公开(公告)号：EP1126347A4

公开(公告)日：2004-11-03

申请号：EP00948265

申请日：2000-07-27

申请人： TOKYO ELECTRON LTD ,  FUJIKIN KK ,  OHMI TADAHIRO ,  IIDA SEIICHI

发明人： OHMI TADAHIRO ,  IIDA SEIICHI ,  KAGATSUME SATOSHI ,  HIROSE JUN ,  FUKASAWA KAZUO ,  KOIZUMI HIROSHI ,  NAGAOKA HIDEKI ,  UNO TOMIO ,  NISHINO KOUJI ,  IKEDA NOBUKAZU ,  DOHI RYOUSUKE ,  IDETA EIJI

IPC分类号： G01F1/36 ,  F16K37/00 ,  G05B23/02 ,  G05D7/06 ,  F16K17/22 ,  G01D21/00

CPC分类号： G05B23/0235 ,  G05B23/0256 ,  G05D7/0635 ,  Y10T137/0396 ,  Y10T137/7759 ,  Y10T137/7761 ,  Y10T137/8326

摘要： A method for detecting abnormal flow rate by easily detecting an obstruction of an orifice while a fluid pressure flow rate controller using an orifice is controlling the flow rate. The method uses a flow rate controller (FCS) so as to calculate the flow rate Qc on the downstream side when the upstream-side pressure P1 is maintained at a value about twice or more the downstream-side pressure P2 from Qc=KP1 (K: constant) and to control the operation of a control valve (CV) according to a signal Qy representing the difference between the calculated flow rate Qc and a preset flow rate Qs. A testing circuit or flow rate setting circuit provided separately outputs a testing signal ΔQs having a testing amplitude V0 to the control valve (CV). The pressure amplitude V of a pressure variation ΔP1 of the upstream-side pressure P1 occurring in response to the opening/closing of the control valve (CV) is measured. When the pressure amplitude V decreases below a limit amplitude Vt, the obstruction of the orifice is announced, thus implementing the method. If the testing signal ΔQs is superimposed on a steady-state preset flow rate signal Qs0 and outputted together from the testing circuit or the flow rate setting circuit to the control valve (CV), an abnormal flow rate can be detected while controlling the flow rate by using the steady-state preset flow rate signal Qs0.

公开(公告)号：EP1126260A4

公开(公告)日：2003-07-09

申请号：EP00949991

申请日：2000-08-03

申请人： FUJIKIN KK ,  TOKYO ELECTRON LTD ,  OHMI TADAHIRO

发明人： OHMI TADAHIRO ,  HIROSE TAKASHI ,  IDETA EIJI ,  IKEDA NOBUKAZU ,  DOHI RYOUSUKE ,  NISHINO KOUJI ,  YOSHIKAWA KAZUHIRO ,  KAGATSUME SATOSHI ,  HIROSE JUN ,  FUKASAWA KAZUO ,  KOIZUMI HIROSHI ,  NAGAOKA HIDEKI

IPC分类号： G01L9/04 ,  G01L9/00 ,  G01L19/00 ,  G01L19/04 ,  G01L19/06 ,  G01L19/14 ,  G01L7/08

CPC分类号： G01L19/0023 ,  G01L19/0645 ,  G01L19/145 ,  G01L19/147

摘要： A pressure detector mounting structure capable of preventing a diaphragm from being deformed by a stress acting on a diaphragm type pressure detector and output characteristics and temperature characteristics from being varied when the pressure detector is incorporated in a fixture provided in a piping or equipment, wherein the pressure detector formed by fixedly combining a diaphragm base having a diaphragm with a sensor base incorporating a sensor element operating according to the displacement of the diaphragm is inserted into an inserting hole through a gasket and pressed air-tight fixedly from the upper side using a pressing member, the pressing member and the gasket are brought into contact with the upper and lower surfaces of a main body of the diaphragm base, respectively, and a shallow groove is formed in ring-shape in the lower surface of the main body on the inner side of a part in contact with the gasket so as to off set a deformation produced by a pressing force from the pressing member through the shallow groove.

