公开(公告)号：EP1542059A4

公开(公告)日：2008-07-30

申请号：EP02760638

申请日：2002-08-14

申请人： FUJITSU LTD

发明人： MI XIAOYU ,  TSUBOI OSAMU ,  UEDA SATOSHI ,  SAWAKI IPPEI

IPC分类号： B81B3/00 ,  B81B5/00 ,  G02B26/08 ,  G02B26/10

CPC分类号： G02B26/0841 ,  B81B3/007 ,  B81B2201/0235 ,  B81B2201/033 ,  B81B2201/042 ,  B81B2203/0109 ,  B81B2203/0154 ,  B81B2203/058

摘要： A micro rocking device comprises a frame (113) and a rocking member (111) connected to the frame (113) through connecting parts (112). Each connecting part (112) has two torsion bars (112a) each having holes (112b). Therefore, the torsion bars (112a) have relatively high rigidity with respect to the frame (113) and relative low rigidity with respect to the rocking member (111).

摘要翻译： 微摇动装置包括框架（113）和通过连接部件（112）连接到框架（113）的摇摆构件（111）。 每个连接部分（112）具有两个扭杆（112a），每个扭杆具有孔（112b）。 因此，扭杆（112a）相对于框架（113）具有较高的刚性并且相对于摆动构件（111）具有较低的刚性。

公开(公告)号：EP1569023A4

公开(公告)日：2007-09-12

申请号：EP02807976

申请日：2002-10-10

申请人： FUJITSU LTD

发明人： TSUBOI OSAMU ,  MIZUNO YOSHIHIRO ,  UEDA SATOSHI ,  SAWAKI IPPEI ,  YAMAGISHI FUMIO ,  SONEDA HIROMITSU ,  KOUMA NORINAO

IPC分类号： G02B26/08 ,  H02N1/00

CPC分类号： G02B26/0841 ,  G02B26/085 ,  H02N1/008

摘要： A micro moving element (X1) comprises a moving section (111), frame (112), which are integrally molded in a material substrate having a laminate structure comprising conductor layers (110a-110c) including a core conductor layer (110b) and insulation layers (110d, 110e) interposed between the conductor layers (110a-110c), and a coupling section (113) that couples them. The moving section (111) includes a first structure derived from the core conductor layer (110b). The frame (112) includes a second structure derived from the core conductor layer (110b). The coupling section (113) includes torsion bars (113a, 113b) derived from the core conductor layer (110b), continuously connected to the first and second structures, and electrically separated from each other.