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    SCANNING TRANSMISSION ELECTRON MICROSCOPE AND METHOD OF IMAGE GENERATION
    1.
    发明公开
    SCANNING TRANSMISSION ELECTRON MICROSCOPE AND METHOD OF IMAGE GENERATION 审中-公开

    公开(公告)号：EP3327749A1

    公开(公告)日：2018-05-30

    申请号：EP17204093.3

    申请日：2017-11-28

    申请人： Jeol Ltd.

    发明人： SAGAWA, Ryusuke

    IPC分类号： H01J37/28 ,  G01N23/20058 ,  H01J37/244

    CPC分类号： H01J37/28 ,  G01N23/20058 ,  G01N2223/0565 ,  G01N2223/102 ,  G01N2223/3302 ,  G01N2223/418 ,  H01J37/10 ,  H01J37/1475 ,  H01J37/1477 ,  H01J37/244 ,  H01J37/265 ,  H01J2237/2446 ,  H01J2237/2802 ,  H01J2237/2803

    摘要： There is provided a scanning transmission electron microscope capable of producing plural types of STEM (scanning transmission electron microscopy) images using a single detector. The electron microscope (100) has an electron source (10) emitting an electron beam, a scanning deflector (13) for scanning the beam over a sample (S), an objective lens (14) for focusing the beam, an imager (22) placed at a back focal plane of the objective lens (14) or at a plane conjugate with the back focal plane, and a scanned image generator (40) for generating scanned images on the basis of images captured by the imager. The scanned image generator (40) operates to form electron diffraction patterns from the electron beam passing through positions on the sample by the scanning of the electron beam, to capture the electron diffraction patterns by the imager so that plural images are produced, to integrate the intensity of each pixel over an integration region that is set based on the size of an image of a transmitted wave in a respective one of the produced images for each of the produced images such that the signal intensity at each position on the sample is found, and to generate the scanned images on the basis of the signal intensities at the positions on the sample.

    A QUANTITATIVE SECONDARY ELECTRON DETECTION
    2.
    发明公开
    A QUANTITATIVE SECONDARY ELECTRON DETECTION 审中-公开
    定量辅助电子探测

    公开(公告)号：EP3210232A1

    公开(公告)日：2017-08-30

    申请号：EP15859974.6

    申请日：2015-10-21

    申请人： Sciencetomorrow, LLC

    发明人： JYOTI AGRAWAL, Jyoti ,  SUBHADARSHI NAYAK, Subhadarshi ,  DAVID C JOY, David

    IPC分类号： H01J37/244

    CPC分类号： H01J37/244 ,  H01J37/28 ,  H01J37/285 ,  H01J2237/2441 ,  H01J2237/2446 ,  H01J2237/2448 ,  H01J2237/24495

    摘要： Quantitative Secondary Electron Detection (QSED) using the array of solid state devices (SSD) based electron-counters enable critical dimension metrology measurements in materials such as semiconductors, nanomaterials, and biological samples (FIG. 3). Methods and devices effect a quantitative detection of secondary electrons with the array of solid state detectors comprising a number of solid state detectors. An array senses the number of secondary electrons with a plurality of solid state detectors, counting the number of secondary electrons with a time to digital converter circuit in counter mode.

    摘要翻译： 使用基于固态器件（SSD）的电子计数器阵列的定量二次电子检测（QSED）使得能够在诸如半导体，纳米材料和生物样品的材料中进行关键尺寸计量测量（图3）。 方法和装置通过包含多个固态检测器的固态检测器阵列实现二次电子的定量检测。 阵列用多个固态检测器检测二次电子的数量，以计数器模式用时间数字转换器电路计数二次电子的数量。

    HYBRID ENERGY CONVERSION AND PROCESSING DETECTOR
    4.
    发明公开
    HYBRID ENERGY CONVERSION AND PROCESSING DETECTOR 审中-公开
    混合动力工程公司 - VERARBEITUNGSDETEKTOR

    公开(公告)号：EP3132463A2

    公开(公告)日：2017-02-22

    申请号：EP15774734.6

    申请日：2015-04-14

    申请人： Gatan, Inc.

    发明人： GUBBENS, Alexander Jozef ,  MOONEY, Paul ,  LENT, Matthew

    IPC分类号： H01J37/244

    CPC分类号： G01T1/2018 ,  H01J37/244 ,  H01J2237/2441 ,  H01J2237/2443 ,  H01J2237/2446 ,  H01J2237/24485

    摘要： Further, a mechanism to allow dynamically switchable or simultaneous linear and counted signal processing from each pixel of the image so that high-illumination areas can be acquired linearly without the severe dose rate limitation of counting and low-illumination regions can be acquired with counting, the switchover point determined by the dose rate at which signal quality breaks even between linear and counting modes.

