公开(公告)号：EP3077149A1

公开(公告)日：2016-10-12

申请号：EP14867057.3

申请日：2014-12-02

申请人： Electro Scientific Industries, Inc.

发明人： ZHANG, Haibin ,  REKOW, Mathew ,  YANG, Chuan ,  DARWIN, Michael, J.

IPC分类号： B23K26/00 ,  B23K26/36

CPC分类号： B23K26/009 ,  B23K26/0006 ,  B23K26/0054 ,  B23K26/0057 ,  B23K26/006 ,  B23K26/083 ,  B23K26/0876 ,  B23K26/53 ,  B23K26/55 ,  B23K37/0235 ,  B23K2203/50 ,  H01L23/544 ,  Y10T428/24364

摘要： A method for laser processing provides a coating material (130) applied to a rough surface (42) of a substrate (44) to mitigate adverse optical effects that would be caused by roughness of the surface (42). Laser pulses (52) of the laser output of suitable parameters can be directed and focused to internally mark the substrate (44) material without damaging the rough surface (42) after passing through the coating material (130).

公开(公告)号：EP3938138A1

公开(公告)日：2022-01-19

申请号：EP20822593.8

申请日：2020-05-29

申请人： Electro Scientific Industries, Inc.

发明人： KLEINERT, Jan ,  LIN, Zhibin ,  SCHRAUBEN, Joel ,  UNRATH, Mark ,  HU, Honghua ,  CHEN, Ruolin ,  YANG, Chuan ,  LOTT, Geoffrey ,  FINN, Daragh

IPC分类号： B23K26/386 ,  H05K3/00 ,  G02F1/33

公开(公告)号：EP3033198A1

公开(公告)日：2016-06-22

申请号：EP14836882.2

申请日：2014-08-15

申请人： Electro Scientific Industries, Inc.

发明人： REICHENBACH, Robert ,  YANG, Chuan ,  SHAN, Fang

IPC分类号： B23K26/18

CPC分类号： B23K26/0624 ,  B23K26/0006 ,  B23K26/0057 ,  B23K26/0063 ,  B23K26/082 ,  B23K26/0823 ,  B23K26/083 ,  B23K26/0853 ,  B23K26/0869 ,  B23K26/0876 ,  B23K26/53 ,  B23K2201/007 ,  B23K2201/34 ,  B23K2201/40 ,  B23K2203/08 ,  B23K2203/10 ,  B23K2203/14 ,  B23K2203/15 ,  B23K2203/56 ,  Y10T428/24802

摘要： Laser output (114) is employed to mark an article (100) including a layer (104) supported by a substrate (102), wherein the layer (104) has a thickness (t) that is less than or equal to 50 microns. The laser output (114) is focused to a numerical aperture diffraction-limited spot size (32) of less than or equal to 5 microns at a focal point (80) of the beam waist (90) and directed into the layer (104) to form a plurality of structures comprising a plurality of laser-induced cracks within the layer (104) and within a region of the article (100), wherein the laser-induced cracks terminate within the layer (104) without extending to the substrate (102) or an outer surface (108) of the layer (104), and wherein the plurality of structures are configured to scatter light incident upon the article (100).

摘要翻译： 激光输出（114）被用来在物品（100），包括由衬底（102）支撑的层（104），其中，所述层（104）具有一个厚度（t）即小于或等于50微米的标记。 激光输出（114）在束腰（90）的焦点（80）被聚焦到小于或等于5微米的数值孔径限制衍射的光点尺寸（32）和引导到层（104） 以形成结构包括激光诱导的裂纹的层（104）内的多个的多元化和物品（100）worin激光诱导裂缝的区域内，而不延伸到所述基板上的层（104）内终止（ 102）或所述层（104的外表面（108））和worin结构的多元性被配置在制品（100），以散射入射的光。