公开(公告)号：EP1126347B1

公开(公告)日：2007-09-12

申请号：EP00948265.4

申请日：2000-07-27

申请人： TOKYO ELECTRON LIMITED ,  FUJIKIN INCORPORATED ,  Ohmi, Tadahiro ,  Iida, Seiichi

发明人： OHMI, Tadahiro ,  IIDA, Seiichi ,  KAGATSUME, Satoshi, Tokyo Electron Yamanashi Ltd. ,  HIROSE, Jun, Tokyo Electron Yamanashi Ltd. ,  FUKASAWA, Kazuo, Tokyo Electron Yamanashi Ltd. ,  KOIZUMI, Hiroshi, Tokyo Electron Yamanashi Ltd. ,  NAGAOKA, Hideki, Tokyo Electron Yamanashi Ltd. ,  UNO, Tomio, Fujikin Incorporated ,  NISHINO, Kouji, Fujikin Incorporated ,  IKEDA, Nobukazu, Fujikin Incorporated ,  DOHI, Ryousuke, Fujikin Incorporated ,  IDETA, Eiji, Fujikin Incorporated

IPC分类号： G05B23/02 ,  F16K17/22 ,  G05D7/06 ,  G01D21/00

CPC分类号： G05B23/0235 ,  G05B23/0256 ,  G05D7/0635 ,  Y10T137/0396 ,  Y10T137/7759 ,  Y10T137/7761 ,  Y10T137/8326

摘要： A method for detecting abnormal flow rate by easily detecting an obstruction of an orifice while a fluid pressure flow rate controller using an orifice is controlling the flow rate. The method uses a flow rate controller (FCS) so as to calculate the flow rate Qc on the downstream side when the upstream-side pressure P1 is maintained at a value about twice or more the downstream-side pressure P2 from Qc=KP1 (K: constant) and to control the operation of a control valve (CV) according to a signal Qy representing the difference between the calculated flow rate Qc and a preset flow rate Qs. A testing circuit or flow rate setting circuit provided separately outputs a testing signal ΔQs having a testing amplitude V0 to the control valve (CV). The pressure amplitude V of a pressure variation ΔP1 of the upstream-side pressure P1 occurring in response to the opening/closing of the control valve (CV) is measured. When the pressure amplitude V decreases below a limit amplitude Vt, the obstruction of the orifice is announced, thus implementing the method. If the testing signal ΔQs is superimposed on a steady-state preset flow rate signal Qs0 and outputted together from the testing circuit or the flow rate setting circuit to the control valve (CV), an abnormal flow rate can be detected while controlling the flow rate by using the steady-state preset flow rate signal Qs0.

公开(公告)号：EP1126347A1

公开(公告)日：2001-08-22

申请号：EP00948265.4

申请日：2000-07-27

申请人： TOKYO ELECTRON LIMITED ,  Fujikin Incorporated ,  Ohmi, Tadahiro ,  Iida, Seiichi

发明人： OHMI, Tadahiro ,  IIDA, Seiichi ,  KAGATSUME, Satoshi, Tokyo Electron Yamanashi Ltd. ,  HIROSE, Jun, Tokyo Electron Yamanashi Ltd. ,  FUKASAWA, Kazuo, Tokyo Electron Yamanashi Ltd. ,  KOIZUMI, Hiroshi, Tokyo Electron Yamanashi Ltd. ,  NAGAOKA, Hideki, Tokyo Electron Yamanashi Ltd. ,  UNO, Tomio, Fujikin Incorporated ,  NISHINO, Kouji, Fujikin Incorporated ,  IKEDA, Nobukazu, Fujikin Incorporated ,  DOHI, Ryousuke, Fujikin Incorporated ,  IDETA, Eiji, Fujikin Incorporated

