Patent search ap:("IBM") AND inv:"GRIBELYUK MICHAEL A" Page 1

1.

发明公开
TiC AS A THERMALLY STABLE p-METAL CARBIDE ON HIGH k SiO2 GATE STACKS 有权
Title translation: TIC热稳定P金属碳化物在SiO2上栅堆叠高K型

公开(公告)号：EP1842240A4

公开(公告)日：2009-10-14

申请号：EP05826022

申请日：2005-12-02

Applicant: IBM

Inventor： CALLEGARI ALESSANDRO C , GRIBELYUK MICHAEL A , LACEY DIANNE L , MCFEELY FENTON R , SAENGER KATHERINE L , ZAFAR SUFI

IPC: H01L21/28 , C23C14/06 , C23C14/34 , H01L29/49 , H01L29/51

CPC classification number: H01L29/4966 , C23C14/0036 , C23C14/0635 , H01L21/28088 , H01L29/513 , H01L29/517 , H01L29/665

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