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1.发明公开Reducing the effect of glass charging in mems devices 审中-公开在MEMS-Vorrichtungen的Verringerung der Wirkung von Glasladung
公开(公告)号：EP2824066A1
公开(公告)日：2015-01-14
申请号：EP14173549.8
申请日：2014-06-23
发明人： Weber, Mark W. , Hanson, Timothy J.
IPC分类号： B81C1/00
CPC分类号： G01P15/08 , B81C1/00698 , G01P2015/0862 , G01P2015/0871 , G01P2015/0874
摘要： A method of controlling exposed glass charging in a micro-electro-mechanical systems (MEMS) device is disclosed. The method includes providing a MEMS device comprising a proof mass (54) positioned apart from at least one sense plate (60) and at least one outboard metallization layer(64), wherein at least one conductive glass layer (62) is coupled to the sense plate and the outboard metallization layer, the conductive glass layer including at least one exposed glass portion (66) near the proof mass; and applying a first voltage to the sense plate and a second voltage to the outboard metallization layer. The first voltage is separated from the second voltage by a predetermined voltage level such that the exposed glass portion has an average voltage corresponding to a voltage midway between the first voltage and the second voltage.
摘要翻译： 公开了一种在微机电系统（MEMS）装置中控制暴露的玻璃充电的方法。 该方法包括提供MEMS器件，其包括与至少一个感测板（60）和至少一个外侧金属化层（64）分开定位的校准质量块（54），其中至少一个导电玻璃层（62）耦合到 感测板和外侧金属化层，导电玻璃层包括靠近证明块的至少一个暴露的玻璃部分（66）; 以及向所述感测板施加第一电压，并向所述外侧金属化层施加第二电压。 第一电压与第二电压分开预定的电压电平，使得暴露的玻璃部分具有对应于第一电压和第二电压之间的电压的平均电压。
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2.发明授权Mems tuning fork gyro sensitive to rate of rotation about two axes 有权Auf Rotationsrate um zwei Achsen敏感剂MEMS-Stimmgabelkreisel
公开(公告)号：EP1990608B1
公开(公告)日：2017-04-19
申请号：EP08156021.1
申请日：2008-05-09
发明人： Sutton, Michael S. , Weber, Mark W.
IPC分类号： G01C19/5726
CPC分类号： G01C19/5726
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3.发明公开Gyroscope dynamic motor amplitude compensation for enhanced rate estimation during startup 有权在起动过程中对改进的速率估测Gyroskopdynamischer马达振幅补偿
公开(公告)号：EP2533011A2
公开(公告)日：2012-12-12
申请号：EP12169172.9
申请日：2012-05-23
IPC分类号： G01C19/00
CPC分类号： G01C19/00 , G01C19/04 , G01C19/5776 , G01C25/005 , Y10T74/1229
摘要： A system for gyroscope dynamic motor amplitude compensation during startup comprises various program modules, including an a-priori motor amplitude module configured to generate an a-priori motor amplitude signal based on a model of gyroscope motor amplitude growth during startup; a steady state scale factor module configured to generate a steady state scale factor signal; and a dynamic motor amplitude compensation module configured to receive the a-priori motor amplitude signal, and the steady state scale factor signal. During startup, rate motion is sensed by the gyroscope and a sensed rate signal is output by the gyroscope. The dynamic motor amplitude compensation module receives a measured motor amplitude signal from the gyroscope, the a-priori motor amplitude signal, or a combination thereof, and outputs a time varying scale factor that is applied to the sensed rate signal to produce an accurate sensed rate from the gyroscope during the startup phase.
