different potentials and at least one of the charged particle-optical elements is set at ground potential.
-
3.发明授权
公开(公告)号：EP3640968B1
公开(公告)日：2024-06-12
申请号：EP19214475.6
申请日：2011-11-14
IPC分类号： H01J37/22 , H01J37/244 , H01J37/317 , H01J37/04 , H01J37/304 , B82Y10/00 , B82Y40/00
-
公开(公告)号：EP4390462A1
公开(公告)日：2024-06-26
申请号：EP23217251.0
申请日：2023-12-15
申请人： FEI Company
发明人： MULDER, Jaap , JANSSEN, Bart , VAN DER HEIDE, Auke
CPC分类号： G01T1/171 , G01T1/2992 , H01J2237/2449520130101 , H01J2237/244620130101 , H01J2237/2620130101 , H01J37/244
摘要： Charged particle microscope (CPM) support systems and apparatus, as well as related methods, computing devices, and computer-readable media. One charged particle microscope support apparatus includes first logic to detect a first charged particle event at a first pixel of a charged particle camera, and second logic to detect, within a subregion of pixels of the charged particle camera containing the first pixel, whether a second charged particle event is present based on a dose rate and an energy value of each pixel within the subregion of pixels. When the second charged particle event is determined to be present, the second logic determines a location of the second charged particle event within the subregion. The support apparatus further includes third logic to output charged particle event data representing the first charged particle event and the second charged particle event.
-
公开(公告)号：EP3956691B1
公开(公告)日：2024-05-22
申请号：EP20791905.1
申请日：2020-04-17
IPC分类号： H01J37/244 , H01J37/28 , G01N23/2251 , H04N23/667 , H04N23/741 , H04N23/81 , H04N25/531 , H04N25/445
-
公开(公告)号：EP3706155B1
公开(公告)日：2024-05-22
申请号：EP20158375.4
申请日：2020-02-20
IPC分类号： H01J37/244 , H01J37/28 , H01J37/26
-
-
-
-
-
搜索结果
6 条记录 (耗时 0.008 秒)