IPC分类号： G05B23/02 ,  F16K17/22 ,  G05D7/06 ,  G01D21/00

CPC分类号： G05B23/0235 ,  G05B23/0256 ,  G05D7/0635 ,  Y10T137/0396 ,  Y10T137/7759 ,  Y10T137/7761 ,  Y10T137/8326

摘要： A method checks the flow rate for abnormalities while controlling the flow rate of fluid in a pressure-type flow controller FCS using an orifice - the pressure-type flow controller wherein with the upstream pressure P 1 maintained about two or more times higher than the downstream pressure P 2 , the downstream flow rate Q C is calculated by the equation Q C = KP 1 (K: constant) and wherein the control valve CV is controlled on the basis of the difference signal Q Y between the calculated flow rate Q C and the set flow rate Q S . The method comprises, outputting a testing signal ΔQs having a testing amplitude Vo from a testing circuit provided separately or a flow rate setting circuit to the control valve CV, measuring the pressure amplitude V of the variable pressure ΔP1 of the pressure P1 on the upstream side of the orifice that arises in response to actuation of the control valve CV and setting off an alarm for the clogging of the orifice when the pressure amplitude V is smaller than a limit amplitude Vt. If the testing signal ΔQs is superimposed on a steady-state set flow rate signal Qso and outputted to control the valve CV from the testing circuit or the flow rate setting circuit, the flow rate can be checked for abnormalities while controlling the flow rate by the steady-state set flow rate signal Qso.

摘要翻译： 一种方法，检查异常的流速，同时控制在使用于节流孔的压力式流量控制装置FCS的流体的流量 - 压力式流量控制装置worin与上游压力P1保持为下游压力高大约两倍或更多倍 和worin控制阀CV为计算流量QC与设定流量QS之差信号QY的基础上进行控制：P2，下游流量QC由等式QC = KP1（常数K）计算得出。 该方法包括，输出开始一测试信号DELTA Qs的具有从测试电路分开设置的测试振幅VO或流量设定电路向控制阀CV，测量在可变压力DELTA P1的压力P1的压力振幅V 节流孔的上游侧确实产生于响应于控制阀CV的致动和用于节流孔堵塞报警掀起当压力振幅V小于极限振幅Vt的小。 如果测试信号DELTA Qs被叠加在稳态流量设定信号QSO和输出，以控制从所述测试电路或流量设定电路的阀CV，流速可以检查异常，同时控制由流量 稳态设定流量信号QSO。

公开(公告)号：EP1026566B1

公开(公告)日：2005-10-26

申请号：EP99935121.6

申请日：1999-08-09

申请人： FUJIKIN INCORPORATED ,  TOKYO ELECTRON LIMITED ,  OHMI, Tadahiro

发明人： OHMI, Tadahiro ,  KAGATSUME, Satoshi, Tokyo Electron Yamanashi Ltd. ,  HIROSE, Jun, Tokyo Electron Yamanashi Ltd. ,  NISHINO, Kouji, Fujikin Incorporated

IPC分类号： G05D7/06

CPC分类号： G05D7/0658 ,  G05D7/0635 ,  Y10T137/7759 ,  Y10T137/7761

摘要： A versatile flow rate controller comprises an orifice (8) exchangeable depending on the required opening for a different fluid and a different flow rate range, a control valve (2) on the upstream side, a pressure detector (6) between the control valve (2) and the orifice (8), an arithmetic circuit (14) for calculating a flow rate as Qc=KP1 (K is a constant) from an upstream pressure P1 detected by the detector (6); an output circuit (16) for providing a flow-setting signal Qe, a converter circuit (18) for producing a flow rate signal Qf (Qf=kQc) by multiplying the calculated flow rate signal Qc by a factor k to change the full-scale flow rate, and a control circuit (20) for supplying a driver section (4) of the control valve (2) with a control signal Qy corresponding to the difference between the Qf and Qe.

