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    Determination of emission parameters from field emission sources
    2.
    发明公开
    Determination of emission parameters from field emission sources 有权
    on on on。。。。。。。。。。。。。

    公开(公告)号：EP2613338A2

    公开(公告)日：2013-07-10

    申请号：EP13150442.5

    申请日：2013-01-08

    申请人： FEI Company

    发明人： Swanson, Lynwood ,  Schwind, Gregory ,  Kellogg, Sean ,  Liu, Kun

    IPC分类号： H01J37/073

    CPC分类号： H01J37/00 ,  G01T1/29 ,  H01J37/02 ,  H01J37/073 ,  H01J2237/06316 ,  H01J2237/06341 ,  H01J2237/065

    摘要： The state of an emitter can be determined by measurements of how the current changes with the extraction voltage. A field factor β function is determined by a series of relatively simple measurements of charged particles emitted at different conditions. The field factor can then be used to determine derived characteristics of the emission that, in the prior art, were difficult to determine without removing the source from the focusing column and mounting it in a specialized apparatus. The relations are determined by the source configuration and have been found to be independent of the emitter shape, and so emission character can be determined as the emitter shape changes over time, without having to determine the emitter shape and without having to redefine the relation between the field factor and the series of relatively simple measurements, and the relationships between the field factor and other emission parameters.

    摘要翻译： 发射极的状态可以通过测量电流如何随提取电压而变化来确定。 场因子²功能由在不同条件下发射的带电粒子的一系列相对简单的测量来确定。 然后可以使用场因子来确定在现有技术中难以确定的衍射特征，而不需要从聚焦柱移除源并将其安装在专门的装置中。 关系由源配置确定，并且已经被发现与发射体形状无关，因此，随着时间的推移，可以确定发射体形状随着发射体形状的变化，而不必确定发射体的形状，而不必重新定义 场因子和一系列相对简单的测量，以及场因子与其他发射参数之间的关系。

    Determination of emission parameters from field emission sources
    9.
    发明公开
    Determination of emission parameters from field emission sources 有权
    的场发射源发射参数的确定

    公开(公告)号：EP2613338A3

    公开(公告)日：2015-04-08

    申请号：EP13150442.5

    申请日：2013-01-08

    申请人： FEI Company

    发明人： Swanson, Lynwood ,  Schwind, Gregory ,  Kellogg, Sean ,  Liu, Kun

    IPC分类号： H01J37/073

    CPC分类号： H01J37/00 ,  G01T1/29 ,  H01J37/02 ,  H01J37/073 ,  H01J2237/06316 ,  H01J2237/06341 ,  H01J2237/065

    摘要： The state of an emitter can be determined by measurements of how the current changes with the extraction voltage. A field factor β function is determined by a series of relatively simple measurements of charged particles emitted at different conditions. The field factor can then be used to determine derived characteristics of the emission that, in the prior art, were difficult to determine without removing the source from the focusing column and mounting it in a specialized apparatus. The relations are determined by the source configuration and have been found to be independent of the emitter shape, and so emission character can be determined as the emitter shape changes over time, without having to determine the emitter shape and without having to redefine the relation between the field factor and the series of relatively simple measurements, and the relationships between the field factor and other emission parameters.