公开(公告)号：EP1801068A3

公开(公告)日：2009-11-04

申请号：EP06126836.3

申请日：2006-12-21

Applicant: FEI COMPANY

Inventor： Schwind, Gregory ,  Magera, Gerald ,  Scipioni, Lawrence

IPC: B82B3/00

CPC classification number: H01J37/06 ,  B82Y15/00 ,  B82Y30/00 ,  H01J1/304 ,  H01J9/025 ,  H01J37/073 ,  H01J2201/30469 ,  H01J2209/0223 ,  H01J2237/06341 ,  Y10S438/962 ,  Y10S977/742 ,  Y10S977/745 ,  Y10S977/748 ,  Y10S977/75 ,  Y10S977/752 ,  Y10S977/773 ,  Y10S977/856 ,  Y10S977/857

Abstract: A method of batch fabrication using established photolithographic techniques allowing nanoparticles or nanodevices to be fabricated and mounted into a macroscopic device in a repeatable, reliable manner suitable for large-scale mass production. Nanoparticles can be grown on macroscopic "modules" which can be easily manipulated and shaped to fit standard mounts in various devices.

公开(公告)号：EP1801068B1

公开(公告)日：2012-09-26

申请号：EP06126836.3

申请日：2006-12-21

Applicant: FEI COMPANY

Inventor： Schwind, Gregory ,  Magera, Gerald ,  Scipioni, Lawrence

IPC: B82B3/00

CPC classification number: H01J37/06 ,  B82Y15/00 ,  B82Y30/00 ,  H01J1/304 ,  H01J9/025 ,  H01J37/073 ,  H01J2201/30469 ,  H01J2209/0223 ,  H01J2237/06341 ,  Y10S438/962 ,  Y10S977/742 ,  Y10S977/745 ,  Y10S977/748 ,  Y10S977/75 ,  Y10S977/752 ,  Y10S977/773 ,  Y10S977/856 ,  Y10S977/857

公开(公告)号：EP1801068A2

公开(公告)日：2007-06-27

申请号：EP06126836.3

申请日：2006-12-21

Applicant: FEI COMPANY

Inventor： Schwind, Gregory ,  Magera, Gerald ,  Scipioni, Lawrence

IPC: B82B3/00

CPC classification number: H01J37/06 ,  B82Y15/00 ,  B82Y30/00 ,  H01J1/304 ,  H01J9/025 ,  H01J37/073 ,  H01J2201/30469 ,  H01J2209/0223 ,  H01J2237/06341 ,  Y10S438/962 ,  Y10S977/742 ,  Y10S977/745 ,  Y10S977/748 ,  Y10S977/75 ,  Y10S977/752 ,  Y10S977/773 ,  Y10S977/856 ,  Y10S977/857

Abstract: A method of batch fabrication using established photolithographic techniques allowing nanoparticles or nanodevices to be fabricated and mounted into a macroscopic device in a repeatable, reliable manner suitable for large-scale mass production. Nanoparticles can be grown on macroscopic "modules" which can be easily manipulated and shaped to fit standard mounts in various devices.

Abstract translation: 使用已建立的光刻技术的批量制造方法，其允许以适合于大规模批量生产的可重复且可靠的方式将纳米颗粒或纳米装置制造和安装在宏观装置中。 纳米颗粒可以在宏观“模块”上生长，其可以容易地操作和成形，以将标准安装件装配在各种装置中。