公开(公告)号：EP1126260A1

公开(公告)日：2001-08-22

申请号：EP00949991.4

申请日：2000-08-03

申请人： Fujikin Incorporated ,  TOKYO ELECTRON LIMITED ,  Ohmi, Tadahiro

发明人： OHMI, Tadahiro ,  HIROSE, Takashi, Fujikin Incorporated ,  IDETA, Eiji, Fujikin Incorporated ,  IKEDA, Nobukazu, Fujikin Incorporated ,  DOHI, Ryousuke, Fujikin Incorporated ,  NISHINO, Kouji, Fujikin Incorporated ,  YOSHIKAWA, Kazuhiro, Fujikin Incorporated ,  KAGATSUME, Satoshi, Tokyo Electron Yamanashi Ltd. ,  HIROSE, Jun, Tokyo Electron Yamanashi Ltd. ,  FUKASAWA, Kazuo, Tokyo Electron Yamanashi Ltd. ,  KOIZUMI, Hiroshi, Tokyo Electron Yamanashi Ltd. ,  NAGAOKA, Hideki, Tokyo Electron Yamanashi Ltd.

IPC分类号： G01L19/00 ,  G01L7/08

CPC分类号： G01L19/0023 ,  G01L19/0645 ,  G01L19/145 ,  G01L19/147

摘要： A construction for mounting a pressure detector prevents the detector diaphragm from being strained by stress applied to the pressure detector as the detector is mounted in a fixture main body provided in a pipe line or the like, thereby keeping the output characteristics and temperature characteristics of the detector from greatly differing before and after the mounting. The pressure detector is constructed by combining and fastening together a diaphragm base having a diaphragm and a sensor base having a sensor element therein that is activated by displacement of the diaphragm base. The pressure detector, with a gasket placed thereunder, is disposed in a mounting hole of a fixture main body that is mounted in a pipe line. The pressure detector is airtightly pressed and fastened by a presser member inserted from above in the mounting hole. The presser member is brought in contact with a block upper surface of the diaphragm base, and the gasket is also brought in contact with the block lower surface of the diaphragm base. A shallow groove is defined in the form of a ring on the lower surface of the block at a place inward of the portion contacting the metal gasket so that the shallow groove absorbs strain caused by the presser member.

摘要翻译： 用于安装压力检测器的结构防止了检测器膜片被施加到压力检测器上的应力而被应变，因为检测器安装在设置在管线等中的夹具主体中，从而保持了输出特性和温度特性 检测器在安装前后有很大差异。 压力检测器通过将具有隔膜的隔膜基座和具有传感器元件的传感器基座组合并紧固在一起而构成，该传感器基座通过隔膜基座的位移而被激活。 压力检测器，其上放置有垫圈，设置在安装在管道中的固定器主体的安装孔中。 压力检测器通过从安装孔中从上方插入的压紧构件气密地按压并紧固。 压板构件与隔膜基座的块上表面接触，并且垫圈也与隔膜基座的块下表面接触。 在与金属垫片接触的部分的内侧的位置处，在块的下表面上以环的形式形成浅槽，使得浅槽吸收由压紧构件引起的应变。

公开(公告)号：EP1026566A1

公开(公告)日：2000-08-09

申请号：EP99935121.6

申请日：1999-08-09

申请人： Fujikin Incorporated ,  TOKYO ELECTRON LIMITED ,  OHMI, Tadahiro

发明人： OHMI, Tadahiro ,  KAGATSUME, Satoshi, Tokyo Electron Yamanashi Ltd. ,  HIROSE, Jun, Tokyo Electron Yamanashi Ltd. ,  NISHINO, Kouji, Fujikin Incorporated

