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公开(公告)号:EP2750175B1
公开(公告)日:2020-03-25
申请号:EP12825546.0
申请日:2012-08-24
申请人: Harmotec Co., Ltd.
IPC分类号: H01L21/683 , H01L21/687 , B65G25/00
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公开(公告)号:EP3079167A1
公开(公告)日:2016-10-12
申请号:EP14868102.6
申请日:2014-11-27
申请人: Harmotec Co., Ltd.
IPC分类号: H01L21/677 , B25J15/06 , B65G49/06 , B65G49/07
CPC分类号: H01L21/6838 , B25J15/0675 , B65G47/911 , B65G49/061 , B65G2249/04 , B65G2249/045
摘要: Holding equipment for holding a plate-like member by discharging fluid to generate a negative pressure between the holding equipment and the member, includes a columnar main body, a flat end face formed at the main body, that faces the member, a concave part formed at the end face, one or more fluid passages that discharge fluid into the concave part to form a swirl flow or a radial flow, and a liquid supply means for supplying a part of the member with a liquid, the part facing the centre of the swirl flow or the radial centre of the radial flow.
摘要翻译: 通过排出流体来保持板状构件的保持设备,以在保持设备和构件之间产生负压,所述保持设备包括柱状主体,形成在主体处的面对构件的平坦端面,形成的凹部 在所述端面上设置有一个或多个流体通道,所述流体通道将流体排入所述凹部以形成涡流或径向流动;以及液体供应装置,用于向所述构件的一部分供应液体,所述部件面向 涡流或径向流的径向中心。
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公开(公告)号:EP4155243A1
公开(公告)日:2023-03-29
申请号:EP21808078.6
申请日:2021-05-18
申请人: Harmotec Co., Ltd.
发明人: IWASAKA Hitoshi , TANAKA Hidemitsu , TOKUNAGA Hideyuki , KOSHIISHI Katsuhiro , KASAI Yuji , IWASAKA Naonari
IPC分类号: B65G49/07 , H01L21/677 , B25J15/06
摘要: A conveyance device according to an embodiment of the present invention comprises a plate-shaped main body that faces a plate-shaped object to be conveyed, a plurality of recesses formed in the plate-shaped main body to face an outer circumferential portion of the plate-shaped object to be conveyed, a plurality of discharge channels formed inside the main body, and a plurality of movement restriction members formed on the main body to contact with and to restrict lateral movement of the plate-shaped object to be conveyed. One each of the plurality of discharge channels is connected to one each of the plurality of recesses, and a swirling flow is formed in the plurality of recesses by fluid supplied from the plurality of connected discharge channels. In each of the plurality of recesses, a portion of an opening not covered by the plate-shaped object to be conveyed is covered by one of the plurality of movement restriction members.
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公开(公告)号:EP2750175A1
公开(公告)日:2014-07-02
申请号:EP12825546.0
申请日:2012-08-24
申请人: Harmotec Co., Ltd.
IPC分类号: H01L21/677 , B65G49/07
摘要: The object of the present invention is to suppress rotation of a plate-like member, which is caused when the plate-like member is conveyed in a non-contacting manner.
Non-contacting conveyance equipment for conveying a plate-like member in a non-contacting manner comprises a plate-like base body and a plurality of swirl flow-forming bodies provided at the base body. Each of the plurality of swirl flow-forming bodies includes a column-shaped main body, a cylindrical chamber formed inside the main body, that has an opening at one end, a flat end face formed at a surface of the main body, in which the cylindrical chamber is opened, a jetting port provided at an inner circumferential surface of the cylindrical chamber, a fluid introduction port provided at an outer circumferential surface of the main body, and a fluid passage that connects the fluid introduction port to the jetting port. The fluid passage is arranged so that a direction in which a fluid flows out of the cylindrical chamber along the end face is substantially parallel to a line that extends from a center of gravity of the plate-like member being conveyed, toward an outer circumference of the plate-like member.摘要翻译: 本发明的目的是抑制当板状构件以非接触方式传送时引起的板状构件的旋转。 用于以非接触方式传送板状构件的非接触式传送设备包括板状基体和设置在基体上的多个旋流形成体。 多个旋流形成体中的每一个均包括柱形主体,形成在主体内部的圆柱形室,其在一端具有开口,形成在主体的表面处的平坦端面,其中, 打开圆筒形腔室,在圆筒形腔室的内圆周表面处设置喷射口,设置在主体的外圆周表面处的流体引入口以及将流体引入口连接到喷射口的流体通道。 流体通路被配置成流体从圆筒状的腔室沿着端面流出的方向与从被输送的板状部件的重心延伸的线大致平行, 板状构件。
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公开(公告)号:EP4317038A1
公开(公告)日:2024-02-07
申请号:EP22780562.9
申请日:2022-03-25
申请人: Harmotec Co., Ltd.
发明人: IWASAKA Hitoshi , TOKUNAGA Hideyuki , KOSHIISHI Katsuhiro , TANAKA Hidemitsu , KASAI Yuji , IWASAKA Naonari
摘要: The present invention improves a suction power of conveyance equipment. Conveyance equipment comprises a swirl flow-forming body, a discharge fluid rectification cover and a skirt. The swirl flow-forming body has a columnar first body. A columnar recess is provided inward of the lower end face of the first body. A pair of fluid passages are formed in the columnar first body to extend generally tangential to the inside surface of the columnar recess and supply fluid into the columnar recess to generate a swirling flow. The discharge fluid rectification cover has a second body which is comprised of a disk-shaped base plate and a peripheral wall that extends around the periphery of the base plate. The second body is positioned to cover the columnar recess. A suction port is provided in the bottom plate. A discharge passage is provided in the peripheral wall to extend generally tangential to the inside surface of the peripheral wall. The skirt is cylindrical and is made of an elastic thin film, a top opening of which is connected to the suction port.
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公开(公告)号:EP3081349B1
公开(公告)日:2018-01-24
申请号:EP16726264.1
申请日:2016-02-29
申请人: Harmotec Co., Ltd.
发明人: IWASAKA Hitoshi , TOKUNAGA Hideyuki , KASAI Yuji
IPC分类号: B25J15/06 , B65G49/07 , H01L21/677 , H01L21/67 , H01L21/683
CPC分类号: B25J15/0683 , B65G49/061 , B65G2201/022 , B65G2249/045 , H01L21/67086 , H01L21/67092 , H01L21/67712 , H01L21/67766 , H01L21/67778 , H01L21/67781 , H01L21/6838
摘要: Suction equipment 10 is provided with a swirl flow-forming body 1, a baffle plate 2, and connecting members 3 that connect swirl flow-forming body 1 and baffle plate 2. Baffle plate 2 obstructs a member W to which suction is applied from entering a concave part 12 provided in swirl flow-forming body 1. Connecting members 3 form, between end face 13 and baffle plate 2, a flow path for fluid to flow out of concave part 12.
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