公开(公告)号：EP4155243A1

公开(公告)日：2023-03-29

申请号：EP21808078.6

申请日：2021-05-18

申请人： Harmotec Co., Ltd.

发明人： IWASAKA Hitoshi ,  TANAKA Hidemitsu ,  TOKUNAGA Hideyuki ,  KOSHIISHI Katsuhiro ,  KASAI Yuji ,  IWASAKA Naonari

IPC分类号： B65G49/07 ,  H01L21/677 ,  B25J15/06

摘要： A conveyance device according to an embodiment of the present invention comprises a plate-shaped main body that faces a plate-shaped object to be conveyed, a plurality of recesses formed in the plate-shaped main body to face an outer circumferential portion of the plate-shaped object to be conveyed, a plurality of discharge channels formed inside the main body, and a plurality of movement restriction members formed on the main body to contact with and to restrict lateral movement of the plate-shaped object to be conveyed. One each of the plurality of discharge channels is connected to one each of the plurality of recesses, and a swirling flow is formed in the plurality of recesses by fluid supplied from the plurality of connected discharge channels. In each of the plurality of recesses, a portion of an opening not covered by the plate-shaped object to be conveyed is covered by one of the plurality of movement restriction members.

公开(公告)号：EP4317038A1

公开(公告)日：2024-02-07

申请号：EP22780562.9

申请日：2022-03-25

申请人： Harmotec Co., Ltd.

发明人： IWASAKA Hitoshi ,  TOKUNAGA Hideyuki ,  KOSHIISHI Katsuhiro ,  TANAKA Hidemitsu ,  KASAI Yuji ,  IWASAKA Naonari

IPC分类号： B65H5/08 ,  B25J15/06

摘要： The present invention improves a suction power of conveyance equipment. Conveyance equipment comprises a swirl flow-forming body, a discharge fluid rectification cover and a skirt. The swirl flow-forming body has a columnar first body. A columnar recess is provided inward of the lower end face of the first body. A pair of fluid passages are formed in the columnar first body to extend generally tangential to the inside surface of the columnar recess and supply fluid into the columnar recess to generate a swirling flow. The discharge fluid rectification cover has a second body which is comprised of a disk-shaped base plate and a peripheral wall that extends around the periphery of the base plate. The second body is positioned to cover the columnar recess. A suction port is provided in the bottom plate. A discharge passage is provided in the peripheral wall to extend generally tangential to the inside surface of the peripheral wall. The skirt is cylindrical and is made of an elastic thin film, a top opening of which is connected to the suction port.