IPC分类号： G05D7/06

CPC分类号： G05D7/0658 ,  G05D7/0635 ,  Y10T137/7759 ,  Y10T137/7761

摘要： A fluid-switchable flow rate control system that permits free changing of the full scale flow rate and which can control a plurality of kinds of fluids with high precision.
The fluid-switchable flow rate control system controls the flow rate of fluid with the pressure P 1 on the upstream side of the orifice member held about twice or more higher than the downstream pressure P 2 , the fluid-switchable flow rate control system comprising an orifice member 8 replaceable with another to provide a suitable orifice diameter according to the kind of fluid and the flow rate range, a control valve 2 provided on the upstream side thereof, a pressure detector 6 provided between the control valve 2 and the orifice member 8, and a flow rate calculation circuit 14 where, from the pressure P 1 detected by the pressure detector, the flow rate Qc is calculated by the equation Qc = KP 1 (K: constant), a flow rate-setting circuit 16 for outputting flow rate setting signal Qe, a flow rate conversion circuit 18 for multiplying the calculated flow rate signal Qc by the flow rate conversion rate k into switch-over calculated flow rate signal Qf ( Qf = kQc ) to change the full scale flow rate, and a calculation control circuit 20 to output the difference between the switch-over calculation flow rate signal Qf and the flow rate setting signal Qe as control signal Qy to the drive 4 of the control valve 2, thereby opening or closing the control valve to bring the control signal Qy to zero, thus controlling the flow rate on the downstream side of the orifice member.

摘要翻译： 一种可流体切换的流量控制系统，其允许满量程流量的自由变化并且可以高精度地控制多种流体。 流体切换流量控制系统控制流体的流量，其中孔口部件的上游侧的压力P1保持在比下游压力P2大约两倍或更多的高度，流体可切换流量控制系统包括孔口部件 8可替换为另一个，以根据流体种类和流量范围提供合适的孔径，设置在其上游侧的控制阀2，设置在控制阀2和孔口构件8之间的压力检测器6，以及 流量计算电路14，其中根据由压力检测器检测到的压力P1通过公式Qc = KP1（K：常数）计算流量Qc;流量设定电路16，用于输出流量设定信号Qe ，用于将计算出的流量信号Qc乘以流量转换率k的流量转换电路18转换为切换计算流量信号Qf（Qf = kQc），以改变满量程fl 以及将切换计算流量信号Qf和流量设定信号Qe之间的差作为控制信号Qy输出到控制阀2的驱动器4的计算控制电路20，由此打开或关闭控制 使控制信号Qy为零，从而控制孔构件下游侧的流量。

公开(公告)号：EP1035457B1

公开(公告)日：2003-10-22

申请号：EP99935120.8

申请日：1999-08-09

申请人： Fujikin Incorporated ,  TOKYO ELECTRON LIMITED ,  Ohmi, Tadahiro

发明人： OHMI, Tadahiro, 1-17-301, Komegahukuro 2-chome ,  IIDA, Seiichi, 5-3, Sumiyoshiyamate 1-chome ,  KAGATSUME, Satoshi, Tokyo Electron Yamanashi Ltd. ,  HIROSE, Jun, Tokyo Electron Yamanashi Ltd. ,  NISHINO, Kouji, Fujikin Incorporated ,  IKEDA, Nobukazu, Fujikin Incorporated ,  YAMAJI, Michio, Fujikin Incorporated ,  DOHI, Ryousuke, Fujikin Incorporated ,  YOSHIKAWA, Kazuhiro, Fujikin Incorporated ,  KOYOMOGI, Mutsunori, Fujikin Incorporated ,  UNO, Tomio, Fujikin Incorporated ,  IDETA, Eiji, Fujikin Incorporated ,  HIROSE, Takashi, Fujikin Incorporated

