公开(公告)号：EP2797099B1

公开(公告)日：2017-09-27

申请号：EP14165693.4

申请日：2014-04-23

申请人： Hitachi, Ltd.

发明人： Sugawara, Akira ,  Shimakura, Tomokazu ,  Takahashi, Yoshio

IPC分类号： H01J37/09 ,  H01J37/20

CPC分类号： H01J37/20 ,  H01J37/09 ,  H01J37/266 ,  H01J2237/0264 ,  H01J2237/2008

公开(公告)号：EP2797099A3

公开(公告)日：2016-01-06

申请号：EP14165693.4

申请日：2014-04-23

申请人： Hitachi, Ltd.

发明人： Sugawara, Akira ,  Shimakura, Tomokazu ,  Takahashi, Yoshio

IPC分类号： H01J37/09 ,  H01J37/20

CPC分类号： H01J37/20 ,  H01J37/09 ,  H01J37/266 ,  H01J2237/0264 ,  H01J2237/2008

摘要： The disclosed invention provides a sample holder capable of reducing or preventing the influence of a charged particle beam 11 deflected by applying a magnetic field to a sample 201 and provided with means for simply switching between a mode of observing the sample while applying a magnetic field to the sample, and a mode free of a magnetic field in which a magnetic field becomes zero completely. The sample holder includes a magnetic field generating element 301 including three or more magnetic gaps 351-353 for applying a magnetic field to a sample, a cantilever-beam-shaped sample holding element 202 that holds the sample 201 on one end thereof, and a moving mechanism that adjusts a relative position between a sample and a magnetic gap. The magnetic gaps 351-353 can be placed along an optical axis of the charged particle beam 11.

公开(公告)号：EP2662880A2

公开(公告)日：2013-11-13

申请号：EP13165579.7

申请日：2013-04-26

申请人： RIKEN ,  Hitachi Ltd.

发明人： Tanigaki, Toshiaki ,  Aizawa, Shinji ,  Matsuda, Tsuyoshi ,  Harada, Ken ,  Takahashi, Yoshio

IPC分类号： H01J37/295 ,  H01J37/26

CPC分类号： H01J37/22 ,  H01J37/295 ,  H01J2237/2614

摘要： An electron beam device includes a first electron biprism between an acceleration tube and irradiation lens systems, and an electron biprism in the image forming lens system. The first electron biprism splits the electron beam into first and second electron beams, radiated to differently positioned first and second regions on objective plane of an objective lens system having a specimen perpendicular to an optical axis. The first and second electron beams are superposed on the observation plane by the electron biprism of the image forming lens system. The superposed region of those electron beams is observed or recorded. Optical action of the irradiation lens system controls each current density of the first and second electron beams on the objective plane of the objective lens system having the specimen, and distance on electron optics between first electron biprism and the objective plane of the objective lens system having the specimen.

摘要翻译： 电子束装置包括加速管和照射透镜系统之间的第一电子双棱镜和成像透镜系统中的电子双棱镜。 第一电子双棱镜将电子束分成第一和第二电子束，辐射到具有垂直于光轴的样品的物镜系统的物镜平面上的不同位置的第一和第二区域。 第一和第二电子束由成像透镜系统的电子双棱镜叠加在观察平面上。 观察或记录这些电子束的重叠区域。 照射透镜系统的光学作用控制具有样品的物镜系统的物镜平面上的第一和第二电子束的每个电流密度，以及第一电子双棱镜和物镜系统的物镜平面之间的电子光学距离 标本。

公开(公告)号：EP0593216B1

公开(公告)日：1997-05-28

申请号：EP93308004.6

申请日：1993-10-07

申请人： HITACHI, LTD.

发明人： Takahashi, Yoshio ,  Yajima, Yusuke

IPC分类号： H01J37/26 ,  G01R33/02

CPC分类号： H01J37/268 ,  G01R33/0213 ,  H01J2237/24495 ,  H01J2237/24564 ,  H01J2237/2802

公开(公告)号：EP0669538A2

公开(公告)日：1995-08-30

申请号：EP95301077.4

申请日：1995-02-21

申请人： HITACHI, LTD.