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公开(公告)号：EP2985567A2
公开(公告)日：2016-02-17
申请号：EP15179588.7
申请日：2015-08-03
IPC分类号： G01C19/5712 , G01C19/5776
CPC分类号： G01C19/5712 , B81B7/02 , B81C1/00301 , B81C2203/0792 , G01C19/5776
摘要： Systems and methods for improving MEMS gyroscope start time are provided. In one embodiment, a circuit board (105) for a MEMS gyroscope system (100) comprises: a proof mass assembly (110); a proof mass control loop (135) coupled to the proof mass assembly (110) by a first proof mass motion sensor pickup line (120) and a second proof mass motion sensor pickup line (122), where the proof mass control loop (135) generates a set of drive signals (140,142)that operate the proof mass assembly (110) using a first capacitive signal from the first proof mass motion sensor pickup line (120) and a second capacitive signal from the second proof mass motion sensor pickup line (122); and a tunable capacitive coupler (158, 158A) connected to at least one of the first or the second proof mass motion sensor pickup lines (120, 122), where the tunable capacitive coupler varies at least one of the first and second charge signals as a function of the drive signals (140,142).
摘要翻译： 提供了用于改善MEMS陀螺仪开始时间的系统和方法。 在一个实施例中，用于MEMS陀螺仪系统（100）的电路板（105）包括：检验质量组件（110）; 通过第一检测质量运动传感器拾取线路（120）和第二检测质量运动传感器检测线路（122）耦合到检测质量组件（110）的检测质量控制环路（135），其中检测质量控制环路（135） ）使用来自第一检测质量运动传感器拾取线路（120）的第一电容信号和来自第二检测质量运动传感器拾取线路（120）的第二电容信号生成一组驱动信号（140,142） （122）; 和连接到所述第一或第二检测质量体传感器拾取线路（120,122）中的至少一个的可调电容耦合器（158,158A），其中所述可调电容耦合器将所述第一和第二电荷信号中的至少一个改变为 驱动信号（140,142）的功能。
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5.发明授权Gyroscope dynamic motor amplitude compensation for enhanced rate estimation during startup 有权陀螺仪动态电机幅度补偿，用于启动期间增强速率估计
公开(公告)号：EP2533011B1
公开(公告)日：2017-11-08
申请号：EP12169172.9
申请日：2012-05-23
IPC分类号： G01C19/00 , G01C19/04 , G01C19/5776 , G01C25/00
CPC分类号： G01C19/00 , G01C19/04 , G01C19/5776 , G01C25/005 , Y10T74/1229
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6.发明公开Mems device mechanism enhancement for robust operation through severe shock and acceleration 审中-公开通过剧烈震动和加速稳定工作的MEMS器件机构
公开(公告)号：EP2833097A3
公开(公告)日：2015-05-27
申请号：EP14177565.0
申请日：2014-07-17
IPC分类号： G01C19/574
CPC分类号： G01C19/574 , G01C19/5783 , G01P2015/0871 , Y10T29/49002
摘要： A micro-electro-mechanical systems (MEMS) device comprises at least one proof mass configured to have a first voltage and a motor motion in a first horizontal direction. At least one sense plate is separated from the proof mass by a sense gap, with the sense plate having an inner surface facing the proof mass and a second voltage different than the first voltage. A set of stop structures are on the inner surface of the sense plate and are electrically isolated from the sense plate. The stop structures are configured to prevent contact of the inner surface of the sense plate with the proof mass in a vertical direction. The stop structures have substantially the same voltage as that of the proof mass, and are dimensioned to minimize energy exchange upon contact with the proof mass during a shock or acceleration event.
