公开(公告)号：EP0669538A2

公开(公告)日：1995-08-30

申请号：EP95301077.4

申请日：1995-02-21

申请人： HITACHI, LTD.

发明人： Suzuki, Hiroshi ,  Shinada, Hiroyuki ,  Kuroda, Katsuhiro ,  Yajima, Yusuke ,  Takahashi, Yoshio ,  Nakajima, Masato ,  Saito, Hideo

IPC分类号： G01R33/02

CPC分类号： G01R33/0213 ,  H01J37/28 ,  H01J2237/221 ,  H01J2237/24564

摘要： A charged particle beam (12a, 12b) is transmitted through a specimen (14) for producing an irregular pattern as a first image. Further, a magnetic field to be measured (16) is arranged in space where a charged particle beam is passed between the specimen and an image plane thereby to produce a second image having an irregular pattern as in the foregoing case. The first image and the second image are processed to produce the deflection angle of the charged particle beam due to the magnetic field. This deflection angle is extracted from the entire positions of a cross section of the space where measurement is desired, thereby constructing projection data of a magnetic field by a charged particle beam. Furthermore, the magnetic field to be measured is rotated and the above-mentioned processing is performed from each direction to construct projection data. The projection data thus obtained and the computer tomography technique are used to determine a magnetic field at each point in space.

摘要翻译： 带电粒子束（12a，12b）通过用于产生不规则图案的样本（14）作为第一图像传输。 此外，如上所述，在被检测体和像面之间通过带电粒子束的空间内设置被测量磁场（16），由此产生具有不规则图案的第二图像。 处理第一图像和第二图像以产生由于磁场引起的带电粒子束的偏转角。 从需要测量的空间的横截面的整个位置提取该偏转角度，由此构成通过带电粒子束的磁场的投影数据。 此外，要测量的磁场旋转，并且从每个方向执行上述处理以构造投影数据。 由此获得的投影数据和计算机断层摄影技术用于确定每个空间点处的磁场。

公开(公告)号：EP0669538A3

公开(公告)日：1996-12-11

申请号：EP95301077.4

申请日：1995-02-21

申请人： HITACHI, LTD.

发明人： Suzuki, Hiroshi ,  Shinada, Hiroyuki ,  Kuroda, Katsuhiro ,  Yajima, Yusuke ,  Takahashi, Yoshio ,  Nakajima, Masato ,  Saito, Hideo

IPC分类号： G01R33/02

CPC分类号： G01R33/0213 ,  H01J37/28 ,  H01J2237/221 ,  H01J2237/24564

摘要： A charged particle beam (12a, 12b) is transmitted through a specimen (14) for producing an irregular pattern as a first image. Further, a magnetic field to be measured (16) is arranged in space where a charged particle beam is passed between the specimen and an image plane thereby to produce a second image having an irregular pattern as in the foregoing case. The first image and the second image are processed to produce the deflection angle of the charged particle beam due to the magnetic field. This deflection angle is extracted from the entire positions of a cross section of the space where measurement is desired, thereby constructing projection data of a magnetic field by a charged particle beam. Furthermore, the magnetic field to be measured is rotated and the above-mentioned processing is performed from each direction to construct projection data. The projection data thus obtained and the computer tomography technique are used to determine a magnetic field at each point in space.

公开(公告)号：EP0669538B1

公开(公告)日：2004-08-11

申请号：EP95301077.4

申请日：1995-02-21

申请人： Hitachi, Ltd.

发明人： Suzuki, Hiroshi ,  Shinada, Hiroyuki ,  Kuroda, Katsuhiro ,  Yajima, Yusuke ,  Takahashi, Yoshio ,  Nakajima, Masato ,  Saito, Hideo

IPC分类号： G01R33/02

CPC分类号： G01R33/0213 ,  H01J37/28 ,  H01J2237/221 ,  H01J2237/24564