发明人： Suzuki, Hiroshi ,  Shinada, Hiroyuki ,  Kuroda, Katsuhiro ,  Yajima, Yusuke ,  Takahashi, Yoshio ,  Nakajima, Masato ,  Saito, Hideo

IPC分类号： G01R33/02

CPC分类号： G01R33/0213 ,  H01J37/28 ,  H01J2237/221 ,  H01J2237/24564

摘要： A charged particle beam (12a, 12b) is transmitted through a specimen (14) for producing an irregular pattern as a first image. Further, a magnetic field to be measured (16) is arranged in space where a charged particle beam is passed between the specimen and an image plane thereby to produce a second image having an irregular pattern as in the foregoing case. The first image and the second image are processed to produce the deflection angle of the charged particle beam due to the magnetic field. This deflection angle is extracted from the entire positions of a cross section of the space where measurement is desired, thereby constructing projection data of a magnetic field by a charged particle beam. Furthermore, the magnetic field to be measured is rotated and the above-mentioned processing is performed from each direction to construct projection data. The projection data thus obtained and the computer tomography technique are used to determine a magnetic field at each point in space.

摘要翻译： 带电粒子束（12a，12b）通过用于产生不规则图案的样本（14）作为第一图像传输。 此外，如上所述，在被检测体和像面之间通过带电粒子束的空间内设置被测量磁场（16），由此产生具有不规则图案的第二图像。 处理第一图像和第二图像以产生由于磁场引起的带电粒子束的偏转角。 从需要测量的空间的横截面的整个位置提取该偏转角度，由此构成通过带电粒子束的磁场的投影数据。 此外，要测量的磁场旋转，并且从每个方向执行上述处理以构造投影数据。 由此获得的投影数据和计算机断层摄影技术用于确定每个空间点处的磁场。

公开(公告)号：EP2797099A2

公开(公告)日：2014-10-29

申请号：EP14165693.4

申请日：2014-04-23

申请人： Hitachi Ltd.

发明人： Sugawara, Akira ,  Shimakura, Tomokazu ,  Takahashi, Yoshio

IPC分类号： H01J37/09 ,  H01J37/20

CPC分类号： H01J37/20 ,  H01J37/09 ,  H01J37/266 ,  H01J2237/0264 ,  H01J2237/2008

摘要： The disclosed invention provides a sample holder capable of reducing or preventing the influence of a charged particle beam 11 deflected by applying a magnetic field to a sample 201 and provided with means for simply switching between a mode of observing the sample while applying a magnetic field to the sample, and a mode free of a magnetic field in which a magnetic field becomes zero completely. The sample holder includes a magnetic field generating element 301 including three or more magnetic gaps 351-353 for applying a magnetic field to a sample, a cantilever-beam-shaped sample holding element 202 that holds the sample 201 on one end thereof, and a moving mechanism that adjusts a relative position between a sample and a magnetic gap. The magnetic gaps 351-353 can be placed along an optical axis of the charged particle beam 11.

摘要翻译： 所公开的发明提供一种能够减少或防止通过对样品201施加磁场而偏转的带电粒子束11的影响的样品保持器，并且具有用于简单地在施加磁场的同时观察样品的模式之间切换的装置 样品和没有完全磁场变为零的磁场的模式。 样品架包括磁场产生元件301，该磁场产生元件301包括用于向样品施加磁场的三个或更多个磁隙351-353，在其一端保持样品201的悬臂梁形样品保持元件202， 调整样品和磁隙之间的相对位置的移动机构。 磁隙351-353可以沿带电粒子束11的光轴放置。

公开(公告)号：EP1378893A1

公开(公告)日：2004-01-07

申请号：EP03002834.4

申请日：2003-02-07

申请人： Hitachi, Ltd.

发明人： Tanahashi, Kiwamu ,  Kikugawa, Atsushi ,  Takahashi, Yoshio ,  Hosoe, Yuzuru

IPC分类号： G11B5/64 ,  G11B5/66

CPC分类号： G11B5/667 ,  G11B5/66

摘要： A perpendicular recording medium includes a perpendicular recording layer (17) formed over a substrate (11) through a soft magnetic underlayer (13, 14, 15), the soft magnetic underlayer (13, 14, 15) then being arranged to include a plurality of soft magnetic layers (13, 15) physically separated by a non-magnetic layer (14), and further, the soft magnetic layers (13, 15) being formed of nanocrystals, with these arrangements, local magnetic loops are formed between the soft magnetic layers (13, 15) that are adjacent to each other through the non-magnetic layer (14), thereby suppressing spike noise and modulation that arises from the soft magnetic underlayer (13, 14, 15).

摘要翻译： 垂直记录介质包括通过软磁性底层（13,14,15）在衬底（11）上形成的垂直记录层（17），然后软磁性底层（13,14,15）被布置为包括多个 由非磁性层（14）物理分离的软磁性层（13,15），并且还包括由纳米晶体形成的软磁性层（13,15），通过这些布置，在软质层 通过非磁性层（14）彼此相邻的磁性层（13,15），从而抑制由软磁性底层（13,14,15）产生的尖峰噪声和调制。

公开(公告)号：EP0669538A3

公开(公告)日：1996-12-11

申请号：EP95301077.4

申请日：1995-02-21

申请人： HITACHI, LTD.

