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公开(公告)号：EP0975874A1
公开(公告)日：2000-02-02
申请号：EP99905198.0
申请日：1999-02-15
申请人： EBARA CORPORATION
CPC分类号： F04C18/126 , F04C18/084 , Y10T29/49242
摘要： A rotor has an interior free from invasion of water and is resistant to deformation from applied stresses normally encountered during the operation of a vacuum pump. The rotor comprises a rotor shell formed to conform to an outline of lobes and side-plates for covering transverse ends of the rotor shell. A rotation shaft is secured to the side-plates. A hollow section is formed by the rotor shell and the side-plates which is under a vacuum environment.
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公开(公告)号：EP1979619A1
公开(公告)日：2008-10-15
申请号：EP07713802.2
申请日：2007-01-29
发明人： HOZUMI, Takashi , MIYASHITA, Nobuhito , INADA, Takanori , MATAKE, Kozo , OJIMA, Yoshinori , MIYAKE, Susumu , USUI, Katsuaki
CPC分类号： F04C28/24 , F04C18/16 , F04C23/00 , F04C23/001 , F04C25/02 , F04C29/0085 , H02K7/11 , H02K16/00
摘要： The present invention relates to a dry vacuum pump unit capable of achieving ultimate pressure of about 1 Pa. The vacuum pump unit includes a main pump (15) disposed at an outside-pressure side, and a booster pump (16) disposed at a vacuum side. The booster pump (16) and the main pump (15) are coupled in series. The booster pump (16) has a higher pumping speed than that of the main pump (15). Each of the main pump (15) and the booster pump (16) includes a pair of pump rotors (52a and 52b), a casing (50) having an inlet port and an outlet port, and a pair of magnet rotors (54 and 54) rotatable with the pair of pump rotors.
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公开(公告)号：EP3597916A1
公开(公告)日：2020-01-22
申请号：EP18766870.2
申请日：2018-03-13
申请人： Ebara Corporation
发明人： MAISHIGI, Keiji , SUGIURA, Tetsuro , USUI, Katsuaki , HATAKEYAMA, Masahiro , HONMA, Chikako , OSUGA, Toru , IWASAKI, Koichi , LIN, Jie Yuan
IPC分类号： F04B51/00 , G05B19/418
摘要： An information processing apparatus detecting presence or absence of abnormality of a vacuum pump derived from a product produced within a target vacuum pump, including:
a determination unit configured to determine a normal variation range or a normal time variation behavior of a target state quantity which is a state quantity varying depending on a load of gas flowing into the vacuum pump, based on at least one of past target state quantities of the target vacuum pump or another vacuum pump; and
a comparison unit configured to compare a current target state quantity of the target vacuum pump with the normal variation range or the normal time variation behavior and output the comparison result.-
公开(公告)号：EP1979619B1
公开(公告)日：2016-12-14
申请号：EP07713802.2
申请日：2007-01-29
申请人： Ebara Corporation
发明人： HOZUMI, Takashi , MIYASHITA, Nobuhito , INADA, Takanori , MATAKE, Kozo , OJIMA, Yoshinori , MIYAKE, Susumu , USUI, Katsuaki
CPC分类号： F04C28/24 , F04C18/16 , F04C23/00 , F04C23/001 , F04C25/02 , F04C29/0085 , H02K7/11 , H02K16/00
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