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1.发明公开
公开(公告)号：EP3715931A1
公开(公告)日：2020-09-30
申请号：EP18880253.2
申请日：2018-11-09
Applicant: Hamamatsu Photonics K.K.
Inventor： HIROSE Masaki , SHIBAYAMA Katsumi , KASAHARA Takashi , KAWAI Toshimitsu , OYAMA Hiroki , KURAMOTO Yumi
Abstract: A method for removing a foreign substance according to an embodiment includes: a step of preparing a Fabry-Perot interference filter in which a gap is formed between a portion of a first laminate at least including a first mirror portion and a portion of a second laminate at least including a second mirror portion facing each other so that a distance between the first mirror portion and the second mirror portion facing each other varies by an electrostatic force; a step of detecting a foreign substance adhering to a surface of the second laminate; and a step of blowing air in which an airflow peak position is adjusted on the basis of a position of the detected foreign substance onto the surface of the second laminate and thereby removing the foreign substance from the surface of the second laminate.
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公开(公告)号：EP3018521A1
公开(公告)日：2016-05-11
申请号：EP14820407.6
申请日：2014-06-24
Applicant: Hamamatsu Photonics K.K.
Inventor： SHIBAYAMA Katsumi , KASAHARA Takashi , HIROSE Masaki , KAWAI Toshimitsu
CPC classification number: G02B26/001 , G01J3/26
Abstract: A Fabry-Perot interference filter 10A includes a first mirror 31; a second mirror 41 being opposite to the first mirror 31 with a gap S therebetween; a first electrode 17 formed in the first mirror 31 to surround a light transmission region 11; a second electrode 18 formed in the first mirror 31 to include the light transmission region 11; and a third electrode 19 formed in the second mirror 41 to be opposite to the first electrode 17 and the second electrode 18 and connected to the same potential as the second electrode 18. The second electrode 18 is positioned at the side of the third electrode 19 or the opposite side thereof with respect to the first electrode 17 in an opposite direction D where the first mirror 31 and the second mirror 41 are opposite each other.
Abstract translation: 法布里珀罗干涉滤光片10A包括第一反射镜31， 第二反射镜41，与第一反射镜31隔着间隙S相对; 形成在第一反射镜31中以包围光透射区域11的第一电极17; 形成在第一反射镜31中以包括透光区域11的第二电极18; 以及形成在第二反射镜41中以与第一电极17和第二电极18相对并且连接到与第二电极18相同的电位的第三电极19.第二电极18位于第三电极19的侧面 或者在第一反射镜31和第二反射镜41彼此相对的相反方向D上相对于第一电极17的相反侧。
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公开(公告)号：EP3715934A1
公开(公告)日：2020-09-30
申请号：EP18881898.3
申请日：2018-11-09
Applicant: Hamamatsu Photonics K.K.
Inventor： KASAHARA Takashi , SHIBAYAMA Katsumi , HIROSE Masaki , KAWAI Toshimitsu , OYAMA Hiroki , KURAMOTO Yumi
Abstract: An electrical inspection method includes: a step of preparing a wafer in which a plurality of Fabry-Perot interference filter portions is formed, each of the plurality of Fabry-Perot interference filter portions in which a distance between a first mirror portion and a second mirror portion facing each other varies by an electrostatic force, and a step of inspecting electrical characteristics of each of the plurality of Fabry-Perot interference filter portions.
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4.发明公开
公开(公告)号：EP3620764A1
公开(公告)日：2020-03-11
申请号：EP18794054.9
申请日：2018-04-24
Applicant: Hamamatsu Photonics K.K.
Inventor： KASAHARA Takashi , SHIBAYAMA Katsumi , HIROSE Masaki , KAWAI Toshimitsu , OYAMA Hiroki , KURAMOTO Yumi
Abstract: Provided is an optical measurement control program in a light detection device including: a Fabry-Perot interference filter having a pair of mirror portions facing each other via a gap, a distance between the pair of mirror portions changing according to the potential difference generated between the pair of mirror portions; and a light detector detecting light transmitted through the Fabry-Perot interference filter, the optical measurement control program causing a computer to execute a process of measuring light to be measured by acquiring an electric signal output from the light detector, the optical measurement control program causing the computer to function as: a voltage control unit controlling the potential difference generated between the pair of mirror portions to gradually increase until the potential difference reaches a set potential difference corresponding to a wavelength of the light to be measured before the acquisition of the electric signal is started; and a signal acquisition unit acquiring the electric signal in a state where the voltage control unit allows the set potential difference to be generated between the pair of mirror portions.
