专利检索 ap:("Electro Scientific Industries, Inc.") AND inv:"REKOW, Mathew" 第 1 页

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发明公开
METHOD AND APPARATUS FOR INTERNALLY MARKING A SUBSTRATE HAVING A ROUGH SURFACE 审中-公开
标题翻译：方法和装置进行内部标记优先粗糙表面的基板

公开(公告)号：EP3077149A1

公开(公告)日：2016-10-12

申请号：EP14867057.3

申请日：2014-12-02

申请人： Electro Scientific Industries, Inc.

发明人： ZHANG, Haibin , REKOW, Mathew , YANG, Chuan , DARWIN, Michael, J.

IPC分类号： B23K26/00 , B23K26/36

CPC分类号： B23K26/009 , B23K26/0006 , B23K26/0054 , B23K26/0057 , B23K26/006 , B23K26/083 , B23K26/0876 , B23K26/53 , B23K26/55 , B23K37/0235 , B23K2203/50 , H01L23/544 , Y10T428/24364

摘要： A method for laser processing provides a coating material (130) applied to a rough surface (42) of a substrate (44) to mitigate adverse optical effects that would be caused by roughness of the surface (42). Laser pulses (52) of the laser output of suitable parameters can be directed and focused to internally mark the substrate (44) material without damaging the rough surface (42) after passing through the coating material (130).