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    KAPAZITIVE DRUCKMESSZELLE MIT MINDESTENS EINEM TEMPERATURSENSOR UND DRUCKMESSVERFAHREN
    1.
    发明公开
    KAPAZITIVE DRUCKMESSZELLE MIT MINDESTENS EINEM TEMPERATURSENSOR UND DRUCKMESSVERFAHREN 审中-公开
    与至少一个传感器温度和压力测量方法电容式压力测量单元

    公开(公告)号：EP3094951A1

    公开(公告)日：2016-11-23

    申请号：EP14798881.0

    申请日：2014-11-14

    申请人： Endress + Hauser GmbH + Co. KG

    发明人： BURGARD, Martin ,  DREWES, Ulfert ,  PONATH, Nils ,  ROSSBERG, Andreas ,  UEHLIN, Thomas

    IPC分类号： G01L9/00 ,  G01L9/12

    摘要： A pressure sensor comprises an operating circuit and a pressure-measuring cell comprising a counter body (1), a measurement membrane (2), which is arranged on the counter body (1) and can be deformed by a pressure to be measured, and a capacitive transducer, which has at least one membrane electrode (7) arranged on the measurement membrane and at least one counter-body electrode (8, 9) arranged on the counter body (2), wherein the capacitance between the membrane electrode (7) and the counter-body electrode (8, 9) depends on a pressure-dependent deformation of the measurement membrane, wherein at least the membrane electrode (7) has a temperature-dependent impedance, wherein the operating circuit is designed to sense at least one capacitance between the at least one counter-body electrode and the at least one membrane electrode and to provide a pressure measurement value on the basis of at least one capacitance and to determine the impedance of the membrane electrode, particularly the ohmic portion of the impedance of the membrane electrode.

    DRUCKSENSOR
    6.
    发明公开
    DRUCKSENSOR 有权

    公开(公告)号：EP3084381A1

    公开(公告)日：2016-10-26

    申请号：EP14796784.8

    申请日：2014-11-14

    申请人： Endress + Hauser GmbH + Co. KG.

    发明人： BECHER, Raimund ,  THAM, Anh Tuan ,  ROSSBERG, Andreas ,  SCHMIDT, Elke

    IPC分类号： G01L19/14

    CPC分类号： G01L19/142 ,  G01L9/0075

    摘要： The invention relates to a pressure sensor that can be used at low temperatures, in particular at temperatures below -70°C, comprising: a solid metal sensor body (1), having a front region (3) and a base (5) adjoining thereto, the front region (3) of which has a larger cross-sectional area than the base (5), and the front region (3) of which has an outer edge (11), which can be clamped by means of a fastening device to install the pressure sensor at the location of use; a recess (7), which is provided in the front region (3) and is open towards a front side of the front region (3) that faces away from the base (5); a metal measuring diaphragm (9, 9'), to which a pressure (p) to be measured is applied from outside during measurement operation and which can be deformed elastically depending on the pressure, is arranged on the front side of the sensor body (1), closes off the recess (7) from the outside, consists of the same metal as the sensor body (1) and is spaced apart from the outer edge (11) of the front region (3); and an electromagnetic transducer for detection, by means of measurement, of the pressure-dependent deformation of the measuring diaphragm (9, 9'), having at least one measuring element (55, 57), which is electrically isolated from the measuring diaphragm (9, 9') and the sensor body (1) by means of an insulating element (51, 53).

    摘要翻译： 本发明涉及一种可在低温下使用的压力传感器，尤其是在低于-70℃的温度下使用的压力传感器，其包括：固体金属传感器主体（1），其具有邻接的前部区域（3）和基部（5） 其前部区域（3）具有比基部（5）更大的横截面积，并且前部区域（3）具有外边缘（11），该外边缘（11）可以通过紧固件 装置将压力传感器安装在使用位置; （7），其设置在所述前部区域（3）中并且朝向所述前部区域（3）的远离所述基部（5）的前侧敞开; 在测量操作期间从外部施加待测压力（p）并且可根据压力弹性变形的金属测量隔膜（9,9'）布置在传感器主体的前侧上（ 1）从外部封闭凹槽（7），由与传感器本体（1）相同的金属构成，并且与前部区域（3）的外边缘（11）间隔开; 和电磁转换器，用于通过测量检测测量膜片（9,9'）的压力相关变形，其具有至少一个测量元件（55,57），该测量元件与测量膜片电隔离（ 9,9'）和传感器本体（1）之间通过绝缘元件（51,53）连接。

