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13 条记录 (耗时 0.013 秒)

    Charged particle beam device
    2.
    发明公开
    Charged particle beam device 有权
    的带电粒子射线装置

    公开(公告)号：EP1450391A3

    公开(公告)日：2011-03-09

    申请号：EP04001955.6

    申请日：2004-01-29

    申请人： Hitachi High-Technologies Corporation

    发明人： Tanba, Yuusuke ,  Sato, Mitsugu ,  Takahashi, Kaname ,  Watanabe, Shunya ,  Nakagawa, Mine ,  Muto, Atsushi ,  Morikawa, Akinari

    IPC分类号： H01J37/26 ,  H01J37/244

    CPC分类号： H01J37/244 ,  H01J37/28 ,  H01J2237/24455 ,  H01J2237/2446 ,  H01J2237/2802

    摘要： The charged particle beam device of this invention separately detects secondary signal particles emitted from the surface of a sample, dark field signal particles scattered within and transmitted through the sample, bright field signal particles transmitted through the sample without being scattered within the sample, and thereby allows the operator to observe the image with an optimum contrast according to applications. In order to detect only the dark field transmitted signal particles scattered within the sample, among the transmitted signal particles obtained by the primary charged particle beams having transmitted through the thin film sample, the device includes a transmitted signal conversion member having an opening through which the bright field transmitted signal particles not being scattered within the sample can pass, and a detection means for detecting signals colliding against the conversion member.

    Charged particle beam apparatus and irradiation method
    3.
    发明公开
    Charged particle beam apparatus and irradiation method 有权
    Geladener-Teilchen-Strahl Apparat und Bestrahlungsverfahren

    公开(公告)号：EP1398818A3

    公开(公告)日：2005-12-07

    申请号：EP03020626.2

    申请日：2003-09-10

    申请人： Hitachi High-Technologies Corporation

    发明人： Sato, Mitsugu ,  Todokoro, Hideo ,  Ose, Yoichi ,  Ezumi, Makoto ,  Arai, Noriki ,  Doi, Takashi

    IPC分类号： H01J37/153

    CPC分类号： H01J37/153 ,  H01J2237/1506 ,  H01J2237/1534 ,  H01J2237/28

    摘要： A charged particle beam apparatus produces little reduction in resolution when the beam is inclined with respect to a sample. The trajectory of a primary beam 4 is deflected by a deflector or changed by a movable aperture such that the beam is incident on a plurality of lenses 6 and 7 off the axes thereof. A means is provided to control the off-axis trajectory of the beam such that an aberration produced by the objective lens 7 when the beam is inclined can be canceled by an aberration produced by the other lens 6.

    摘要翻译： 控制单元控制光束（4）在透镜上的入射位置，使得由物镜（7）和其它透镜产生的离轴色差被抵消。 样品照射方法也包括独立权利要求。

    Charged particle beam apparatus and irradiation method
    4.
    发明公开
    Charged particle beam apparatus and irradiation method 有权
    Gerätund Bestrahlungsverfahrenfüreinen geladenen Teilchenstrahl

    公开(公告)号：EP1398818A2

    公开(公告)日：2004-03-17

    申请号：EP03020626.2

    申请日：2003-09-10

    申请人： Hitachi High-Technologies Corporation

    发明人： Sato, Mitsugu ,  Todokoro, Hideo ,  Ose, Yoichi ,  Ezumi, Makoto ,  Arai, Noriki ,  Doi, Takashi

    IPC分类号： H01J37/153

    CPC分类号： H01J37/153 ,  H01J2237/1506 ,  H01J2237/1534 ,  H01J2237/28

    摘要： A charged particle beam apparatus produces little reduction in resolution when the beam is inclined with respect to a sample. The trajectory of a primary beam 4 is deflected by a deflector or changed by a movable aperture such that the beam is incident on a plurality of lenses 6 and 7 off the axes thereof. A means is provided to control the off-axis trajectory of the beam such that an aberration produced by the objective lens 7 when the beam is inclined can be canceled by an aberration produced by the other lens 6.

