摘要:
A micro moving element (X1) comprises a moving section (111), frame (112), which are integrally molded in a material substrate having a laminate structure comprising conductor layers (110a-110c) including a core conductor layer (110b) and insulation layers (110d, 110e) interposed between the conductor layers (110a-110c), and a coupling section (113) that couples them. The moving section (111) includes a first structure derived from the core conductor layer (110b). The frame (112) includes a second structure derived from the core conductor layer (110b). The coupling section (113) includes torsion bars (113a, 113b) derived from the core conductor layer (110b), continuously connected to the first and second structures, and electrically separated from each other.
摘要:
A heat sink (22) of a microchannel cooling device being connected to a heat source thermally has a liquid refrigerant flow channel (24) having a microscopic cross section. A thermoelectric element (10) is provided on the heat sink (22). The thermoelectric element (10) extends in a direction parallel to a direction of extension of the liquid refrigerant flow channel (24).
摘要:
An actuator includes a first part having a magnetomotive means and configured to absorb heat up to at least a first temperature; a second part arranged so as to face the first part; a temperature-sensitive magnetic body provided between the first part and the second part and configured to move between a first position for contact with the first part and a second position for contact with the second part, the temperature-sensitive magnetic body having a Curie point lower than the first temperature and higher than a temperature of the second part; and a restoring part configured to restore the temperature-sensitive magnetic body from the first position to the second position.