公开(公告)号：EP4202974A1

公开(公告)日：2023-06-28

申请号：EP21217095.5

申请日：2021-12-22

申请人： FEI Company

发明人： Shánel, Ondrej ,  Jísa, Jan ,  Baco, Ondrej ,  Schneider, Martin

IPC分类号： H01J37/26

摘要： The invention relates to a Transmission Charged Particle Beam (TCPB) apparatus comprising a sample holder, for holding a sample, a source for producing a beam of charged particles and an illuminator for directing said beam so as to irradiate the sample; The TCPB apparatus comprises an imaging system, for receiving a flux of charged particles transmitted through the sample and directing it onto a sensing device. Further, a controller is provided for controlling at least some operational aspects of the TCPB apparatus. As defined herein, the controller is arranged for receiving calibration data of said TCPB apparatus and using said calibration data for optically aligning said TCPB apparatus. Said calibration data may be obtained in a calibration session, wherein different settings for eucentric focus can be used as a measure of eucentric height, so that the TCPB apparatus can be optically aligned in absence of a sample on the sample holder.

公开(公告)号：EP3772745A2

公开(公告)日：2021-02-10

申请号：EP20189362.5

申请日：2020-08-04

申请人： FEI Company

发明人： Kieft, Erik René ,  Dona, Pleun ,  Van Rens, Jasper Frans Mathijs ,  Verhoeven, Wouter ,  Mutsaers, Peter ,  Luiten, Jom ,  Baco, Ondrej

IPC分类号： H01J37/04 ,  H01P7/06

摘要： Disclosed herein are radio frequency (RF) cavities and systems including such RF cavities. The RF cavities are characterized as having an insert with at least one sidewall coated with a material to prevent charge build up without affecting RF input power and that is heat and vacuum compatible. One example RF cavity 206 includes a dielectric insert 222, the dielectric insert having an opening extending from one side of the dielectric insert to another to form a via 230, and a coating layer disposed on an inner surface of the dielectric insert, the inner surface facing the via 230, wherein the coating layer has a thickness and a resistivity, the thickness less than a thickness threshold, and the resistivity greater than a resistivity threshold, wherein the thickness and resistivity thresholds are based partly on operating parameters of the RF cavity.

公开(公告)号：EP4024040A1

公开(公告)日：2022-07-06

申请号：EP21214237.6

申请日：2021-12-14

申请人： FEI Company

发明人： Shánel, Ondrej ,  Schneider, Martin ,  Varslot, Trond ,  Kuijper, Maarten ,  Baco, Ondrej ,  Batelka, Václav

IPC分类号： G01N23/2251 ,  G21K1/04

摘要： Apertures (108) having references edges are situated to define a sample irradiation zone (131) and a shielded zone. The sample irradiation zone (131) includes a portion proximate the shielded zone that is conjugate to a detector (116). A sample (112) is scanned into the sample irradiation zone (131) from the shielded zone so that the sample (112) can remain unexposed until situated properly with respect to the detector (116) for imaging. Irradiation exposure of the sample (112) is reduced, permitting superior imaging and less damage to the sample (112). The sample can be translated longitudinally and rotated and an electron beam (104) can be used in order to form images by electron beam tomography.

公开(公告)号：EP3772745A3

公开(公告)日：2021-04-14

申请号：EP20189362.5

申请日：2020-08-04

申请人： FEI Company

发明人： Kieft, Erik René ,  Dona, Pleun ,  Van Rens, Jasper Frans Mathijs ,  Verhoeven, Wouter ,  Mutsaers, Peter ,  Luiten, Jom ,  Baco, Ondrej

IPC分类号： H01J37/04 ,  H01P7/06

摘要： Disclosed herein are radio frequency (RF) cavities and systems including such RF cavities. The RF cavities are characterized as having an insert with at least one sidewall coated with a material to prevent charge build up without affecting RF input power and that is heat and vacuum compatible. One example RF cavity 206 includes a dielectric insert 222, the dielectric insert having an opening extending from one side of the dielectric insert to another to form a via 230, and a coating layer disposed on an inner surface of the dielectric insert, the inner surface facing the via 230, wherein the coating layer has a thickness and a resistivity, the thickness less than a thickness threshold, and the resistivity greater than a resistivity threshold, wherein the thickness and resistivity thresholds are based partly on operating parameters of the RF cavity.