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公开(公告)号：EP3712930A1
公开(公告)日：2020-09-23
申请号：EP18879718.7
申请日：2018-11-09
Applicant: Hamamatsu Photonics K.K.
Inventor： HIROSE Masaki , SHIBAYAMA Katsumi , KASAHARA Takashi , KAWAI Toshimitsu , OYAMA Hiroki , KURAMOTO Yumi
Abstract: A suction method is provided as a method of performing, by using a suction collet, suction of a Fabry-Perot interference filter including a substrate and a laminated structure that is provided on the substrate and that includes a main surface facing the side opposite to the substrate, the method including a first step of arranging the suction collet so as to face the main surface, a second step of bringing the suction collet into contact with the Fabry-Perot interference filter after the first step, and a third step of suctioning the Fabry-Perot interference filter by using the suction collet after the second step.
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Patent Agency Ranking
公开(公告)号：EP3712929A1
公开(公告)日：2020-09-23
申请号：EP18877949.0
申请日：2018-11-09
Applicant: Hamamatsu Photonics K.K.
Inventor： HIROSE Masaki , SHIBAYAMA Katsumi , KASAHARA Takashi , KAWAI Toshimitsu , OYAMA Hiroki , KURAMOTO Yumi
Abstract: A suction method is provided as a method of performing, by using a suction collet, suction of a Fabry-Perot interference filter including: a substrate; a laminated structure that is provided on the substrate and that includes a main surface facing a side opposite to the substrate; and a thinned portion that is located outside the laminated structure when viewed in a direction intersecting the main surface and that is recessed to a side of the substrate with respect to the main surface, the method including: a first step of arranging the suction collet so as to face the main surface; a second step of bringing the suction collet into contact with the Fabry-Perot interference filter after the first step; and a third step of suctioning the Fabry-Perot interference filter by using the suction collet after the second step.
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公开(公告)号：EP3064912A1
公开(公告)日：2016-09-07
申请号：EP14857161.5
申请日：2014-10-31
Applicant: Hamamatsu Photonics K.K.
Inventor： SHIBAYAMA Katsumi , KASAHARA Takashi , HIROSE Masaki , KAWAI Toshimitsu
IPC: G01J3/26
CPC classification number: G01J3/26 , G01J3/0286
Abstract: A spectral sensor 1 includes a wiring substrate 2 which has a principal surface; a light detector 3 which is disposed on the principal surface 2A of the wiring substrate 2 and is electrically connected to the wiring substrate 2; spacer 4 which is disposed around the light detector 3, on the principal surface 2A of the wiring substrate 2; and a Fabry-Perot interference filter 10 which has a light transmission region 11 and is disposed on the principal surface 2A of the wiring substrate 2 with the spacer 4 therebetween. The spacer 4 support the Fabry-Perot interference filter 10 in a surrounding region R1 of the light transmission region 11 and the spacer 4 has opening A1 communicating with an inner side of the surrounding region R1 and an outer side of the surrounding region R1, when viewed from a light transmission direction in the light transmission region 11.
Abstract translation: 光谱传感器1包括具有主表面的布线基板2; 设置在配线基板2的主面2A上并与配线基板2电连接的光检测器3， 在布线基板2的主面2A上配置在光检测器3的周围的间隔件4， 以及法布里 - 珀罗干涉滤光片10，其具有透光区域11，隔着间隔物4配置在布线基板2的主面2A上。 间隔物4在光透射区域11的周围区域R1中支撑法布里 - 珀罗干涉滤光片10，并且当隔离物4具有与周围区域R1的内侧和周围区域R1的外侧连通的开口A1时 从光透射区域11中的光透射方向观察。
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公开(公告)号：EP3715932A1
公开(公告)日：2020-09-30
申请号：EP18880788.7
申请日：2018-11-09
Applicant: Hamamatsu Photonics K.K.
