Defect observing electron microscope
    1.
    发明公开
    Defect observing electron microscope 失效
    Elektronenmikroskop zur Fehlerbeobachtung

    公开(公告)号:EP0686994A1

    公开(公告)日:1995-12-13

    申请号:EP95108927.5

    申请日:1995-06-09

    申请人: HITACHI, LTD.

    IPC分类号: H01J37/26 H01J37/20

    CPC分类号: H01J37/26 H01J2237/2617

    摘要: A transmission electron microscope makes it possible to search for defects without applying an undesirable treatment to a specimen by using a reference specimen prepared separately from a specimen to be observed. A pair of specimen holders (24a, 24b) detachable from the column (21) of the electron microscope are adjacently arranged at upper and lower stages respectively along the electron beam axis to position the specimens closely to each other in an electron beam illuminating position. The pair of holders can be independently set to or removed from the electron beam illuminating position. The specimen holders include devices for selectively finely adjusting the spacing between the specimens, the angle of the specimens with respect to the electron beam axis and with respect to a plane perpendicular to the electron beam axis.

    摘要翻译: 透射电子显微镜使得可以通过使用与要观察的样品分开制备的参考样品,在不对试样施加不期望的处理的情况下搜索缺陷。 从电子显微镜的列(21)可拆卸的一对样本保持器(24a,24b)分别沿着电子束轴相邻地布置在上部和下部阶段,以使电子束照明位置彼此靠近。 该对保持器可以独立地设置或从电子束照明位置移除。 样品架包括用于选择性地微调样品之间的间距的装置,试样相对于电子束轴线的角度以及相对于垂直于电子束轴线的平面的装置。

    Method and apparatus for gas analysis
    2.
    发明公开
    Method and apparatus for gas analysis 失效
    Verfahren und Vorrichtung zur Gasanalyse。

    公开(公告)号:EP0684470A2

    公开(公告)日:1995-11-29

    申请号:EP95109386.3

    申请日:1991-07-23

    IPC分类号: G01N33/00 G01N1/38

    摘要: The invention relates to a method and an apparatus for gas analysis, particularly for calibrating gas analysis devices with calibration gases containing very low concentrations of a liquid sample vapor at a ppb level. According to the invention, the method comprises the following steps:

    - putting in the concentration of a sample gas in a calibration gas (18) into a computer system (40) to permit the system to calculate the flow rate (L3) of a zero gas (20) to be mixed with sample gas,
    - supplying the zero gas (20) from a zero gas source (19) to a main tube (12),
    - supplying the sample gas from a sample gas generating device (6) to the main tube (12) to mix the sample gas with the zero gas (20) in the main tube (12),
    - controlling the flow rate of the zero gas (20) through flow control means (25) of the zero gas (20) by a set flow rate signal (43) of the calculated flow rate (L3) fed from the computer system (40) the thereby generate the calibration gas (18) to an analysis device (41), and
    - feeding a data input-starting signal (46) from the computer system (40) to the analysis device (41), and feeding a data signal (47) from the analysis device (41) to the computer system (40).

    摘要翻译: 本发明涉及一种用于气体分析的方法和装置,特别是用于使用含有非常低浓度的ppb级液体样品蒸汽的校准气体校准气体分析装置。 根据本发明,该方法包括以下步骤:将校准气体(18)中的样品气体的浓度放入计算机系统(40)中,以允许系统计算零气体的流量(L3) (20)与样品气体混合,将零气体(20)从零气体源(19)供应到主管(12),将样品气体从样品气体发生装置(6)供应到主管 (12)将样品气体与主管(12)中的零气体(20)混合,通过零气体(20)的流量控制装置(25)将零气体(20)的流量控制为 设置从计算机系统(40)馈送的计算流量(L3)的流量信号(43),从而将生成校准气体(18)送到分析装置(41),并且馈送数据输入启动信号(46 )从计算机系统(40)传送到分析装置(41),并将数据信号(47)从分析装置(41)馈送到计算机系统(40)。

    Method and apparatus for gas analysis
    5.
    发明公开
    Method and apparatus for gas analysis 失效
    用于气体分析的方法和装置。

    公开(公告)号:EP0684470A3

    公开(公告)日:1997-05-21

    申请号:EP95109386.3

    申请日:1991-07-23

    IPC分类号: G01N33/00 G01N1/38

    摘要: The invention relates to a method and an apparatus for gas analysis, particularly for calibrating gas analysis devices with calibration gases containing very low concentrations of a liquid sample vapor at a ppb level. According to the invention, the method comprises the following steps:
    - putting in the concentration of a sample gas in a calibration gas (18) into a computer system (40) to permit the system to calculate the flow rate (L3) of a zero gas (20) to be mixed with sample gas, - supplying the zero gas (20) from a zero gas source (19) to a main tube (12), - supplying the sample gas from a sample gas generating device (6) to the main tube (12) to mix the sample gas with the zero gas (20) in the main tube (12), - controlling the flow rate of the zero gas (20) through flow control means (25) of the zero gas (20) by a set flow rate signal (43) of the calculated flow rate (L3) fed from the computer system (40) the thereby generate the calibration gas (18) to an analysis device (41), and - feeding a data input-starting signal (46) from the computer system (40) to the analysis device (41), and feeding a data signal (47) from the analysis device (41) to the computer system (40).