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公开(公告)号：EP2216804A4
公开(公告)日：2016-01-20
申请号：EP08848700
申请日：2008-11-12
Applicant: EMD CORP
Inventor： SETSUHARA YUICHI , EBE AKINORI , INO EIJI , ISHIHARA SHINICHIRO , ASHIDA HAJIME , WATANABE AKIRA
IPC: H01L21/205 , C23C16/509 , H01J37/32 , H01L21/3065
CPC classification number: C23C16/503 , C03C17/22 , C03C2217/28 , C03C2218/153 , C23C16/24 , C23C16/509 , H01J37/321 , H01J37/3211 , H01J37/32715
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