公开(公告)号：EP2278306A1

公开(公告)日：2011-01-26

申请号：EP09165269.3

申请日：2009-07-13

Applicant: FEI COMPANY

Inventor： Freitag, Bert ,  Rosenthal, Georg ,  Phifer, Daniel

IPC: G01N23/225 ,  H01J37/20

CPC classification number: G01N23/2251 ,  G01N2223/611 ,  H01J37/20 ,  H01J37/26 ,  H01J2237/2003 ,  H01J2237/2008

Abstract: The invention describes a method for inspecting samples in an electron microscope. A sample carrier 500 shows electrodes504, 507 connecting pads 505, 508 with areas A on which the sample is to be placed.
After placing the sample on the sample carrier, a conductive pattern is deposited on the sample, so that voltages and currents can be applied to localized parts of the sample. Applying the pattern on the sample may be done with, for example, Beam Induced Deposition or ink-jet printing.
The invention also teaches building electronic components, such as resistors, capacitors, inductors and active elements such as FET's in the sample.

Abstract translation: 本发明描述了一种在电子显微镜中检查样品的方法。 样品载体500显示电极504,407连接焊盘505,508与其上要放置样品的区域A. 将样品放在样品载体上后，导电图案沉积在样品上，从而可以将电压和电流施加到样品的局部部分。 将样品应用于样品可以用例如光束沉积或喷墨打印进行。 本发明还教导在样品中构建诸如电阻器，电容器，电感器和诸如FET的有源元件的电子部件。