Abstract:
A plate (10) for use in mixing and testing materials in the pharmaceutical industry is formed by a method in which apertures (22) (24) in a set of greensheets are formed by a material removal process, at least some of the apertures (25) being filled with a fugitive material (222) that escapes during sintering.
Abstract:
Structures and methods are provided for temporarily bonding handler wafers to device wafers using bonding structures that include one or more releasable layers which are laser-ablatable using mid-wavelength infrared radiation