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1.发明公开KAPAZITIVE DRUCKMESSZELLE MIT MINDESTENS EINEM TEMPERATURSENSOR UND DRUCKMESSVERFAHREN 审中-公开与至少一个传感器温度和压力测量方法电容式压力测量单元
公开(公告)号：EP3094951A1
公开(公告)日：2016-11-23
申请号：EP14798881.0
申请日：2014-11-14
摘要： A pressure sensor comprises an operating circuit and a pressure-measuring cell comprising a counter body (1), a measurement membrane (2), which is arranged on the counter body (1) and can be deformed by a pressure to be measured, and a capacitive transducer, which has at least one membrane electrode (7) arranged on the measurement membrane and at least one counter-body electrode (8, 9) arranged on the counter body (2), wherein the capacitance between the membrane electrode (7) and the counter-body electrode (8, 9) depends on a pressure-dependent deformation of the measurement membrane, wherein at least the membrane electrode (7) has a temperature-dependent impedance, wherein the operating circuit is designed to sense at least one capacitance between the at least one counter-body electrode and the at least one membrane electrode and to provide a pressure measurement value on the basis of at least one capacitance and to determine the impedance of the membrane electrode, particularly the ohmic portion of the impedance of the membrane electrode.
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2.发明授权KERAMISCHE DRUCKMESSZELLE UND VERFAHREN ZU IHRER HERSTELLUNG 有权维多利亚·祖哈尔·赫斯特朗（KERAMISCHE DRUCKMESSZELLE UND VERFAHREN ZU IHRER HERSTELLUNG）
公开(公告)号：EP2686653B1
公开(公告)日：2015-04-08
申请号：EP12702849.6
申请日：2012-02-10
IPC分类号： B23K26/20 , B23K26/32 , C04B35/111 , G01L9/00 , C04B37/00
CPC分类号： G01L9/0048 , B23K1/0016 , B23K1/008 , B23K26/211 , B23K26/32 , B23K35/302 , B23K35/32 , B23K2201/40 , B23K2203/172 , B23K2203/52 , C04B35/111 , C04B37/006 , C04B2235/6565 , C04B2235/6581 , C04B2235/665 , C04B2235/786 , C04B2235/96 , C04B2237/122 , C04B2237/124 , C04B2237/126 , C04B2237/127 , C04B2237/343 , C04B2237/592 , C04B2237/60 , C04B2237/708 , C22C16/00 , C22C30/02 , G01L9/0075
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公开(公告)号：EP2841899A2
公开(公告)日：2015-03-04
申请号：EP13709934.7
申请日：2013-03-19
发明人： DREWES, Ulfert , PONATH, Nils , HÜGEL, Michael , UEHLIN, Thomas
IPC分类号： G01L9/00
CPC分类号： G01L9/0072
摘要： A pressure sensor (1) comprises: a pressure-measuring cell (10) having a circular-disc-like measuring diaphragm (11) and at least one mating body (12) and a pressure chamber in between, to which a pressure can be applied via a pressure channel (14a) through the mating body, wherein the pressure-measuring cell has an electrical converter for converting a deflection of the measuring diaphragm into a pressure-dependent primary signal; a cylindrical housing (40) having a measuring cell chamber in which the pressure-measuring cell (10) is arranged in the measuring cell chamber and a pressure-receiving opening (24) which is on the end face and communicates with the pressure channel (14a); and an electronic circuit (31) in the housing for operating the electrical converter and for processing the primary signal and for outputting a measurement signal, wherein, according to the invention, the cylinder axis of the pressure-measuring cell (10) encloses, with the cylinder axis of the housing (40), an angle which is not less than 80° and is particularly preferably a right angle.