    摘要翻译： 控制单元控制光束（4）在透镜上的入射位置，使得由物镜（7）和其它透镜产生的离轴色差被抵消。 样品照射方法也包括独立权利要求。

    Charged particle beam apparatus and irradiation method
    5.
    发明公开
    Charged particle beam apparatus and irradiation method 有权
    Strahlungsvorrichtungfürgeladene Teilchen und Strahlungsverfahren

    公开(公告)号：EP2023373A2

    公开(公告)日：2009-02-11

    申请号：EP08017746.2

    申请日：2003-09-10

    申请人： Hitachi High-Technologies Corporation

    发明人： Sato, Mitsugu ,  Todokoro, Hideo ,  Ose, Yoichi ,  Ezumi, Makoto ,  Arai, Noriaki ,  Doi, Takashi

    IPC分类号： H01J37/153

    CPC分类号： H01J37/153 ,  H01J2237/1506 ,  H01J2237/1534 ,  H01J2237/28

    摘要： A charged particle beam apparatus produces little reduction in resolution when the beam is inclined with respect to a sample. The trajectory of a primary beam (4) is deflected by a deflector or changed by a movable aperture such that the beam is incident on a plurality of lenses (5 and 7) off the axes thereof. A means is provided to control the off-axis trajectory of the beam such that an aberration produced by the objective lens (7) when the beam is inclined can be cancelled by an aberration produced by the other lens (5).

    摘要翻译： 当束相对于样品倾斜时，带电粒子束装置的分辨率几乎不降低。 主光束（4）的轨迹被偏转器偏转或由可移动的光阑改变，使得光束从其轴线入射到多个透镜（5和7）上。 提供了一种用于控制光束的离轴轨迹的装置，使得当光束倾斜时由物镜（7）产生的像差可以被另一透镜（5）产生的像差消除。

    Charged particle beam device
    10.
    发明公开
    Charged particle beam device 有权
    DilfeldelddetektorTeilchenstrahlgerätmit Dunkelfelddetektor

    公开(公告)号：EP1450391A2

    公开(公告)日：2004-08-25

    申请号：EP04001955.6

    申请日：2004-01-29

    申请人： Hitachi High-Technologies Corporation

    发明人： Tanba, Yuusuke ,  Sato, Mitsugu ,  Takahashi, Kaname ,  Watanabe, Shunya ,  Nakagawa, Mine ,  Muto, Atsushi ,  Morikawa, Akinari

    IPC分类号： H01J37/26

    CPC分类号： H01J37/244 ,  H01J37/28 ,  H01J2237/24455 ,  H01J2237/2446 ,  H01J2237/2802

    摘要： The charged particle beam device of this invention separately detects secondary signal particles emitted from the surface of a sample, dark field signal particles scattered within and transmitted through the sample, bright field signal particles transmitted through the sample without being scattered within the sample, and thereby allows the operator to observe the image with an optimum contrast according to applications. In order to detect only the dark field transmitted signal particles scattered within the sample, among the transmitted signal particles obtained by the primary charged particle beams having transmitted through the thin film sample, the device includes a transmitted signal conversion member having an opening through which the bright field transmitted signal particles not being scattered within the sample can pass, and a detection means for detecting signals colliding against the conversion member.

    摘要翻译： 本发明的带电粒子束装置分别检测从样品表面发射的二次信号颗粒，散射在样品内并透过样品的暗场信号颗粒，通过样品透射的亮场信号颗粒，而不分散在样品内， 允许操作者根据应用以最佳对比度观察图像。 为了仅检测在样品内散射的暗场传输信号颗粒，在通过薄膜样品传输的初级带电粒子束获得的透射信号颗粒中，该装置包括具有开口的透射信号转换构件， 未被分散在样品内的亮场发射信号粒子可以通过，以及用于检测与转换构件相撞的信号的检测装置。