IPC分类号： G05D7/06 ,  F16K37/00

CPC分类号： G05D7/0635 ,  Y10T137/0396 ,  Y10T137/7759 ,  Y10T137/7761 ,  Y10T137/8326

公开(公告)号：EP1096351A1

公开(公告)日：2001-05-02

申请号：EP00913087.3

申请日：2000-04-03

申请人： Fujikin Incorporated ,  TOKYO ELECTRON LIMITED ,  Ohmi, Tadahiro

发明人： OHMI, Tadahiro ,  KAGATSUME, Satoshi, Tokyo Electron Yamanashi Ltd. ,  SUGIYAMA, Kazuhiko, Tokyo Electron Yamanashi Ltd. ,  MINAMI, Yukio, Fujikin Incorporated ,  NISHINO, Kouji, Fujikin Incorporated ,  DOHI, Ryousuke, Fujikin Incorporated ,  YONEHANA, Katsunori, Fujikin Incorporated ,  IKEDA, Nobukazu, Fujikin Incorporated ,  YAMAJI, Michio, Fujikin Incorporated ,  HIROSE, Jun, Tokyo Electron Yamanashi Ltd. ,  FUKAZAWA, Kazuo, Tokyo Electron Yamanashi Ltd. ,  KOIZUMI, Hiroshi, Tokyo Electron Yamanashi Ltd. ,  NAGAOKA, Hideki, Tokyo Electron Yamanashi Ltd. ,  MORIMOTO, Akihiro, Fujikin Incorporated ,  UNO, Tomio, Fujikin Incorporated ,  IDETA, Eiji, Fujikin Incorporated ,  MATSUMOTO, Atsushi, Fujikin Incorporated ,  UENOYAMA, Toyomi, Fujikin Incorporated ,  HIROSE, Takashi, Fujikin Incorporated

IPC分类号： G05D7/06

CPC分类号： G05D7/0658 ,  G05D7/0664 ,  Y10S438/935 ,  Y10T137/0396 ,  Y10T137/7759 ,  Y10T137/7761 ,  Y10T137/86389 ,  Y10T137/87877 ,  Y10T137/87917

摘要： A fluid supply apparatus with a plurality of flow lines branching out from one regulator for adjustment of pressure, the flow lines being arranged in parallel, wherein a measure is taken that the operation, that is, opening or closing of one flow passage will have no transient effect on the steady flow of the other flow passages. For this purpose, each flow passage is provided with a time delay-type mass flow controller MFC so that when one closed fluid passage is opened, the mass flow controller on that flow passage reaches a set flow rate Qs in a specific delay time Δt from the starting point.
Also provided are a method and an apparatus for the above in which a plurality of gas types can be controlled in flow rate with high precision by one pressure-type flow control system. To that end, a formula for calculating the flow rate of a gas is theoretically derived that flows with a pressure ratio not higher than the critical pressure ratio. From that formula, the flow factor is defined, so that the formula may be applied to a number of gas types using flow factors.
The method includes calculating the flow rate Qc of a gas passing through an orifice according to formula Qc = KP 1 (K = constant) with a pressure P 1 on an upstream side of the orifice set at twice or more higher than pressure P 2 on a downstream side, wherein the flow factor FF for each kind of gas is calculated as follows: FF = (k/γs){2/(κ + 1)} 1/(κ-1) [κ/{(κ + 1)R}] 1/2 and wherein, if the calculated flow rate of gas type A is Q A , and, when gas type B is allowed to flow through the same orifice under the same pressure on the upstream side and at the same temperature on the upstream side, the flow rate Q B is calculated as follows: Q B = (FF B /FF A )Q A where

ys = concentration of gas in standard state;
κ = ratio of specific heat of gas;
R = constant of gas;
K = proportional constant not depending on the type of gas;
FF A = flow factor of gas type A; and
FF B = flow factor of gas type B.

公开(公告)号：EP1035457A1

公开(公告)日：2000-09-13

申请号：EP99935120.8

申请日：1999-08-09

申请人： Fujikin Incorporated ,  TOKYO ELECTRON LIMITED ,  Ohmi, Tadahiro

发明人： OHMI, Tadahiro, 1-17-301, Komegahukuro 2-chome ,  IIDA, Seiichi, 5-3, Sumiyoshiyamate 1-chome ,  KAGATSUME, Satoshi, Tokyo Electron Yamanashi Ltd. ,  HIROSE, Jun, Tokyo Electron Yamanashi Ltd. ,  NISHINO, Kouji, Fujikin Incorporated ,  IKEDA, Nobukazu, Fujikin Incorporated ,  YAMAJI, Michio, Fujikin Incorporated ,  DOHI, Ryousuke, Fujikin Incorporated ,  YOSHIKAWA, Kazuhiro, Fujikin Incorporated ,  KOYOMOGI, Mutsunori, Fujikin Incorporated ,  UNO, Tomio, Fujikin Incorporated ,  IDETA, Eiji, Fujikin Incorporated ,  HIROSE, Takashi, Fujikin Incorporated

