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    MIKROMECHANISCHER INERTIALSENSOR ZUR MESSUNG VON DREHRATEN
    4.
    发明公开
    MIKROMECHANISCHER INERTIALSENSOR ZUR MESSUNG VON DREHRATEN 有权
    MICRO机械惯性用于测量旋转速度

    公开(公告)号：EP2132528A1

    公开(公告)日：2009-12-16

    申请号：EP08718118.6

    申请日：2008-03-20

    申请人： Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.

    发明人： MERZ, Peter ,  WEISS, Manfred

    IPC分类号： G01C19/56

    CPC分类号： G01C19/5762 ,  G01C19/5712

    摘要： The present invention relates to a rotation rate sensor for detecting a rotation Ω at which the sensor rotates, wherein the sensor comprises a substrate and a drive-and-detection arrangement which is located substantially flat above the substrate surface in an x-y plane. The drive-and-detection arrangement has a drive mass (4) and a detection mass (3) which are arranged at different distances from a center (Z) of the detection arrangement symmetrically around the center, and the vibration modes thereof can be partially transmitted to each other and are partially decoupled. The rotation Ω is detected by the fact that a tipping of the detection mass out of the flat plane of the drive-and-detection arrangement is detected. The sensor is characterized in that whichever mass of the two masses (3, 4) is spaced farther from the above-mentioned center can tip out of the above-mentioned flat plane when affected by the Coriolis force and is connected to the substrate via a connection means (7) in such a manner that the resetting of said tipping is supported by the connection means. The connection means according to the invention improves the robustness of the sensor with respect to parasitic environmental effects.

    SENSOR ZUR ERFASSUNG VON BESCHLEUNIGUNGEN
    6.
    发明公开
    SENSOR ZUR ERFASSUNG VON BESCHLEUNIGUNGEN 有权
    传感器检测出加速度

    公开(公告)号：EP2076783A1

    公开(公告)日：2009-07-08

    申请号：EP07821240.4

    申请日：2007-10-12

    申请人： Fraunhofer-Gesellschaft zur Förderung der Angewandten Forschung e.V. ,  Sensordynamics Ag Entwicklungs- Und Produktionsges

    发明人： SCHWARZELBACH, Oliver ,  WEISS, Manfred ,  KEMPE, Volker

    IPC分类号： G01P15/125 ,  G01P15/18 ,  G01P15/08

    CPC分类号： G01P15/125 ,  G01P15/0802 ,  G01P15/18 ,  G01P2015/0831

    摘要： The present invention relates to a sensor for detecting an acceleration acting on the sensor, having: a substrate (3), a mass unit (9), which acts as an inert mass in the event of the presence of an acceleration, a fixing structure (2, 1, 5), by means of which the mass unit is articulated on the substrate, wherein the mass unit is articulated on the substrate in such a way that at least one pivot axis (y; z) is defined, about which the mass unit can perform a rotation relative to the substrate as a result of an acceleration acting on the sensor, and wherein the mass unit has an interial centre of gravity (4), which is at a distance from the respective pivot axis, and at least one detection unit (11; 15), with which a change in position between the mass unit and the substrate can be detected, characterized in that the detection unit is arranged with respect to the mass unit in such a way that a deformation of the mass unit cannot be transferred to the detection unit. Preferably, two detection units are provided. A change in position between the mass unit and the substrate which is brought about as a result of an acceleration of the sensor acting in a first direction can be detected using one of these units, while the other unit can be used to detect a change in position between the mass unit and the substrate brought about as a result of an acceleration of the sensor acting in a second direction.