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公开(公告)号：EP1518097B1
公开(公告)日：2011-06-15
申请号：EP03735695.3
申请日：2003-07-01
发明人： DREWES, Ulfert , GETMAN, Igor , HEGNER, Frank
CPC分类号： G01L19/02 , G01L9/0075
摘要： The aim of the invention is to minimize the tensioning error of a pressure sensor comprising an essentially cylindrical base body and a measurement diaphragm which is mounted on a face of the base body, the pressure-measuring cell being constrained in an axial direction between an elastic sealing ring which rests on the membrane-facing side of the pressure-measuring cell and a supporting ring which supports the rear side of the pressure-measuring cell. Said aim is achieved by matching the sizes of the sealing ring and the pressure-measuring cell in such a way that any deformation of the membrane-facing side of the pressure-measuring cell caused by axial constraining thereof is so small that the tensioning error of the pressure sensor due to a reduction of the axial constraining force by at least 10 percent is less than about 0.02 percent. The geometry of the supporting ring is determined in an iterative manner by means of FEM.
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公开(公告)号：EP1761751B1
公开(公告)日：2008-04-23
申请号：EP05754565.9
申请日：2005-06-14
发明人： DREWES, Ulfert , HEGNER, Frank
CPC分类号： G01L19/145 , G01L19/147
摘要： Disclosed is a pressure sensor comprising a housing (1) which has a housing axis and in which a measuring cell chamber is defined that can be impinged upon by a pressure via an opening, said opening being surrounded by an annular first sealing surface. The inventive pressure sensor further comprises a pressure measuring cell (2) that is provided with a second sealing surface facing the opening and a stop surface facing away from the sealing surface, a sealing ring (3), and a clamping device (4) which engages into the housing. The pressure measuring cell and the sealing ring are clamped between the clamping device (4) and the first sealing surface by means of an axial clamping force in such a way that the sealing ring (3) is disposed in a pressure-proof manner between the first sealing surface and the second sealing surface. The pressure sensor also comprises a compensating arrangement encompassing a first transmitting element (7) that faces the opening and a second (4) transmitting element which faces away from the opening. The axial clamping force is transmitted from the clamping device to the pressure measuring cell by the compensating system while the first transmitting element can be tilted relative to the second transmitting element about two axes that run perpendicular to each other.
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公开(公告)号：EP1540293A1
公开(公告)日：2005-06-15
申请号：EP03747993.8
申请日：2003-09-09
发明人： DREWES, Ulfert , GETMAN, Igor , HEGNER, Frank
CPC分类号： G01L19/04 , G01L9/0075
摘要： According to the invention, the range error of a pressure sensor, comprising an essentially cylindrical base body and a measuring membrane, mounted on a front face of the base body, whereby the pressure measuring cell is axially tensioned between an elastic sealing ring, lying on the membrane-side front face of the pressure measuring cell and a support ring which supports the rear of the pressure measuring cell, may be minimised, whereby the dimensions of the support ring and the pressure measuring cell are matched to the dimensions of the sealing ring and the pressure measuring cell such that a radial deformation of the membrane-side front face, caused by the axial fixing of the pressure measuring cell, is so low that the range error of the pressure sensor is around 0.02 % as a result of a reduction in the axial fixing force of about 10 %. Furthermore, a rigid isolation element is arranged between the support ring and a tensioning ring, by means of which the temperature hysteresis of the tensioning can be minimised. The geometry of the support ring and the isolation element are iteratively determined by means of FEM.