IPC分类号： G05D7/06

CPC分类号： G05D7/0635 ,  Y10T137/0396 ,  Y10T137/7759 ,  Y10T137/7761 ,  Y10T137/8326

摘要： A method and apparatus for detection of the clogging of the orifice by measuring the upstream side pressure without breaking up the piping system in a flow rate control unit using an orifice, so as to extend the life of the flow control unit and enhance its safety.
To be specific, the apparatus of detecting the clogging of the orifice in a pressure-type rate flow controller has a control valve (CV), an orifice (2), a pressure detector (14) for measuring the upstream pressure P 1 therebetween and a flow rate setting circuit (32) wherein with the upstream pressure P 1 maintained about two or more times higher than the downstream pressure P 2 , the downstream flow rate Q C is calculated from the equation Q C = KP 1 (K: constant) and wherein the control valve (CV) is controlled by the difference signal Q Y between the calculated flow rate Q C and the set flow rate Q S , the apparatus comprising:

a storage memory M memorizing standard pressure attenuation data Y(t) of the upstream pressure P 1 measured with the flow rate switched from the high set flow rate Q SH to the low set flow rate Q SL , with the orifice (2) not clogged
a pressure detector (14) for determination of the pressure attenuation data P(t) of the upstream pressure P 1 with the flow rate switched from the high set flow rate Q SR to the low set flow rate Q SL , with the orifice (2) in the actual conditions
a central processing unit CPU for checking the pressure attenuation data P(t) against standard pressure attenuation data Y(t) and
an alarm circuit (46) that turns on a clogging alarm when the pressure attenuation data P(t) deviates from standard pressure attenuation data Y(t) to a specific degree or beyond that.

摘要翻译： 通过测量，而不使用到孔以便延伸流量控制单元的使用寿命并提高其安全性的流量控制单元分手管道系统中的上游侧压力检测用节流孔堵塞的方法和装置。 具体而言，在检测孔的堵塞的压力式速率流控制器的装置具有用于测量上游压力P1有和一个之间的控制阀（CV）与小孔（2），压力检测器（14） 流量设定电路（32）与上游侧压力P1 worin保持在约比下游压力P2，下游流量QC从等式QC = KP1（K：常数）计算值高两或更多倍和worin所述控制阀（ 一个存储装置M与所述流率测量的上游压力P1的记忆基准压力衰减数据Y（t）的切换：CV）是由计算的流量QC与设定流量QS，该装置包括之间的差信号QY控制 从高设定流量QSH为低设定流量QSL，与所述孔（2）无堵塞的压力检测器（14），用于判定与所述流量上游压力P1的压力衰减数据P（t）的切换 从 该高设定流量QSR为低设定流量QSL，与所述孔（2）在实际情况中，用于检查对基准压力衰减数据Y（t）的压力衰减数据P（t）的一个中央处理单元CPU和 报警电路（46）做了堵塞报警接通当压力衰减数据P（t）的标准压力衰减数据Y（t）的偏离到一个特定的程度或超出。

公开(公告)号：EP1672457A1

公开(公告)日：2006-06-21

申请号：EP04817112.8

申请日：2004-09-14

申请人： FUJIKIN INCORPORATED ,  OHMI, Tadahiro

发明人： OHMI, Tadahiro ,  TERAMOTO, Akinobu ,  UNO, Tomio, Fujikin Incorporated ,  DOHI, Ryousuke, Fujikin Incorporated ,  NISHINO, Kouji, Fujikin Incorporated ,  NAKAMURA, Osamu, Fujikin Incorporated ,  MATSUMOTO, Atsushi, Fujikin Incorporated ,  NAGASE, Masaaki, Fujikin Incorporated ,  IKEDA, Nobukazu, Fujikin Incorporated

