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公开(公告)号：EP2560185A2
公开(公告)日：2013-02-20
申请号：EP12006748.3
申请日：2004-01-29
发明人： Tanba, Yuusuke , Sato, Mitsugu , Takahashi, Kaname , Watanabe, Shunya , Nakagawa, Mine , Muto, Atsushi , Morikawa, Akinari
IPC分类号： H01J37/28 , H01J37/244
CPC分类号： H01J37/244 , H01J37/28 , H01J2237/24455 , H01J2237/2446 , H01J2237/2802
摘要： The charged particle beam device of this invention has a source of charged particles, and a charged particle optical system for focusing primary charged particle beams (3) emitted from said source and scanning the primary charged beams (3) on a sample (14). The device comprises a transmitted signal conversion member (15) for emitting secondary charged particles (12a, 12b) by collisions of dark field charged particles (18b) transmitted through the sample (14). An opening is formed in said transmitted signal conversion member (15) which opening has a size through which the transmitted charged particles (18b) can pass. The device further comprises a power supply capable of applying a positive voltage (Vc) to said opening. By controlling the positive voltage, the lower limit of the scattering angle of the dark field signal detected by a detector (13) can be controlled.
摘要翻译： 本发明的带电粒子束装置具有带电粒子源和带电粒子光学系统，所述带电粒子光学系统用于将从所述源发射的初级带电粒子束（3）聚焦并且将初级带电束（3）扫描在样本（14）上。 该装置包括透射信号转换构件（15），用于通过透过样本（14）的暗场带电粒子（18b）的碰撞来发射次级带电粒子（12a，12b）。 在所述透射信号转换部件（15）中形成开口，该开口具有所传送的带电粒子（18b）能够通过的尺寸。 该装置还包括能够向所述开口施加正电压（Vc）的电源。 通过控制正电压，可以控制由检测器（13）检测到的暗场信号的散射角度的下限。
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公开(公告)号：EP2560185A3
公开(公告)日：2013-09-04
申请号：EP12006748.3
申请日：2004-01-29
发明人： Tanba, Yuusuke , Sato, Mitsugu , Takahashi, Kaname , Watanabe, Shunya , Nakagawa, Mine , Muto, Atsushi , Morikawa, Akinari
IPC分类号： H01J37/28 , H01J37/244
CPC分类号： H01J37/244 , H01J37/28 , H01J2237/24455 , H01J2237/2446 , H01J2237/2802
摘要： The charged particle beam device of this invention has a source of charged particles, and a charged particle optical system for focusing primary charged particle beams (3) emitted from said source and scanning the primary charged beams (3) on a sample (14). The device comprises a transmitted signal conversion member (15) for emitting secondary charged particles (12a, 12b) by collisions of dark field charged particles (18b) transmitted through the sample (14). An opening is formed in said transmitted signal conversion member (15) which opening has a size through which the transmitted charged particles (18b) can pass. The device further comprises a power supply capable of applying a positive voltage (Vc) to said opening. By controlling the positive voltage, the lower limit of the scattering angle of the dark field signal detected by a detector (13) can be controlled.
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公开(公告)号：EP1450391A3
公开(公告)日：2011-03-09
申请号：EP04001955.6
申请日：2004-01-29
发明人： Tanba, Yuusuke , Sato, Mitsugu , Takahashi, Kaname , Watanabe, Shunya , Nakagawa, Mine , Muto, Atsushi , Morikawa, Akinari
IPC分类号： H01J37/26 , H01J37/244
CPC分类号： H01J37/244 , H01J37/28 , H01J2237/24455 , H01J2237/2446 , H01J2237/2802
摘要： The charged particle beam device of this invention separately detects secondary signal particles emitted from the surface of a sample, dark field signal particles scattered within and transmitted through the sample, bright field signal particles transmitted through the sample without being scattered within the sample, and thereby allows the operator to observe the image with an optimum contrast according to applications. In order to detect only the dark field transmitted signal particles scattered within the sample, among the transmitted signal particles obtained by the primary charged particle beams having transmitted through the thin film sample, the device includes a transmitted signal conversion member having an opening through which the bright field transmitted signal particles not being scattered within the sample can pass, and a detection means for detecting signals colliding against the conversion member.
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公开(公告)号：EP2560185B1
公开(公告)日：2014-12-10
申请号：EP12006748.3
申请日：2004-01-29
发明人： Tanba, Yuusuke , Sato, Mitsugu , Takahashi, Kaname , Watanabe, Shunya , Nakagawa, Mine , Muto, Atsushi , Morikawa, Akinari
IPC分类号： H01J37/28 , H01J37/244
CPC分类号： H01J37/244 , H01J37/28 , H01J2237/24455 , H01J2237/2446 , H01J2237/2802
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公开(公告)号：EP1450391B1
公开(公告)日：2013-07-03
申请号：EP04001955.6
申请日：2004-01-29
发明人： Tanba, Yuusuke , Sato, Mitsugu , Takahashi, Kaname , Watanabe, Shunya , Nakagawa, Mine , Muto, Atsushi , Morikawa, Akinari
IPC分类号： H01J37/26 , H01J37/244
CPC分类号： H01J37/244 , H01J37/28 , H01J2237/24455 , H01J2237/2446 , H01J2237/2802
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公开(公告)号：EP1450391A2
公开(公告)日：2004-08-25
申请号：EP04001955.6
申请日：2004-01-29
发明人： Tanba, Yuusuke , Sato, Mitsugu , Takahashi, Kaname , Watanabe, Shunya , Nakagawa, Mine , Muto, Atsushi , Morikawa, Akinari
IPC分类号： H01J37/26
CPC分类号： H01J37/244 , H01J37/28 , H01J2237/24455 , H01J2237/2446 , H01J2237/2802
摘要： The charged particle beam device of this invention separately detects secondary signal particles emitted from the surface of a sample, dark field signal particles scattered within and transmitted through the sample, bright field signal particles transmitted through the sample without being scattered within the sample, and thereby allows the operator to observe the image with an optimum contrast according to applications. In order to detect only the dark field transmitted signal particles scattered within the sample, among the transmitted signal particles obtained by the primary charged particle beams having transmitted through the thin film sample, the device includes a transmitted signal conversion member having an opening through which the bright field transmitted signal particles not being scattered within the sample can pass, and a detection means for detecting signals colliding against the conversion member.
摘要翻译： 本发明的带电粒子束装置分别检测从样品表面发射的二次信号颗粒，散射在样品内并透过样品的暗场信号颗粒，通过样品透射的亮场信号颗粒，而不分散在样品内， 允许操作者根据应用以最佳对比度观察图像。 为了仅检测在样品内散射的暗场传输信号颗粒，在通过薄膜样品传输的初级带电粒子束获得的透射信号颗粒中，该装置包括具有开口的透射信号转换构件， 未被分散在样品内的亮场发射信号粒子可以通过，以及用于检测与转换构件相撞的信号的检测装置。
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