摘要翻译： 根据本发明，压力传感器的范围误差包括基本上圆柱形的基体和测量膜，该基体安装在基体的前表面上，由此压力测量单元在位于基体上的弹性密封环 压力测量单元的膜侧正面和支撑压力测量单元后部的支撑环可以被最小化，由此支撑环和压力测量单元的尺寸与密封环的尺寸相匹配 并且压力测量单元使得由压力测量单元的轴向固定引起的膜侧正面的径向变形如此之低以至于压力传感器的距离误差由于减少而为大约0.02％ 在约10％的轴向固定力。 此外，在支撑环与张紧环之间布置有刚性隔离元件，通过该刚性隔离元件可以使张紧的温度滞后最小化。 支撑环和隔离元件的几何形状通过有限元法迭代确定。
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公开(公告)号：EP2162714B1
公开(公告)日：2016-02-24
申请号：EP08760463.3
申请日：2008-06-04
发明人： HEGNER, Frank , ROSSBERG, Andreas , DREWES, Ulfert , SCHMIDT, Elke , STOLLE, Sabine , KRETSCHMAR, Christel , HENTSCHE, Melanie
CPC分类号： G01L9/0075 , G01L13/025 , Y10T29/49117
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公开(公告)号：EP2513622B1
公开(公告)日：2015-01-07
申请号：EP10774230.6
申请日：2010-11-10
CPC分类号： G01L9/0075 , C04B37/006 , C04B2237/122 , C04B2237/343 , C04B2237/403 , C04B2237/708 , C04B2237/72
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公开(公告)号：EP2678653A1
公开(公告)日：2014-01-01
申请号：EP12703124.3
申请日：2012-02-10
IPC分类号： G01L9/00
CPC分类号： G01L9/00 , G01L9/0075
摘要： The invention relates to a pressure measuring cell 61 comprising at least one ceramic measurement membrane body 62 and at least one ceramic main body 63, the measurement membrane body 62 being connected to the main body 63 along an annular circumferential joint, characterized in that the joint is formed as a welded connection between the measurement membrane body 62 and the main body 63, wherein the measurement membrane body comprises a measurement membrane that can deform as a function of pressure. A pressure sensor 60 comprises a pressure measuring cell 61 according to the invention and a housing 70, wherein the pressure measuring cell 61 is held by the housing 70, and wherein the pressure measuring cell 61 closes off a housing opening 71 by means of which the pressure measuring cell 61 communicates with an environment of the housing 70, wherein a gasket 73 is clamped between a sealing surface 72 of the housing, which encloses the opening 71, and a sealing surface 64 of the pressure measuring cell 61.
摘要翻译： 压力测量单元包括至少一个陶瓷测量膜体; 以及至少一个陶瓷平台，其中所述测量膜主体沿着环形周边接头与所述平台连接。 接头形成为测量膜体和平台之间的焊接连接，其中测量膜体具有压力可变形的测量膜。 压力传感器包括压力测量单元和壳体，其中压力测量单元由壳体保持，并且其中压力测量单元封闭壳体开口，压力测量单元通过该开口与壳体的环境连通。 密封件夹在围绕壳体开口的密封表面和压力测量单元的密封表面之间。
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10.发明公开KAPAZITIVE KERAMISCHE DRUCKMESSZELLE UND DRUCKSENSOR MIT EINER SOLCHEN DRUCKMESSZELLE 有权有了这样的压力测量单元的电容式陶瓷压力测量单元与气压传感器
公开(公告)号：EP2454574A1
公开(公告)日：2012-05-23
申请号：EP10724872.6
申请日：2010-06-22
IPC分类号： G01L9/00
CPC分类号： G01L9/0075
摘要： The invention relates to a capacitive load cell (1), comprising: a ceramic base body (3) and a ceramic measurement membrane (2) connected to each other along a joint (4) in a pressure-tight manner, forming a reference pressure chamber (5) between the same, the measurement membrane (2) comprising a first electrode (7) facing the base body (3), the base body (3) comprising at least one second electrode (8a, 8b) facing the measurement membrane (2), the capacitance between the first and second electrodes being a function of the difference of a pressure acting externally on the measurement membrane and a pressure in the reference pressure chamber (5), the joint (4) comprising a thickness d defining an equilibrium distance between the measurement membrane (2) and the end face of the base body (3), characterized in that a carrier coating (9) comprising an inorganic insulator is disposed on the end face of the base body, wherein the carrier coating comprises a thickness of at least 0.2 d, wherein the second electrode (8a, 8b) is disposed on the carrier coating.
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