IPC分类号： G05D7/06

CPC分类号： G05D16/208 ,  Y10T137/7761 ,  Y10T137/8741 ,  Y10T137/87507

摘要： The present invention makes it possible to achieve an accurate control of an internal pressure of a chamber over a wide range by preventing substantial reduction of accuracy of flow rate control in the small flow quantity range and to ensure an accurate flow control over the entire range of flow rate control, thus adjusting the flow rate of a gas supplied to the chamber.
A gas supply facility includes a plurality of pressure type flow controllers connected in parallel, and a controller to control operation of the plurality of pressure type flow controllers so as to supply a desired gas exhausted by a vacuum pump to a chamber while controlling its flow rate, one of the pressure type flow controllers is the controller to control the gas flow rate range up to 10% of the maximum flow rate supplied to the chamber, while the remaining pressure type flow controllers are made to be ones that control the rest of the gas flow rate range. Furthermore, pressure inside the chamber is controlled by installing a pressure detector in the chamber, inputting the value detected by the detector to the controller, and by adjusting a control signal to the pressure type flow controller.

摘要翻译： 本发明通过防止在小流量范围内的流量控制的精度的显着降低，可以在宽范围内实现对室的内部压力的精确控制，并且确保在整个范围内的精确的流量控制 流量控制，从而调节供应到室的气体的流量。 气体供给设备包括并联连接的多个压力式流量控制器和控制器，用于控制多个压力式流量控制器的操作，以便在控制其流量的同时将由真空泵排出的期望气体提供给腔室 压力式流量控制器之一是用于控制气体流量范围高达供应给腔室的最大流量的10％的控制器，而剩余的压力式流量控制器被制成控制其余部分 气体流量范围。 此外，通过在室内安装压力检测器，将检测器检测到的值输入到控制器，并通过调节压力型流量控制器的控制信号来控制室内的压力。

公开(公告)号：EP1475684B1

公开(公告)日：2007-04-04

申请号：EP02781829.3

申请日：2002-11-22

申请人： FUJIKIN INCORPORATED ,  TOKYO ELECTRON LIMITED

发明人： OHMI, Tadahiro ,  UNO, Tomio, Fujikin Incorporated ,  NAKAMURA, Osamu, Fujikin Incorporated ,  IKEDA, Nobukazu, Fujikin Incorporated ,  DOHI, Ryousuke, Fujikin Incorporated ,  NISHINO, Kouji, Fujikin Incorporated ,  MATSUMOTO, Atsushi, Fujikin Incorporated ,  SUGIYAMA, Kazuhiko, Tokyo Electron Ltd. ,  INUI, Shujiro ,  SAKAI, Taiji ,  UEYAMA, Masanori

IPC分类号： G05D7/06 ,  G01F1/36

CPC分类号： G05D7/0635 ,  Y10T137/7759 ,  Y10T137/7761

摘要： An advanced pressure type flow control device capable of accurately controlling a flow by using an experimental flow expression established to accurately fit to the actual flow of compressible fluid in a non-critical area, wherein the experimental flow expression of the compressible fluid in the non-critical area non-sound velocity area is expressed as Qc = KP2m P1 - P2n, and the fluid flow passing through an orifice 4 is calculated by using the expression Qc = KP2m P1 - P2n K is a proportional constant, m and n are constants so that the flow can be accurately and rapidly controlled to a specified one, and a pressure ratio P2/P1 = r provided by an upstream side pressure P1 and a downstream side pressure P2 is always compared with a critical value rc and the flow is calculated by using an expression Qc = KP1 under the critical condition of r rc so that the flow can be accurately and rapidly controlled to the specified one in correspondence to all conditions of the fluid.