LASER DRILLING OF HOLES IN MATERIALS
    3.
    发明公开
    LASER DRILLING OF HOLES IN MATERIALS 审中-公开
    LASERBOHREN VONLÖCHERN在MATERIALEN

    公开(公告)号:EP1105248A1

    公开(公告)日:2001-06-13

    申请号:EP99957032.8

    申请日:1999-06-14

    IPC分类号: B23K26/18 H05K3/00 B41J2/16

    摘要: The invention discloses methods and apparatus (1) for laser drilling of one or more holes in one or more materials (9) using a laser radiation source (2) emitting radiation having a wavelength or wavelengths, where at least some of the materials (9) have been treated to change their absorption depths at the wavelength or wavelengths of the radiation. The material or materials (9) may be treated by adding one or more dopants thereto. The material or materials (9) may comprise dielectric materials, and may be used in the construction of electrical interconnection packages such as printed circuit or wiring boards, ball grid arrays or multichip modules. The quality of the holes produced is superior so that produced when drilling undoped material with the same laser radiation source.

    摘要翻译: 本发明公开了一种用于使用发射具有波长或波长的辐射的激光辐射源(2)在一种或多种材料(9)中激光钻孔一个或多个孔的方法和装置(1),其中至少一些材料(9) )已被处理以改变其在辐射的波长或波长处的吸收深度。 可以通过向其中加入一种或多种掺杂剂来处理材料(9)。 材料或材料(9)可以包括介电材料,并且可以用于电互连封装的构造,例如印刷电路或布线板,球栅阵列或多芯片模块。 所生产的孔的质量优越,使得在用相同的激光辐射源钻未掺杂材料时产生。