发明人： Suzuki, Hiroshi ,  Shinada, Hiroyuki ,  Kuroda, Katsuhiro ,  Yajima, Yusuke ,  Takahashi, Yoshio ,  Nakajima, Masato ,  Saito, Hideo

IPC分类号： G01R33/02

CPC分类号： G01R33/0213 ,  H01J37/28 ,  H01J2237/221 ,  H01J2237/24564

摘要： A charged particle beam (12a, 12b) is transmitted through a specimen (14) for producing an irregular pattern as a first image. Further, a magnetic field to be measured (16) is arranged in space where a charged particle beam is passed between the specimen and an image plane thereby to produce a second image having an irregular pattern as in the foregoing case. The first image and the second image are processed to produce the deflection angle of the charged particle beam due to the magnetic field. This deflection angle is extracted from the entire positions of a cross section of the space where measurement is desired, thereby constructing projection data of a magnetic field by a charged particle beam. Furthermore, the magnetic field to be measured is rotated and the above-mentioned processing is performed from each direction to construct projection data. The projection data thus obtained and the computer tomography technique are used to determine a magnetic field at each point in space.

公开(公告)号：EP0593216A3

公开(公告)日：1994-06-08

申请号：EP93308004.6

申请日：1993-10-07

申请人： HITACHI, LTD.

发明人： Takahashi, Yoshio ,  Yajima, Yusuke

IPC分类号： H01J37/26 ,  G01R33/02

CPC分类号： H01J37/268 ,  G01R33/0213 ,  H01J2237/24495 ,  H01J2237/24564 ,  H01J2237/2802

摘要： When observing a magnetization image on a magnetic thin film by means of a scanning transmission electron microscope, the effect of a stray magnetic field is made smaller than that of a magnetization in order to produce a clear magnetic structure of the magnetization image. In order to reduce the effect of the stray magnetic field in comparison to that of the magnetization, the invention provides a scanning transmission electron microscope equipped with a specimen-holder driving means which can rotate the surface of a specimen 5 preferably by more than 90 degrees with an axis parallel to the optical path of an electron beam 1 taken as a center and incline the surface of the specimen 5 around a center axis 22 perpendicular to an axis 24 rotated earlier over the surface of the specimen 5 with respect to a magnetic-recording track direction and also perpendicular to the axis parallel to the optical path of the electron beam 1. The invention also provides a magnetic-recording image observing method and an image processing method.

公开(公告)号：EP0595548A1

公开(公告)日：1994-05-04

申请号：EP93308385.9

申请日：1993-10-21

申请人： HITACHI, LTD.

发明人： Yajima, Yusuke ,  Takahashi, Yoshio ,  Ichikawa, Masakazu ,  Hosoki, Shigeyuki

IPC分类号： G01R31/305

CPC分类号： G01R31/305

摘要： A disclosure is made on an apparatus for measuring an electromagnetic field distribution using a focused electron beam which can measure the electromagnetic field distribution in a specimen with a high resolution and a high reliability. The present apparatus comprises: a focused electron beam radiation system for irradiating a specimen with a focused electron beam; a specimen tilt mechanism for tilting a specimen by 180° with a tilt axis being perpendicular to the optical axis of the focused electron beam; an electron beam position detector for measuring the direction and the quantity of the deflection given to the focused electron beam when it is transmitted through the specimen; and a processing system for calculating the direction and the intensity of an electric field, and the direction and the intensity of a magnetic field separately at a point on the specimen through which the focused electron beam is transmitted from the data on the direction and the quantity of the deflection of the focused electron beam measured by the electron beam position detector before and after the turnover of the specimen by the specimen tilt mechanism. Owing to the present apparatus, an electric field and a magnetic field in a specimen can be separately observed independent of each other.

摘要翻译： 甲公开用于使用聚焦的电子束能够测量试样中的电磁场分布以高分辨率和高可靠性的电磁场分布的测量装置上制成。 本装置包括：聚焦的电子束的辐射系统，用于照射与聚焦的电子束的检体; 试样倾斜机构用于倾斜180°与倾斜轴线垂直于聚焦电子束的光轴的试样; 用于测量的方向和提供给聚焦的电子束。当它是通过样品的反式mitted偏转的量的电子束位置检测器; 和用于计算方向和电场的强度，以及方向和磁场的分别在试样上的一个点的强度，通过该聚焦的电子束是从上方向和数量的数据的反式mitted的处理系统 的前和试样倾斜机构的营业额试样之后，由电子束位置检测器测量的聚焦电子束的偏转。 由于本装置中，在电场和试样中的磁场可以分别观测的独立海誓山盟。