公开(公告)号：EP3031084A1

公开(公告)日：2016-06-15

申请号：EP14833768.6

申请日：2014-08-06

申请人： First Solar, Inc

发明人： GARABEDIAN, Raffi ,  MALIK, Roger ,  THEIL, Jeremy ,  TRIVEDI, Jigish ,  YU, Ming

IPC分类号： H01L31/0304 ,  C23C16/455 ,  C23C16/54

CPC分类号： H01L31/0304 ,  C23C14/243 ,  C23C14/568 ,  C23C16/22 ,  H01L21/02546 ,  H01L21/02576 ,  H01L21/02579 ,  H01L21/0262 ,  H01L21/64 ,  H01L21/67173 ,  H01L21/6776 ,  H01L31/03046 ,  H01L31/0693 ,  H01L31/18 ,  H01L31/184 ,  H01L2221/67 ,  Y02E10/544 ,  Y02P70/521

摘要： An inline vacuum deposition system contains thermal source pairs configured in adjacent deposition zones. Dopant sources allow the electrical characteristics of the sequentially formed layers to be controlled for a preferred deposition growth profile.