    DRUCKSENSOR
    7.
    发明公开
    DRUCKSENSOR 有权

    公开(公告)号：EP3080571A1

    公开(公告)日：2016-10-19

    申请号：EP14798860.4

    申请日：2014-11-14

    申请人： Endress+Hauser GmbH+Co. KG

    发明人： ROSSBERG, Andreas ,  TEXTOR, Olaf ,  WOSNITZA, Elmar

    IPC分类号： G01L9/00

    CPC分类号： G01L9/0072 ,  G01L9/0051

    摘要： A pressure sensor (1) comprises a measuring diaphragm (2), which can be deformed on the basis of the pressure, and a mating body (3) which are connected to one another in a pressure-tight manner and form a measuring chamber (5) in which a reference pressure is present, wherein a pressure can be applied to an outside of the measuring diaphragm (2), wherein the pressure sensor (1) has a capacitive transducer having at least one mating body electrode (8, 9) and at least one diaphragm electrode (7), wherein, above a pressure limit value for the pressure, at least one central surface section of the measuring diaphragm (2) rests against the mating body with a contact surface (A(p)), the size of which is dependent on the pressure, wherein the pressure sensor also has a resistive transducer for converting a pressure-dependent deformation of the measuring diaphragm, when pressed in a range of values above the pressure limit value, into an electrical signal using an electrical resistance which is dependent on the contact surface of the measuring diaphragm (2) on the mating body (3).

    摘要翻译： 压力传感器（1）包括可以基于压力变形的测量膜片（2）和配合体（3），配合体（3）以压力密封的方式彼此连接并形成测量室 所述压力传感器（1）具有电容式换能器，所述电容式换能器具有至少一个配合的本体电极（8,9），所述配合的本体电极（8,9） 和至少一个隔膜电极（7），其中，在压力的压力极限值以上，测量隔膜（2）的至少一个中心表面部分以接触表面（A（p））抵靠在配合体上， 其尺寸取决于压力，其中压力传感器还具有电阻传感器，用于当在高于压力极限值的值范围内按压时，测量膜片的压力相关变形转换成电信号，使用 我的电阻 s取决于配合体（3）上的测量膜片（2）的接触表面。

    KAPAZITIVER DRUCKSENSOR
    8.
    发明公开
    KAPAZITIVER DRUCKSENSOR 有权
    电容式压力传感器

    公开(公告)号：EP2162714A1

    公开(公告)日：2010-03-17

    申请号：EP08760463.3

    申请日：2008-06-04

    申请人： Endress+Hauser GmbH+Co. KG

    发明人： HEGNER, Frank ,  ROSSBERG, Andreas ,  DREWES, Ulfert ,  SCHMIDT, Elke ,  STOLLE, Sabine ,  KRETSCHMAR, Christel ,  HENTSCHE, Melanie

    IPC分类号： G01L9/00

    CPC分类号： G01L9/0075 ,  G01L13/025 ,  Y10T29/49117

    摘要： Disclosed is a pressure sensor comprising a base (1) and an elastic measuring membrane (2) which is joined to a surface of the base (1) to form a measuring chamber (3) that is tightly sealed on the edge. The base (1) and/or the measuring membrane (2) contain ceramics, glass, or a monocrystalline material. The measuring membrane is provided with at least one first electrode (6) that faces the surface of the base (2), while the surface of the base (1) is equipped with at least one second electrode (5) which faces the measuring membrane (2), the capacity between the first electrode and the second electrode being a measure of the pressure that is to be measured. Furthermore, at least one of the first and second electrodes have a conductive layer containing metal and glass, the metal encompassing at least two precious metal elements.

    GERÄT MIT EINEM EIN HYDROPHOBES ODER HYDROPHOBISIERTES NANOPORIGES MATERIAL ENTHALTENDEM FEUCHTFILTER
    10.
    发明授权
    GERÄT MIT EINEM EIN HYDROPHOBES ODER HYDROPHOBISIERTES NANOPORIGES MATERIAL ENTHALTENDEM FEUCHTFILTER 有权
    具有疏水性或疏水纳米多孔材料含有湿过滤装置

    公开(公告)号：EP1386129B1

    公开(公告)日：2004-09-15

    申请号：EP01274215.1

    申请日：2001-10-27

    申请人： Endress + Hauser GmbH + Co. KG.

    发明人： HEGNER, Frank ,  ROSSBERG, Andreas ,  SCHMIDT, Elke ,  DREWES, Ulfert ,  WALTER, Bernhard ,  KIRST, Michael

    IPC分类号： G01L19/06 ,  H05H5/02 ,  B01D39/20

    CPC分类号： B01D39/2093 ,  B01D39/00 ,  G01L19/0038

    摘要： A chamber inside a housing communicates with the surrounding area of the housing via a gas exchange path, whereby a filter element comprising a nanoporous, hydrophobic or hydrophobicized material is located in the gas exchange path. The chamber serves, for example, to accommodate electronic circuits or it is designed as a reference pressure chamber of a relative pressure sensor. The inventive relative pressure sensor for recording a measured pressure with regard to a reference pressure comprises a reference pressure path (23) that extends between a surface, which can be subjected to the action of the reference pressure, and an opening inside a reference pressure chamber (22), whereby a filter element (30), which is located inside the reference pressure path, comprises a hydrophobic or hydrophobicized nanoporous material. The filter element makes a pressure compensation possible due to its permeability to N2 and O2 whereas water molecules are selectively retained. The nanoporous material preferably comprises an inorganic material, particularly Al2O3, TiO2 or SiO2. The nanoporous material is preferably hydrophobic and/or can be impregnated with a hydrophobic layer, preferably with a silane, in order to optimize the hydrophobic properties.