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公开(公告)号：EP2985567B1
公开(公告)日：2017-06-21
申请号：EP15179588.7
申请日：2015-08-03
IPC分类号： B81C1/00 , B81B7/02 , G01C19/5712 , G01C19/5776
CPC分类号： G01C19/5712 , B81B7/02 , B81C1/00301 , B81C2203/0792 , G01C19/5776
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8.发明公开Gyroscope dynamic motor amplitude compensation for enhanced rate estimation during startup 有权Gyroskopdynamischer Motoramplitudenausgleichfüreine verbesserteRatenschätzungwährenddes Startens
公开(公告)号：EP2533011A3
公开(公告)日：2016-10-05
申请号：EP12169172.9
申请日：2012-05-23
IPC分类号： G01C19/00 , G01C19/04 , G01C19/5776 , G01C25/00
CPC分类号： G01C19/00 , G01C19/04 , G01C19/5776 , G01C25/005 , Y10T74/1229
摘要： A system for gyroscope dynamic motor amplitude compensation during startup comprises various program modules, including an a-priori motor amplitude module configured to generate an a-priori motor amplitude signal based on a model of gyroscope motor amplitude growth during startup; a steady state scale factor module configured to generate a steady state scale factor signal; and a dynamic motor amplitude compensation module configured to receive the a-priori motor amplitude signal, and the steady state scale factor signal. During startup, rate motion is sensed by the gyroscope and a sensed rate signal is output by the gyroscope. The dynamic motor amplitude compensation module receives a measured motor amplitude signal from the gyroscope, the a-priori motor amplitude signal, or a combination thereof, and outputs a time varying scale factor that is applied to the sensed rate signal to produce an accurate sensed rate from the gyroscope during the startup phase.
摘要翻译： 启动期间用于陀螺仪动态电动机幅度补偿的系统包括各种程序模块，包括先验电动机幅度模块，其被配置为基于启动期间陀螺仪电动机振幅增长的模型生成先验电动机幅度信号; 配置为产生稳态比例因子信号的稳态比例因子模块; 以及动态电动机幅度补偿模块，被配置为接收先验电动机幅度信号和稳态比例因子信号。 在启动期间，陀螺仪检测速率运动，并且由陀螺仪输出感测的速率信号。 动态电动机幅度补偿模块从陀螺仪接收测量的电动机幅度信号，先验电动机幅度信号或其组合，并输出应用于感测速率信号的时变比例因子，以产生准确的感测速率 在启动阶段从陀螺仪。
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公开(公告)号：EP2985567A3
公开(公告)日：2016-03-16
申请号：EP15179588.7
申请日：2015-08-03
IPC分类号： G01C19/5712 , G01C19/5776
CPC分类号： G01C19/5712 , B81B7/02 , B81C1/00301 , B81C2203/0792 , G01C19/5776
摘要： Systems and methods for improving MEMS gyroscope start time are provided. In one embodiment, a circuit board (105) for a MEMS gyroscope system (100) comprises: a proof mass assembly (110); a proof mass control loop (135) coupled to the proof mass assembly (110) by a first proof mass motion sensor pickup line (120) and a second proof mass motion sensor pickup line (122), where the proof mass control loop (135) generates a set of drive signals (140,142)that operate the proof mass assembly (110) using a first capacitive signal from the first proof mass motion sensor pickup line (120) and a second capacitive signal from the second proof mass motion sensor pickup line (122); and a tunable capacitive coupler (158, 158A) connected to at least one of the first or the second proof mass motion sensor pickup lines (120, 122), where the tunable capacitive coupler varies at least one of the first and second charge signals as a function of the drive signals (140,142).
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公开(公告)号：EP2784444A3
公开(公告)日：2015-03-11
申请号：EP14160702.8
申请日：2014-03-19
发明人： Sutton, Michael S. , Weber, Mark W.
IPC分类号： G01C19/5621 , G01C19/5726
CPC分类号： G01C19/5621 , G01C19/5614 , G01C19/5726
摘要： Embodiments of the subject application provide a method for operating a micro-electro-mechanical system (MEMS) tuning fork gyroscope. The method includes oscillating a voltage on a first sense electrode (107) out-of-plane from and proximate a first side of a first proof mass (102) between a first voltage and a second voltage at a first frequency. The method also includes oscillating a voltage on a second sense electrode (108) out-of-plane from and proximate a second side of the first proof mass (102) between the first voltage and the second voltage at the first frequency and 180 degrees out-of-phase with the voltage on the first sense electrode (107). The method also includes generating a rate signal corresponding to a rotation rate of the first proof mass (102) by first demodulating an out-of-plane signal from the first proof mass (102) at the first frequency and second demodulating the out-of-plane signal in phase with in-plane motion of the first proof mass (102).
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