公开(公告)号：EP1096351A4

公开(公告)日：2004-12-15

申请号：EP00913087

申请日：2000-04-03

申请人： FUJIKIN KK ,  TOKYO ELECTRON LTD ,  OHMI TADAHIRO

发明人： OHMI TADAHIRO ,  KAGATSUME SATOSHI ,  SUGIYAMA KAZUHIKO ,  MINAMI YUKIO ,  NISHINO KOUJI ,  DOHI RYOUSUKE ,  YONEHANA KATSUNORI ,  IKEDA NOBUKAZU ,  YAMAJI MICHIO ,  HIROSE JUN ,  FUKAZAWA KAZUO ,  KOIZUMI HIROSHI ,  NAGAOKA HIDEKI ,  MORIMOTO AKIHIRO ,  UNO TOMIO ,  IDETA EIJI ,  MATSUMOTO ATSUSHI ,  UENOYAMA TOYOMI ,  HIROSE TAKASHI

IPC分类号： G05D7/06

CPC分类号： G05D7/0658 ,  G05D7/0664 ,  Y10S438/935 ,  Y10T137/0396 ,  Y10T137/7759 ,  Y10T137/7761 ,  Y10T137/86389 ,  Y10T137/87877 ,  Y10T137/87917

摘要： A fluid feeding device having a plurality of flow paths disposed in parallel with each other starting at a regulator for pressure regulation, wherein a mass flow controller for flow control or a pressure system flow control device is disposed in each flow path so that the opening and closing operations for fluid supply in each flow path do not provide a transient variation in a stable supply to the other flow paths and, when the fluid supply in a flow path is changed from close to open, a set flow rate is reached a specified delay time after the start of the operation of the mass flow controller in that flow path.

摘要翻译： 用的流线从一个调节器，用于压力调整分支出来的多个流体供给装置中，流线平行地布置，worin的量度取，DASS模具手术，也就是，开口或一个流路的开闭将没有 在其它流动通道的稳流瞬态效应。 为了这个目的，每个流动通道设置有一个时间延迟型质量流量控制器MFC所以没有当一个封闭流体通道打开时，质量流量控制器上没有流动通道达在一个特定的延迟时间ΔT的一组流量Qs 从起点。 这样提供了一种方法和用于其中的气体类型的多元性可与精度高流速通过一个压力式流量控制装置来控制上述装置的速率。为了做到端，用于计算气体的流动的公式 理论上推导做了与压力比不低于临界压力比更高流动。 从做过公式，则流程因数被定义，所以做了式可以被应用到许多用流动因素气体类型。 该方法包括：在下游侧计算通过传递到孔口雅丁式QC = KP1（K =常数）具有压力P1的气体的QC流量上设置节流孔上游侧的两次或更多次高于压力P2 ，worin流量因数FF为每种气体的计算如下： FF =（K /伽马S）A2 /（卡帕+ 1）U <1 /（卡帕-1）>是κ/ A（卡帕 + 1）RUU <1.2> 和worin，如果气体类型A的计算的流速是QA，并且，当将B型气体被允许在相同的压力下，通过相同的孔中流动的上游侧 并在上游侧相同的温度，流率QB的计算公式如下： QB =（FFB / FFA）QA 其中YS =标准状态的气体的浓度; Kappa值=气体的比热的比值; R为气体的=常数; K =比例常数不依赖于气体的类型; FFA =气体类型A的流动系数; 气体类型B. 的和FFB =流量系数

公开(公告)号：EP1898445A4

公开(公告)日：2011-08-10

申请号：EP06766987

申请日：2006-06-20

申请人： TOKYO ELECTRON LTD

发明人： MACHIYAMA WATARU ,  ISHIZAWA SHIGERU ,  KOIZUMI HIROSHI ,  HIROKI TSUTOMU ,  KONDOH KEISUKE

IPC分类号： H01L21/677

CPC分类号： H01L21/67745 ,  H01L21/67276 ,  H01L21/67742