公开(公告)号：EP1891669A2

公开(公告)日：2008-02-27

申请号：EP06760541.0

申请日：2006-06-12

申请人： Dow Corning Corporation

发明人： CHEN, Wei ,  HWANG, Byung, Keun ,  LEE, Jea-kyun ,  MOYER, Eric, Scott ,  SPAULDING, Michael, John ,  WANG, Sheng

IPC分类号： H01L21/762

CPC分类号： H01L21/3124 ,  H01L21/02134 ,  H01L21/02282 ,  H01L21/02337 ,  H01L21/316

摘要： Trenches in a semiconductor substrate are filled by (i) dispensing a film forming material on the semiconductor substrate and into the trenches; (ii) curing the dispensed film forming material in the presence of an oxidant at a first low temperature for a first predetermined period of time; (iii) curing the dispensed film forming material in the presence of an oxidant at a second low temperature for a second predetermined period of time; (iv) curing the dispensed film forming material in the presence of an oxidant at a third high temperature for a third predetermined period of time; and (v) forming filled oxide trenches in the semiconductor substrate. The film forming material is hydrogen silsesquioxane.

公开(公告)号：EP2321219A2

公开(公告)日：2011-05-18

申请号：EP09791669.6

申请日：2009-08-19

申请人： Dow Corning Corporation

发明人： ASHRAF, Muhammad, Ather ,  HWANG, Byung, Keun ,  LUDWIG, Bonnie

IPC分类号： C01B33/021 ,  C01B31/02 ,  C01B31/36 ,  C04B35/00

CPC分类号： C04B35/6268 ,  B82Y30/00 ,  B82Y40/00 ,  C01B32/15 ,  C01B32/907 ,  C01B32/956 ,  C01B33/021 ,  C04B35/6224 ,  C04B35/62281 ,  C04B35/62675 ,  C04B2235/3418 ,  C04B2235/3826 ,  C04B2235/422 ,  C04B2235/483 ,  C04B2235/5264 ,  C04B2235/5454 ,  C04B2235/9661 ,  D01F6/94

摘要： A method produces nanoparticles by electrospinning a silicon composition having at least one silicon atom. The electrospinning of the silicon composition forms fibers. The fibers are pyrolyzed to produce the nanoparticles. The nanoparticles have excellent photoluminescent properties and are suitable for use in many different applications.