公开(公告)号：EP4398289A1

公开(公告)日：2024-07-10

申请号：EP22864133.8

申请日：2022-07-29

申请人： FUJIFILM Corporation

发明人： NOZAKI, Atsuyasu ,  TAKASHIMA, Misaki ,  SATO, Naoki ,  NAKAMURA, Atsushi

IPC分类号： H01L21/312 ,  C08G73/10 ,  G03F7/027 ,  G03F7/20 ,  G03F7/32 ,  G03F7/40 ,  G03F7/037 ,  G03F7/038 ,  G03F7/42

CPC分类号： G03F7/027 ,  G03F7/20 ,  G03F7/32 ,  G03F7/40 ,  H01L21/02118 ,  H01L21/02282 ,  G03F7/0387 ,  G03F7/38 ,  G03F7/325 ,  C08G69/265 ,  C08G69/40 ,  C09D177/06 ,  C08F290/145 ,  G03F7/037 ,  G03F7/0388 ,  G03F7/405 ,  G03F7/425

摘要： There is provided a manufacturing method for a cured substance, which makes it possible to obtain a cured substance having excellent breaking elongation, a manufacturing method for a laminate, including the manufacturing method for a cured substance, a manufacturing method for a semiconductor device, including the manufacturing method for a cured substance or the manufacturing method for a laminate, and there is provided a treatment liquid that is used in the manufacturing method for a cured substance.
The manufacturing method for a cured substance includes a film forming step of applying a resin composition containing a precursor of a cyclization resin onto a base material to form a film, a treatment step of bringing a treatment liquid into contact with the film, and a heating step of heating the film after the treatment step, in which the treatment liquid contains at least one compound selected from the group consisting of a basic compound having an amide group and a base generator having an amide group.