Inventor： KAWAI Toshimitsu , SHIBAYAMA Katsumi , KASAHARA Takashi , HIROSE Masaki , OYAMA Hiroki , KURAMOTO Yumi
Abstract: A wafer includes a substrate layer, a first mirror layer having a plurality of two-dimensionally arranged first mirror portions, and a second minor layer having a plurality of two-dimensionalty arranged second mirror portions. A plurality of Fabry-Perot interference filter portions are fanned in an effective area, in each of the plurality of Fabry-Perot interference filter portions a gap is formed between the first minor portion and the second mirror portion. A plurality of dummy filter portions are formed in a dummy area disposed along an outer edge of the substrate layer and surrounding the effective area, in each of the plurality of dummy filter portions an intermediate layer is provided between the first mirror portion and the second mirror portion. At least the second mirror portion is surrounded by the first groove in each of the plurality of Fabry-Perot interference filter portions and the plurality of dummy filter portions.
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公开(公告)号：EP3428589A1
公开(公告)日：2019-01-16
申请号：EP17763113.2
申请日：2017-03-03
Applicant: Hamamatsu Photonics K.K.
Inventor： HIROSE Masaki , SHIBAYAMA Katsumi , KASAHARA Takashi , KAWAI Toshimitsu , OYAMA Hiroki
Abstract: A light detection device includes a Fabry-Perot interference filter provided with a light transmitting region on a predetermined line, a light detector disposed on one side with respect to the Fabry-Perot interference filter on the line, a package having an opening positioned on the other side with respect to the Fabry-Perot interference filter on the line, a light transmitting member provided in the package such that the opening is blocked, and a temperature control element having an endothermic region thermally connected to the Fabry-Perot interference filter and the light detector. The endothermic region is positioned on one side with respect to the light detector on the line.
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公开(公告)号：EP3290880A1
公开(公告)日：2018-03-07
申请号：EP16786366.1
申请日：2016-04-19
Applicant: Hamamatsu Photonics K.K.
Inventor： HIROSE Masaki , SHIBAYAMA Katsumi , KASAHARA Takashi , KAWAI Toshimitsu , YASHIRO Takehiko , MINENO Mitsushi , SUZUKI Shigeru
CPC classification number: G01J3/26 , G01J3/0286 , G01J3/0291 , G01J5/0225 , G01J5/024 , G01J5/045 , G01J5/046 , G01J5/06 , G01J5/0862 , G01J5/10 , G01J2005/068 , G02B5/284 , G02B7/008 , G02B26/001
Abstract: A light detection device 1A includes a Fabry-Perot interference filter 10, a light detector 3, a spacer 4 that has a placement surface on which a portion outside a light transmission region 11 in a bottom surface of the interference filter 10 is placed, and an adhesive member 5 that adheres the interference filter 10 and the spacer 4 to each other. Elastic modulus of the adhesive member 5 is smaller than elastic modulus of the spacer 4. At least a part of a lateral surface of the interference filter 10 is located on the placement surface such that a part of the placement surface of the spacer 4 is disposed outside the lateral surface. The adhesive member 5 is disposed in a corner portion formed by the lateral surface of the interference filter 10 and the part of the placement surface of the spacer 4 and contacts each of the lateral surface and the part of the placement surface.
Abstract translation: 光检测装置1A具备：法布里珀罗干涉滤光片10，光检测器3，具有放置干涉滤光片10的底面的光透射区域11的外侧的载置面的隔离物4， 将干涉滤波器10和间隔物4粘接的粘接部件5。 粘接部件5的弹性模量比间隔件4的弹性模量小。干涉滤光片10的侧面的至少一部分位于载置面上，以使间隔件4的载置面的一部分配置 在外表面之外。 粘接构件5配置在由干涉滤波器10的侧面和间隔物4的载置面的一部分形成的角部，并与该载置面的侧面和一部分接触。
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