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17 条记录 (耗时 0.016 秒)

    Patterning device
    6.
    发明公开
    Patterning device 审中-公开
    Gerätzur Herstellung von Strukturen

    公开(公告)号：EP1001311A1

    公开(公告)日：2000-05-17

    申请号：EP99120594.9

    申请日：1999-10-16

    申请人： International Business Machines Corporation

    发明人： Biebuyck, Hans ,  Michel, Bruno ,  Schmid, Heinz

    IPC分类号： G03F7/00 ,  G03F7/20 ,  G03F1/14

    CPC分类号： B82Y10/00 ,  B82Y40/00 ,  G03F1/50 ,  G03F7/0002 ,  G03F7/2014 ,  G03F7/70216

    摘要： A patterning device is proposed with which incident light is guidable at least partially to at least one cover element which is in contact with the patterning device. The cover element comprises light-sensitive material and is arranged on top of a substrate protrusion element on a surface of a substrate and/or is itself structured on a substrate.

    摘要翻译： 提出了一种图案形成装置，其中入射光至少部分地引导至至少一个与图案形成装置接触的覆盖元件。 覆盖元件包括感光材料，并且布置在基板的表面上的基板突出元件的顶部和/或其本身构造在基板上。

    Method and device for identification of a substance through surface interactions
    7.
    发明公开
    Method and device for identification of a substance through surface interactions 失效
    装置和方法，用于通过表面相互作用识别的物质

    公开(公告)号：EP0962759A1

    公开(公告)日：1999-12-08

    申请号：EP98109964.1

    申请日：1998-06-02

    申请人： INTERNATIONAL BUSINESS MACHINES CORPORATION

    发明人： Bernard, Andre ,  Michel, Bruno ,  Biebuyck, Hans ,  Schmid, Heinz ,  Delamarche, Emmanuel

    IPC分类号： G01N13/02 ,  G01N33/483

    CPC分类号： G01N13/02 ,  Y10S977/853 ,  Y10T436/11

    摘要： A method and also a device is proposed for identification of a substance, preferably comprising biochemical molecules. In a first step a probe and said substance will be brought into contact, afterwards in a second step the probe and said substance will be withdrawn from each other, while measuring the value of at least one physical parameter characterizing the interaction between said probe and said substance and comparing said measured value with a reference value for identification.
    The physical parameter may include:

    applied forces directed on said substance (1) and said probe (p) during bringing into contact and withdrawing, and/or
    amount of displacement of said substance (1) and said probe (p) for bringing into contact and withdrawing and/or
    time duration between the beginning of withdrawing and complete separation of said substance (1) and said probe (p).

    摘要翻译： 的方法，并且因此提出一种装置用于将物质的识别，优选地包括生物化学分子。 在第一步骤中的样品和所述物质将被接触，之后在第二步骤中，样品和所述物质将从海誓山盟被撤回，而测量至少一个物理参数的表征所述样品和所述之间的相互作用的值 物质，并用用于识别的基准值进行比较，所述测量值。 物理参数可以包括：所施加的力使接触并回抽过程中涉及关于所述物质（1）和所述探针（p）和/或所述物质（1）和所述探针（p）的位移量用于使接触 和回抽和/或回抽的开始和所述物质（1）和所述探针（p）的完全分离之间的时间持续时间。

    Low-voltage source for narrow electron/ion beams
    8.
    发明公开
    Low-voltage source for narrow electron/ion beams 失效
    Niederspannungsquellefürschmale Elektronen- /Ionenstrahlenbündel。

    公开(公告)号：EP0366851A1

    公开(公告)日：1990-05-09

    申请号：EP88810742.2

    申请日：1988-11-01

    申请人： International Business Machines Corporation

    发明人： Fink, Hans-Werner, Dr. ,  Morin, Roger, Dr. ,  Schmid, Heinz ,  Stocker, Werner