    摘要翻译： 公开了在物理上布置的多于一个电子能量转换机构的混合布置，使得可以以两种能量转换器获得电子图像，使得图像的所选择的高照度部分可以间接成像 耦合闪烁体检测器和用检测器的高灵敏度/直接电子部分获取的图像的其余部分，而不需要在光束位置进行重新调整或检测器部件的机械定位。 此外，允许从图像的每个像素进行动态切换或同时线性和计数的信号处理的机制，使得可以线性地获取高照度区域，而不用计数就能获得计数和低照明区域的严重剂量率限制， 切换点由信号质量在线性和计数模式间均匀断开的剂量率决定。

    Imaging a sample with multiple beams and multiple detectors
    7.
    发明公开
    Imaging a sample with multiple beams and multiple detectors 审中-公开
    Abbildung einer Probe mit mehreren Strahlen und mehreren Detektoren

    公开(公告)号：EP2924708A1

    公开(公告)日：2015-09-30

    申请号：EP14161505.4

    申请日：2014-03-25

    申请人： FEI COMPANY

    发明人： Potocek, Pavel ,  Kooijman, Cornelis ,  Slingerland, Hendrik ,  Veen, van, Gerard ,  Boughorbel, Faysal ,  Faber, Pybe ,  Sluijterman, Seyno

    IPC分类号： H01J37/244

    CPC分类号： H01J37/261 ,  G01N21/6458 ,  G01N23/225 ,  G01N2223/418 ,  G01N2223/427 ,  G02B21/0016 ,  H01J37/06 ,  H01J37/1472 ,  H01J37/222 ,  H01J37/244 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/063 ,  H01J2237/10 ,  H01J2237/226 ,  H01J2237/2446 ,  H01J2237/2447 ,  H01J2237/2448 ,  H01J2237/24507 ,  H01J2237/2602

    摘要： The invention relates to a multi-beam apparatus for inspecting a sample (232) with a multitude of focused beams, the apparatus equipped to scan a multitude of N beams (240-n) over the sample, the apparatus equipped with a multitude of M detectors (234-m) for detecting secondary radiation emitted by the sample when said sample is irradiated by the multitude of beams, each of the detectors capable of outputting a detector signal representing the intensity of the secondary radiation detected by the detector, characterized in that, in working, each detector signal comprises information caused by multiple beams, the information caused by one beam thus spread over multiple detectors, the apparatus equipped with a programmable controller (236) for processing the multitude of detector signals to a multitude of output signals, the controller processing the multitude of detector signals so that each output signal represents information caused by a single beam.

    摘要翻译： 本发明涉及一种用于用多个聚焦光束检测样品（232）的多光束装置，该装置用于扫描样品上的多个N个光束（240-n），该装置装备有多个M 检测器（234-m），用于当所述样品被多个光束照射时检测由样品发射的次级辐射，每个检测器能够输出表示由检测器检测到的次级辐射的强度的检测器信号，其特征在于： 在工作时，每个检测器信号包括由多个波束引起的信息，由一个波束引起的信息由此分布在多个检测器上，该装置配备有用于将多个检测器信号处理到多个输出信号的可编程控制器（236） 控制器处理多个检测器信号，使得每个输出信号表示由单个波束引起的信息。

    Scanning charged particle microscope, image acquisition method, and electron detection method
    8.
    发明公开
    Scanning charged particle microscope, image acquisition method, and electron detection method 有权
    Raster-Teilchenmikroskop，Bilderfassungsverfahren und Elektronendetektionsverfahren

    公开(公告)号：EP2804199A2

    公开(公告)日：2014-11-19

    申请号：EP14168549.5

    申请日：2014-05-15

    申请人： JEOL Ltd.

    发明人： Otsuka, Takeshi

    IPC分类号： H01J37/244 ,  H01J37/28

    CPC分类号： H01J37/28 ,  H01J37/22 ,  H01J37/244 ,  H01J2237/063 ,  H01J2237/15 ,  H01J2237/2441 ,  H01J2237/2446 ,  H01J2237/24465 ,  H01J2237/2448 ,  H01J2237/24485 ,  H01J2237/2806

    摘要： A scanning charged particle microscope is offered which can selectively detect and image electrons. The scanning charged particle microscope (100) has: a source (1) of a charged particle beam (E1); an objective lens (6) for bringing the charged particle beam (E1) emitted from the source (1) into focus at a sample (S); a scanning deflector (4) for scanning the focused charged particle beam (E1) over the sample (S); a sorting portion (10) for sorting out electrons emitted at given emission angles from electrons released from the sample (S) in response to irradiation of the sample (S) by the charged particle beam (E1); an electron deflector (20) for producing a deflecting field to deflect the electrons (E2) sorted out according to their energy; a detection portion (30) for detecting the electrons (E2) deflected by the electron deflector (20); and an image creating portion (44) for creating an image, based on the results of the detection performed by the detection portion (30).

    摘要翻译： 提供一种扫描带电粒子显微镜，可以选择性地检测和成像电子。 扫描带电粒子显微镜（100）具有：带电粒子束（E1）的源（1）; 用于使从源（1）发射的带电粒子束（E1）在样品（S）处聚焦的物镜（6）; 用于扫描样品（S）上的聚焦带电粒子束（E1）的扫描偏转器（4）; 分选部分（10），用于响应于通过带电粒子束（E1）照射样品（S），以从给定的发射角度发射的电子排出电子; 用于产生偏转场的电子偏转器（20），以使根据其能量分类的电子（E2）偏转; 用于检测由电子偏转器（20）偏转的电子的检测部分（30）; 以及基于由检测部分（30）执行的检测结果来创建图像的图像创建部分（44）。