    IPC分类号： H01J37/073

    CPC分类号： H01J37/08 ,  H01J37/073 ,  H01J2237/0807

    摘要： This source for charged particles comprises a sharply pointed tip (1) and an aperture (2) in a thin sheet of material. If the point of the tip (1) is made sharp enough, i.e., if it ends in a single atom or a trimer of atoms, the electric field existing between the tip (1) and the aperture (2) will cause a stream of electrons to be emitted from the tip (1), pass the aperture (2) and to continue as a beam (4) of free electroms beyond said aperture (2). The sheet (3) carrying the aperture (2) may, for example, be a carbon foil or a metallic foil, including gold.
    The distance of the tip (1) from the aperture (2) is in the submicron range, and so is the diameter of said aperture (2). The distance is being held essentially constant by means of a feedback loop system. The divergence of the beam (4) is
    If the source is operated in an ultra-high vacuum, the particle beam (4) will consist of free electrons, whereas, if the source is operated in a noble-gas atmospere, the beam (4) will consist of noble-gas ions. Both, the electron beam, as well as the ion beam, contains particles of a very low frequemcy.

    摘要翻译： 该带电粒子源包括尖锐尖端（1）和薄片材料中的孔（2）。 如果尖端（1）的尖点足够锐利，即如果其以原子的原子或三聚体结束，则尖端（1）和孔（2）之间存在的电场将导致流 从尖端（1）发射的电子通过孔（2）并且作为自由电磁体的光束（4）继续超过所述孔（2）。 携带孔（2）的片材（3）可以是例如碳箔或包含金的金属箔。 尖端（1）与孔（2）的距离在亚微米范围内，所述孔（2）的直径也在此范围内。 通过反馈回路系统将距离保持在基本恒定。 光束（4）的发散度为<2°如果光源在超高真空下工作，则粒子束（4）将由自由电子组成，而如果光源在惰性气体气氛中运行， 梁（4）将由惰性气体离子组成。 电子束以及离子束都包含非常低频率的粒子。

    Delta-phi microlens for low-energy particle beams
    10.
    发明公开
    Delta-phi microlens for low-energy particle beams 失效
    Delta-phi-MikrolinsefürTeilchenstrahlen niedriger Energie。

    公开(公告)号：EP0432337A1

    公开(公告)日：1991-06-19

    申请号：EP89810951.7

    申请日：1989-12-13

    申请人： International Business Machines Corporation

    发明人： Fink, Hans-Werner, Dr. ,  Schmid, Heinz ,  Stocker, Werner

    IPC分类号： H01J37/12

    CPC分类号： H01J37/12

    摘要： The Delta-Phi microlens consists of a first foil (3) of a metal or alloy from the group of transition metals and a second foil (4) of a metal or alloy from the group comprising the elements of IA or IIA groups of the periodic system of elements, the second foil (4) being coated onto one surface of said first foil (3). A hole (2) extends through both foils (3, 4) in precise alignment with the axis (6) of a sharply pointed tip (1) made of conductive material and placed at a distance of the order of 1 µm from that surface of said first foil (3) opposite said second foil (4). With the first foil (3) connected to ground and a potential on the order of -30 V applied at said tip (1), at ultra-high vacuum conditions, a beam of low-energy electrons will have trajectories (5) deviated towards a focal point (7).
    With a positive potential of more than 30 V applied to said tip (1), and in a noble gas atmosphere, a beam of ions passing through the microlens of the invention will have trajectories (5) deflected towards said focal point (7).

    摘要翻译： Delta-Phi微透镜由来自过渡金属组的金属或合金的第一箔（3）和金属或合金的第二箔（4）组成，所述第二箔（4）包含周期性的IA或IIA族的元素 元件系统，第二箔（4）涂覆在所述第一箔（3）的一个表面上。 孔（2）与由导电材料制成的尖锐尖端（1）的轴线（6）精确对准地延伸穿过两个箔片（3,4），并且放置在与该表面相距1μm的距离处 的所述第一箔（3）与所述第二箔（4）相对。 在第一个箔片（3）连接到地面上，并且在超高真空条件下施加的-30V的电位在超高真空条件下，一束低能电子的轨迹（5）将偏离 一个焦点（7）。 在施加到所述尖端（1）上的大于30V的正电势下，并且在惰性气体气氛中，穿过本发明的微透镜的离子束将具有朝向所述焦点（7）偏转的轨迹（5）。